Compositional and Texture Analysis of Tantalum Thin Films by Energy Dispersive X-Ray Analysis

1973 ◽  
Vol 27 (2) ◽  
pp. 99-102 ◽  
Author(s):  
H. S. deBen ◽  
Barret Broyde
Keyword(s):  
Thin Films ◽  
Texture Analysis ◽  
Diffraction Method ◽  
Preferred Orientation ◽  
Energy Dispersive ◽  
X Ray ◽  
Quantitative Measurements

Quantitative measurements of concentrations are given for the phases present in undoped tantalum thin films by the use of energy-dispersive x-ray detectors. This diffraction method can also yield the extent of preferred orientation.

scholarly journals A Study of Preferred Orientation by Energy-Dispersive X-Ray Diffraction

1977 ◽  
Vol 2 (4) ◽  
pp. 243-251 ◽  
Author(s):  
E. Laine ◽  
J. Kivilä ◽  
I. Lähteenmäki
Keyword(s):  
Density Distribution ◽  
Diffraction Method ◽  
Polar Axis ◽  
Preferred Orientation ◽  
Energy Dispersive ◽  
X Ray Diffraction ◽  
Powder Specimen ◽  
X Ray ◽  
Aluminium Powder ◽  
Energy Dispersive Diffraction

The influence of preferred orientation on integrated x-ray intensities in powder specimen using energy-dispersive diffraction method is investigated. The theory used is based upon examination of the polar axis density distribution. The measurements were carried out using the Schulz technique added with defocusing correction. Experimental results are given for three aluminium powder specimens.

scholarly journals 3D-structural Analysis of Epitaxially-grown Organic Thin Films by a Newly Developed Energy Dispersive X-ray Diffraction System.

Hyomen Kagaku ◽  
1998 ◽  
Vol 19 (4) ◽  
pp. 259-264
Author(s):  
Kenji ISHIDA ◽  
Toshihisa HORIUCHI ◽  
Kazumi MATSUSHIGE MATSUSHIGE
Keyword(s):  
Thin Films ◽  
Structural Analysis ◽  
Organic Thin Films ◽  
Energy Dispersive ◽  
X Ray Diffraction ◽  
X Ray

Energy dispersive X-ray reflectivity to study phase transitions in thin films

2004 ◽  
Vol 70 (4-5) ◽  
pp. 611-617 ◽  
Author(s):  
M. Bhattacharya ◽  
M.K. Mukhopadhyay ◽  
S. Pal ◽  
M.K. Sanyal
Keyword(s):  
Thin Films ◽  
Phase Transitions ◽  
Energy Dispersive ◽  
Study Phase ◽  
X Ray

The Use of Energy Dispersive Diffractometry to Measure the Thickness of Metal and Glass Thin Films

1981 ◽  
Vol 25 ◽  
pp. 365-371
Author(s):  
Glen A. Stone
Keyword(s):  
Thin Films ◽  
Single Crystal ◽  
Single Crystal Silicon ◽  
Substrate Material ◽  
Silicon Wafers ◽  
Energy Dispersive ◽  
Crystal Silicon ◽  
X Ray ◽  
Phosphosilicate Glass ◽  
Film Substrate

This paper presents a new method to measure the thickness of very thin films on a substrate material using energy dispersive x-ray diffractometry. The method can be used for many film-substrate combinations. The specific application to be presented is the measurement of phosphosilicate glass films on single crystal silicon wafers.

X-ray diffraction analysis for thin films of PbTiO3-La2/3TiO3 prepared by the sol-gel method

1994 ◽  
Vol 9 (8) ◽  
pp. 2133-2137 ◽  
Author(s):  
Hideki Yoshioka
Keyword(s):  
Thin Films ◽  
Perovskite Phase ◽  
Sol Gel ◽  
Diffraction Method ◽  
Dip Coating ◽  
X Ray Diffraction ◽  
X Ray ◽  
Coating Methods ◽  
Diffraction Patterns ◽  
System 1

Thin films in the system (1 - x) PbTiO3−xLa2/3TiO3 were prepared by the sol-gel and dip-coating methods. Phases deposited in the films and the lattice parameters as a function of the composition were investigated by the x-ray diffraction method. The solid solutions with a perovskite structure were formed as a single phase with x up to 0.9. For the composition of x = 1.0, metastable La-Ti-O perovskite phase with a small amount of the impurity phase, La2Ti2O7, was obtained. Simulation of x-ray diffraction patterns based on the defect structure model shows that the structure of the La-Ti-O perovskite phase includes randomly distributed cation vacancies at the A-site, namely (La2/3□1/3)TiO3.

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