Future Technology Proposal for Damascene Process Using All Wet Electrochemical Technique

2019 ◽  
Vol 19 (24) ◽  
pp. 67-73 ◽  
Author(s):  
Tetsuya Osaka ◽  
Masahiro Yoshino ◽  
Yosi Shacham-Diamand



2003 ◽  
Vol 766 ◽  
Author(s):  
J. Gambino ◽  
T. Stamper ◽  
H. Trombley ◽  
S. Luce ◽  
F. Allen ◽  
...  

AbstractA trench-first dual damascene process has been developed for fat wires (1.26 μm pitch, 1.1 μm thickness) in a 0.18 μm CMOS process with copper/fluorosilicate glass (FSG) interconnect technology. The process window for the patterning of vias in such deep trenches depends on the trench depth and on the line width of the trench, with the worse case being an intermediate line width (lines that are 3X the via diameter). Compared to a single damascene process, the dual damascene process has comparable yield and reliability, with lower via resistance and lower cost.





Author(s):  
Z. G. Song ◽  
S. P. Neo ◽  
S. K. Loh ◽  
C. K. Oh

Abstract New process will introduce new failure mechanisms during microelectronic device manufacturing. Even if the same defect, its root causes can be different for different processes. For aluminum(Al)-tungsten(W) metallization, the root cause of metal bridging is quite simple and mostly it is blocked etch or under-etch. But, for copper damascene process, the root causes of metal bridging are complicated. This paper has discussed the various root causes of metal bridging for copper damascene process, such as those related to litho-etch issue, copper CMP issue, copper corrosion issue and so on.



2020 ◽  
Author(s):  
Muhammad Jee ◽  
Alsa Khan

BACKGROUND Understanding teens' relationship with technology is a pressing topic in this digital era. There seem to be both benefit and harmful implications that originate from use of technology by teens. Approximately 95% of teenagers have access to a smartphone, and several studies show a positive correlation between screen addiction and trends of Anxiety and Depression. While, at the same time, research shows that two-thirds of teenagers believe that technology is a necessity for connecting and making new friends. OBJECTIVE The aim of this research is to understand teens’ perceptions of their own and others’ relationship with personal technology and what future relationships do teens aspire to have with their technology. This will be fundamental in helping designers, healthcare practitioners and youth counselors inform design in technology accordingly. METHODS This research paper explores teens and technology relationship via three lenses. Lens-1 is teens' perception of their current relationship with their personal technology as users. Lens-2 is teens' perception of others' (parents, siblings or friends) relationship with personal technology as bystanders. Lens-3 is teens’ aspiration of how they wish to relate to their personal technology. We conducted an online survey with 619 teens in the 13-19 years age range. RESULTS We found that teens selected 'Essential,' 'Distractive,' and 'Addictive' most commonly to describe their own and others' relationship with personal technology. Whereas teens selected 'Provides an escape' more to describe their own relationship with technology. In contrast, they selected 'It's just a tool' and 'Creates Barrier' more to describe others' relationship with technology. These trends are consistent across ages and genders. Additionally, we found that 13-15 year-olds, particularly the majority of females in this age range, wish to see their future technology as their 'best friend.' However, 16-17 year-olds’ top choice was 'I don't believe in personal connection with mobile technology,’ and 18-19 year-olds’ top choice was 'My personal assistant.’ CONCLUSIONS Our three lenses approach is holistic as it allowed comparison of how teens perceive their relationship with personal technology as users vs. bystanders and from current vs. aspirational perspectives. This research not just confirms what is already known, but uncovers critical new associations more exclusive to teens' own relationship with technology. This paper presents related design implications to inform personal tech design thinking, including our guideline to shift 'user experience design' process to 'user relationship design.'



1987 ◽  
Vol 52 (6) ◽  
pp. 1386-1396 ◽  
Author(s):  
Ján Mocák ◽  
Michal Németh ◽  
Mieczyslaw Lapkowski ◽  
Jerzy W. Strojek

A spectrocoulometric macrocell with a direct-view optical probe was designed and constructed, where the optical signal is transferred by light-conducting glass or quartz fibres permitting to work at wavelengths above 410 or 300 nm. The method of measurement on the proposed equipment is described; it was tested in the study of the mechanism and kinetics of oxidation of Fe(bipy)32+ ions (bipy = 2,2'-bipyridyl) with the use of potentiostatic coulometric electrolysis with open-circuit relaxation at a suitable time. The primary product of electrolysis, Fe(bipy)33+, undergoes a follow-up hydrolytic reaction with the formation of a binuclear complex. The rate constant of the reaction of the first order involves the contributions, kBi, from all bases present in solution; the corresponding values for H2O, OH-, bipy, and CH3COO- ions at a ionic strength 0·5 mol dm-3 and 25 °C were determined as kOH = (5·0 ± 0·6) . 105 mol-1 dm3 s-1, kbipy = (1·3 ± 0·2) . 10-1 mol-1 dm3 s-1, kAc = (5·8 ± 1·0) . 10-2 mol-1 dm3 s-1, and kH2O is not significant with respect to experimental errors.



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