Low Power Consumption and High Sensitivity Carbon Monoxide Gas Sensor Using Indium Oxide Nanowire

In this study, the micro gas sensor for NOx gas was fabricated by using a MEMS technology and sol-gel process. The sensing electrode and micro heater were designed to be a co-planar typed structure in the Pt thin film layer. The fabricated micro platform had a low power consumption of 67 mW at 2.0 V of heater voltage and 300°C of operating temperature. Indium oxide as a sensing material for NOx gas was synthesized by a sol-gel process with indium isopropoxide. The particle size of synthesized In2O3 was identified as about 50 nm. The maximum gas sensitivity as relative resistance (Rs = Rgas / Rair) occurred at 300°C with the value of 8.0 at 1 ppm NO2 gas. The present study shows that a MEMS-based gas sensor is a potential candidate for the automobile AQS (air quality system) gas sensor with many advantages of small dimension, high sensitivity, short response time and low power consumption.

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Hydrogen gas sensor of Pd‐functionalised AlGaN/GaN heterostructure with high sensitivity and low‐power consumption

Electronics Letters ◽

10.1049/el.2017.2107 ◽

2017 ◽

Vol 53 (17) ◽

pp. 1200-1202 ◽

Cited By ~ 4

Author(s):

J.‐H. Choi ◽

M.‐G. Jo ◽

S.‐W. Han ◽

H. Kim ◽

S.‐H. Kim ◽

...

Keyword(s):

Power Consumption ◽

Low Power ◽

Gas Sensor ◽

High Sensitivity ◽

Hydrogen Gas ◽

Low Power Consumption ◽

Gan Heterostructure

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Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices

Sensors ◽

10.3390/s19020374 ◽

2019 ◽

Vol 19 (2) ◽

pp. 374 ◽

Cited By ~ 7

Author(s):

Ayoub Lahlalia ◽

Olivier Le Neel ◽

Ravi Shankar ◽

Siegfried Selberherr ◽

Lado Filipovic

Keyword(s):

Metal Oxide ◽

Power Consumption ◽

Low Power ◽

Gas Sensor ◽

High Sensitivity ◽

Fast Response ◽

Low Power Consumption ◽

Response Characteristics ◽

The Impact ◽

Semiconducting Metal Oxide

Semiconducting metal oxide (SMO) gas sensors were designed, fabricated, and characterized in terms of their sensing capability and the thermo-mechanical behavior of the micro-hotplate. The sensors demonstrate high sensitivity at low concentrations of volatile organic compounds (VOCs) at a low power consumption of 10.5 mW. In addition, the sensors realize fast response and recovery times of 20 s and 2.3 min, respectively. To further improve the baseline stability and sensing response characteristics at low power consumption, a novel sensor is conceived of and proposed. Tantalum aluminum (TaAl) is used as a microheater, whereas Pt-doped SnO2 is used as a thin film sensing layer. Both layers were deposited on top of a porous silicon nitride membrane. In this paper, two designs are characterized by simulations and experimental measurements, and the results are comparatively reported. Simultaneously, the impact of a heat pulsing mode and rubber smartphone cases on the sensing performance of the gas sensor are highlighted.

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Low-voltage, high-sensitivity and high-reliability bimodal sensor array with fully inkjet-printed flexible conducting electrode for low power consumption electronic skin

Nano Energy ◽

10.1016/j.nanoen.2017.09.024 ◽

2017 ◽

Vol 41 ◽

pp. 301-307 ◽

Cited By ~ 42

Author(s):

Kyungkwan Kim ◽

Minhyun Jung ◽

Bumjin Kim ◽

Jihoon Kim ◽

Kwanwoo Shin ◽

...

Keyword(s):

Power Consumption ◽

Low Power ◽

Sensor Array ◽

Low Voltage ◽

High Reliability ◽

High Sensitivity ◽

Low Power Consumption ◽

Electronic Skin ◽

Conducting Electrode

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Fabrication and Characteristics of Micro Platform for Micro Gas Sensor with Low Power Consumption

Journal of Sensor Science and Technology ◽

10.5369/jsst.2011.20.5.317 ◽

2011 ◽

Vol 20 (5) ◽

pp. 317-321 ◽

Cited By ~ 1

Author(s):

Woong-Jin Jang ◽

Kwang-Bum Park ◽

In-Ho Kim ◽

Soon-Sup Park ◽

Hyo-Derk Park ◽

...

Keyword(s):

Power Consumption ◽

Low Power ◽

Gas Sensor ◽

Low Power Consumption ◽

Micro Gas Sensor

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A novel magnetic-catalytic CMOS MEMS compatible gas sensor with ultra low power consumption

2012 IEEE Sensors ◽

10.1109/icsens.2012.6411302 ◽

2012 ◽

Cited By ~ 4

Author(s):

Chih-Jen Cheng ◽

Chih-Hsiung Shen ◽

Shu-Jung Chen

Keyword(s):

Power Consumption ◽

Low Power ◽

Gas Sensor ◽

Low Power Consumption ◽

Ultra Low Power ◽

Cmos Mems

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Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

Sensors ◽

10.3390/s19010188 ◽

2019 ◽

Vol 19 (1) ◽

pp. 188 ◽

Cited By ~ 1

Author(s):

Debo Wei ◽

Jianyu Fu ◽

Ruiwen Liu ◽

Ying Hou ◽

Chao Liu ◽

...

Keyword(s):

Power Consumption ◽

Low Power ◽

Forward Bias ◽

High Sensitivity ◽

Bias Current ◽

Low Power Consumption ◽

Sensor Performance ◽

Sensor Structure ◽

Vacuum Sensor ◽

The One

Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were made regarding two aspects. On the one hand, a greater temperature coefficient was obtained without increasing power consumption by taking advantage of series diodes; on the other hand, the sensor structure and geometries were redesigned to enlarge temperature variation. After that, the sensor was fabricated and tested. Test results indicated that the dynamic vacuum pressure range of the sensor was from 10−1 to 104 Pa when the forward bias current was as low as 10 μA with a power consumption of 50 μW. Average sensitivity was up to 90 μV/Pa and the sensitivity of unit power consumption increased to 1.8 V/W/Pa. In addition, the sensor could also work at a greater forward bias current for better sensor performance.

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