Electrical Stability and Reliability of Ultralow Dielectric Constant Porous Carbon-Doped Oxide film for Copper Interconnect

2005 ◽  
Vol 152 (10) ◽  
pp. G766 ◽  
Author(s):  
Kuo-Lung Fang ◽  
Bing-Yue Tsui
2014 ◽  
Vol 11 (2) ◽  
pp. 690-694
Author(s):  
Baghdad Science Journal

Films of silver oxide of different thickness have been prepared by the chemical spray paralysis. Transmission and absorption spectra have recorded in order to study the effect of increasing thickness on some optical parameter such as reflectance, refractive index , and dielectric constant in its two parts . This study reveals that all these paramters affect by increasing the thickness .


2014 ◽  
Vol 3 (1) ◽  
pp. 49-55 ◽  
Author(s):  
Wei Mai ◽  
Feng Wen ◽  
Dong Xie ◽  
Yongxiang Leng ◽  
Zhonglin Mu

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