Aluminium Hollow Cathode Gas Plasma Sources for Atomic Layer Deposition

2021 ◽  
Author(s):  
Scott Butcher ◽  
Keyword(s):  
Atomic Layer Deposition ◽  
Hollow Cathode ◽  
Atomic Layer ◽  
Plasma Sources ◽  
Gas Plasma ◽  
Layer Deposition

Exploring Inherently Selective Plasma Processing of Nitrides and Oxides Via Hollow-Cathode Plasma-Assisted Atomic Layer Deposition

2020 ◽  
Vol MA2020-02 (23) ◽  
pp. 1664-1664
Author(s):  
Adnan Mohammad ◽  
Saidjafarzoda Ilhom ◽  
Deepa Shukla ◽  
Brian Willis ◽  
Ali K. Okyay ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hollow Cathode ◽  
Plasma Processing ◽  
Atomic Layer ◽  
Cathode Plasma ◽  
Layer Deposition

scholarly journals Fabrication of flexible polymer–GaN core–shell nanofibers by the combination of electrospinning and hollow cathode plasma-assisted atomic layer deposition

2015 ◽  
Vol 3 (20) ◽  
pp. 5199-5206 ◽  
Author(s):  
Cagla Ozgit-Akgun ◽  
Fatma Kayaci ◽  
Sesha Vempati ◽  
Ali Haider ◽  
Asli Celebioglu ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hollow Cathode ◽  
Atomic Layer ◽  
Core Shell ◽  
Cathode Plasma ◽  
Flexible Polymer ◽  
Layer Deposition ◽  
Ceramic Nanofibers

Flexible polymer–GaN nanofibers were fabricated at a temperature much lower than that needed for the preparation of GaN ceramic nanofibers.

scholarly journals Understanding the role of rf-power on AlN film properties in hollow-cathode plasma-assisted atomic layer deposition

2020 ◽  
Vol 38 (2) ◽  
pp. 022405 ◽  
Author(s):  
Saidjafarzoda Ilhom ◽  
Deepa Shukla ◽  
Adnan Mohammad ◽  
John Grasso ◽  
Brian Willis ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hollow Cathode ◽  
Atomic Layer ◽  
Rf Power ◽  
Cathode Plasma ◽  
Film Properties ◽  
Layer Deposition ◽  
Aln Film
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