Electrical Stability and Reliability of Ultralow Dielectric Constant Porous Carbon-Doped Oxide film for Copper Interconnect
2005 ◽
Vol 152
(10)
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pp. G766
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Keyword(s):
1978 ◽
Vol 17
(12)
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pp. 2085-2089
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2017 ◽
Vol 9
(24)
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pp. 20963-20973
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2014 ◽
Vol 3
(1)
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pp. 49-55
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Keyword(s):