Study of Bonded Wafers by Using a Synchrotron Radiation Transmission X-ray Microscopy for Three-Dimensional Integrated Circuit

2020 ◽  
Vol 15 (7) ◽  
pp. 904-908
Author(s):  
Youn-Jang Kim ◽  
Jae-Hong Lim ◽  
Kyeong-Keun Choi
Keyword(s):  
Synchrotron Radiation ◽  
Integrated Circuit ◽  
Interfacial Layer ◽  
Three Dimensional ◽  
Experimental Results ◽  
X Ray ◽  
Radiation Transmission ◽  
Three Dimensional Integrated Circuit

Synchrotron radiation transmission X-ray microscopy (SRTXM) was applied for visualization of the interfacial layer in bonded wafer pairs. The X-ray energy of 6.54 keV with a monitoring window was utilized to enhance a resolution of transmission X-ray microscopy (TXM). The monitoring window was designed a locally uncovered area of the bonded wafer pairs to make the thickness of bonded wafers less than 200 μm. The experimental results showed that the technique has sub-micron meter resolution. Also this technique can improve the resolution of the synchrotron X-ray for nanoelectronics application.

scholarly journals Anisotropic Grain Growth in (111) Nanotwinned Cu Films by DC Electrodeposition

Materials ◽  
2019 ◽  
Vol 13 (1) ◽  
pp. 134 ◽  
Author(s):  
Tien-Lin Lu ◽  
Yu-An Shen ◽  
John A. Wu ◽  
Chih Chen
Keyword(s):  
Grain Growth ◽  
Integrated Circuit ◽  
Three Dimensional ◽  
X Ray ◽  
Cu Films ◽  
3D Ic Packaging ◽  
Cu Film ◽  
Average Grain Size ◽  
Three Dimensional Integrated Circuit ◽  
Grain Growth Behavior

We have reported a method of fabricating (111)-orientated nanotwinned copper (nt-Cu) by direct current electroplating. X-ray analysis was performed for the samples annealed at 200 to 350 °C for an hour. X-ray diffraction indicates that the (200) signal intensity increases while (111) decreases. Abnormal grain growth normally results from transformation of surface energy or strain energy density. The average grain size increased from 3.8 µm for the as-deposited Cu films to 65–70 µm after the annealing at 250 °C for 1 h. For comparison, no significant grain growth behavior was observed by random Cu film after annealing for an hour. This research shows the potential for its broad electric application in interconnects and three-dimensional integrated circuit (3D IC) packaging.

Analyzing the Impact of X-Ray Tomography on the Reliability of Integrated Circuits

2015 ◽  
Author(s):  
Halit Dogan ◽  
Md Mahbub Alam ◽  
Navid Asadizanjani ◽  
Sina Shahbazmohamadi ◽  
Domenic Forte ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Integrated Circuit ◽  
3D Imaging ◽  
Three Dimensional ◽  
Serial Sectioning ◽  
Promising Technique ◽  
Flash Memories ◽  
X Ray ◽  
3D Information ◽  
The Impact

Abstract X-ray tomography is a promising technique that can provide micron level, internal structure, and three dimensional (3D) information of an integrated circuit (IC) component without the need for serial sectioning or decapsulation. This is especially useful for counterfeit IC detection as demonstrated by recent work. Although the components remain physically intact during tomography, the effect of radiation on the electrical functionality is not yet fully investigated. In this paper we analyze the impact of X-ray tomography on the reliability of ICs with different fabrication technologies. We perform a 3D imaging using an advanced X-ray machine on Intel flash memories, Macronix flash memories, Xilinx Spartan 3 and Spartan 6 FPGAs. Electrical functionalities are then tested in a systematic procedure after each round of tomography to estimate the impact of X-ray on Flash erase time, read margin, and program operation, and the frequencies of ring oscillators in the FPGAs. A major finding is that erase times for flash memories of older technology are significantly degraded when exposed to tomography, eventually resulting in failure. However, the flash and Xilinx FPGAs of newer technologies seem less sensitive to tomography, as only minor degradations are observed. Further, we did not identify permanent failures for any chips in the time needed to perform tomography for counterfeit detection (approximately 2 hours).

