Hexafluoroacetylacetonate Cu Vinylcyclohexane as a Liquid Precursor for Low-Temperature Chemical Vapor Deposition of Copper Thin Films
1999 ◽
Vol 2
(1)
◽
pp. 22
◽
Keyword(s):
Keyword(s):
1990 ◽
pp. 217-222
1992 ◽
Vol 139
(4)
◽
pp. 1151-1159
◽
Keyword(s):
1989 ◽
Vol 24
(2)
◽
pp. 213-219
◽
1998 ◽
Vol 21
(1-4)
◽
pp. 355-366
◽
Keyword(s):
2000 ◽
Vol 18
(4)
◽
pp. 1590-1594
◽
1996 ◽
Vol 288
(1-2)
◽
pp. 116-119
◽