Purpose: The paper presents the results of microstructure, surface development and
thickness of the oxide layer on the pure titanium Grade 2 after mechanical activation and
heat treatment (550°C/5h).
Design/methodology/approach: Studies show that it is possible to control the thickness
of the oxide layer by using different materials to change the roughness of surface - mechanical
activation before heat treatment. After mechanical activation and heat treatment, the
results of the thickness of the oxide layer as well as a level of surface development were
obtained, presented and discussed.
Findings: The conducted research have proved that mechanical activation of the surface
which cause increase of surface development results in greater thickness of oxide layer which
is formed during heat treatment. Nevertheless mechanical activation that results in decrease
of surface development, such as polishing, results in decrease of oxide layer thickness.
Research limitations/implications: The conducted research have showed up that
mechanical activation of the surface which cause increase of surface development results
in greater thickness of oxide layer which is formed during heat treatment. Nevertheless,
mechanical activation that results in decrease of surface development, such as polishing,
results in decrease of oxide layer thickness.
Practical implications: are possible using similar method for passivation titanium alloys
for medical application.
Originality/value: The paper presents the possibility of using mechanical preactivation of
surface before heat treatment passivation.
Effect of the Chemical Oxide Layer Thickness on the Interfacial Quality
of ALD-grown HfO2 on Silicon
