Applications for low-temperature cofired ceramics (LTCC) and high-temperature cofired ceramics (HTCC) are advancing to higher frequencies. In order to design ceramic microsystems and electronic packages, the electrical properties of materials must be well characterized over a broad frequency range. In this study, the dielectric properties of commercial aluminum oxide (Al2O3) with different glass loadings are characterized using three different measurement techniques: the split-post cavity, terahertz (THz) time-domain spectroscopy, and Fourier transform IR spectroscopy (FTIR). Specifically, the dielectric properties will be characterized from 10 GHz to IR frequencies. A split-post cavity was employed for determination of dielectric properties in the 10 GHz range. A broadband THz spectroscopy technique was used to characterize the specimens using measured time-domain transmission data. The dielectric constant and loss were extracted from the sample's frequency-domain transmission characteristics, providing data between 100 GHz and 2 THz. Additionally, FTIR was used to characterize the samples from ~33 to 3300 cm−1 (~1–100 THz). The measurements from the three techniques are compared, and dielectric constant and loss data will be presented for commercial and experimental ceramic systems from 10 GHz to IR frequencies.
Tunable high-κ ZrxAl1−xOy thin film dielectrics from all-inorganic aqueous precursor solutions
