A Silicon Nitride MIM Capacitor for Analog/Mixed-Signal Integrated
Circuit using Manufacturable Atomic Layer Deposition Equipment
Keyword(s):
Keyword(s):
Keyword(s):
2020 ◽
Vol 38
(6)
◽
pp. 062406
Keyword(s):
Keyword(s):
Keyword(s):
2014 ◽
Vol 211
(9)
◽
pp. 2166-2171
◽
Keyword(s):
2019 ◽
Vol 48
(4)
◽
pp. 229-235
◽
Keyword(s):