scholarly journals Synchrotron radiation X-ray tomographic microscopy (SRXTM) of brachiopod shell interiors for taxonomy: Preliminary report

2010 ◽  
pp. 109-117 ◽  
Author(s):  
Neda Motchurova-Dekova ◽  
David Harper
Keyword(s):  
Synchrotron Radiation ◽  
Three Dimensional ◽  
X Rays ◽  
X Ray ◽  
Fine Grained ◽  
Internal Structures ◽  
Efficient Alternative ◽  
Micro Tomography ◽  
Light Beams ◽  
Non Destructive

Synchrotron radiation X-ray tomographic microscopy (SRXTM) is a non-destructive technique for the investigation and visualization of the internal features of solid opaque objects, which allows reconstruction of a complete three-dimensional image of internal structures by recording of the differences in the effects on the passage of waves of energy reacting with those structures. Contrary to X-rays, produced in a conventional X-ray tube, the intense synchrotron light beams are sharply focused like a laser beam. We report encouraging results from the use of SRXTM for purely taxonomic purposes in brachiopods: an attempt to find a non-destructive and more efficient alternative to serial sectioning and several other methods of dissection together with the non-destructive method of X-ray computerised micro-tomography. Two brachiopod samples were investigated using SRXTM. In ?Rhynchonella? flustracea it was possible to visualise the 3D shape of the crura and dental plates. In Terebratulina imbricata it was possible to reveal the form of the brachidium. It is encouraging that we have obtained such promising results using SRXTM with our very first two fortuitous samples, which had respectively fine-grained limestone and marl as infilling sediment, in contrast to the discouraging results communicated to us by some colleagues who have tested specimens with such infillings using X-ray micro-tomography. In future the holotypes, rare museum specimens or delicate Recent material may be preferentially subjected to this mode of analysis.

A high-resolution Weissenberg camera for X-ray synchrotron radiation

1990 ◽  
Vol 23 (5) ◽  
pp. 351-354
Author(s):  
D. Hohlwein ◽  
J. D. Axe
Keyword(s):  
Phase Transformation ◽  
High Resolution ◽  
Synchrotron Radiation ◽  
Reciprocal Space ◽  
Experimental Results ◽  
Germanium Crystal ◽  
Synchrotron Source ◽  
X Ray ◽  
High Resolution Mapping ◽  
Resolution Mapping

A photographic Weissenberg camera has been constructed which can be mounted on the 2θ arm of a four-circle diffractometer. At a distance of 0.5 m from the sample the 2θ resolution for a 100 μm crystal is 0.2 mrad (0.01°), allowing a high-resolution mapping of reciprocal space at a synchrotron source in an efficient way. As sample experimental results, a study is presented of the streak system around the 111 reflection of a perfect germanium crystal and the detection of a minute phase transformation in a single-powder grain of a high-Tc superconductor.

scholarly journals Development of an X-ray real-time stereo imaging technique using synchrotron radiation

2011 ◽  
Vol 18 (4) ◽  
pp. 569-574 ◽  
Author(s):  
Masato Hoshino ◽  
Kentaro Uesugi ◽  
James Pearson ◽  
Takashi Sonobe ◽  
Mikiyasu Shirai ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Real Time ◽  
Imaging System ◽  
Silicon Crystal ◽  
Three Dimensional ◽  
Stereo Image ◽  
Large Field ◽  
Depth Information ◽  
Stereo Imaging ◽  
X Ray

An X-ray stereo imaging system with synchrotron radiation was developed at BL20B2, SPring-8. A portion of a wide X-ray beam was Bragg-reflected by a silicon crystal to produce an X-ray beam which intersects with the direct X-ray beam. Samples were placed at the intersection point of the two beam paths. X-ray stereo images were recorded simultaneously by a detector with a large field of view placed close to the sample. A three-dimensional wire-frame model of a sample was created from the depth information that was obtained from the lateral positions in the stereo image. X-ray stereo angiography of a mouse femoral region was performed as a demonstration of real-time stereo imaging. Three-dimensional arrangements of the femur and blood vessels were obtained.

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