Scanning electron microscope fine tuning using four-bar piezoelectric actuated mechanism

Abstract Scanning Electron Microscopes are extensively used for accurate micro/nano images exploring. Several strategies have been proposed to fine tune those microscopes in the past few years. This work presents a new fine tuning strategy of a scanning electron microscope sample table using four bar piezoelectric actuated mechanisms. The introduced paper presents an algorithm to find all possible inverse kinematics solutions of the proposed mechanism. In addition, another algorithm is presented to search for the optimal inverse kinematic solution. Both algorithms are used simultaneously by means of a simulation study to fine tune a scanning electron microscope sample table through a pre-specified circular or linear path of motion. Results of the study shows that, proposed algorithms were able to minimize the power required to drive the piezoelectric actuated mechanism by a ratio of 97.5% for all simulated paths of motion when compared to general non-optimized solution.

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Ultrastructure of cleistothecia and the stages of life cycle of Microsphaera palczewskii by scanning electron microscope

Acta Mycologica ◽

10.5586/am.1997.023 ◽

2014 ◽

Vol 32 (2) ◽

pp. 275-278

Author(s):

Joanna Z. Kadłubowska ◽

Ewa Kalinowska-Kucharska

Keyword(s):

Electron Microscope ◽

Life Cycle ◽

Scanning Electron Microscope ◽

Scanning Microscopy ◽

Developmental Cycle ◽

Central Poland ◽

Caragana Arborescens ◽

Electron Microscopes ◽

Scanning Electron Microscopes ◽

Scanning Electron

Several year long investigations of the developmental cycle of <i>Microsphaera palczewskii</i> occurring on the leaves of <i>Caragana arborescens</i> in Central Poland are reported. The material was studied with light and scanning electron microscopes. The scanning microscopy micrographs of the clistothecia and appendages presented in this report are the first micrographs of this species.

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The Observation of NBC Precipitates In Steels In The Nanometer Range Using A Field Emission Gun Scanning Electron Microscope

Microscopy and Microanalysis ◽

10.1017/s1431927600013106 ◽

1997 ◽

Vol 3 (S2) ◽

pp. 1243-1244 ◽

Cited By ~ 1

Author(s):

Raynald Gauvin ◽

Steve Yue

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Field Emission ◽

Incident Electron Energy ◽

Beam Diameter ◽

Probe Diameter ◽

Transmission Electron ◽

Electron Microscopes ◽

Scanning Electron Microscopes ◽

Scanning Electron

The observation of microstructural features smaller than 300 nm is generally performed using Transmission Electron Microscopy (TEM) because conventional Scanning Electron Microscopes (SEM) do not have the resolution to image such small phases. Since the early 1990’s, a new generation of microscopes is now available on the market. These are the Field Emission Gun Scanning Electron Microscope with a virtual secondary electron detector. The field emission gun gives a higher brightness than those obtained using conventional electron filaments allowing enough electrons to be collected to operate the microscope with incident electron energy, E0, below 5 keV with probe diameter smaller than 5 nm. At 1 keV, the electron range is 60 nm in aluminum and 10 nm in iron (computed using the CASINO program). Since the electron beam diameter is smaller than 5 nm at 1 keV, the resolution of these microscopes becomes closer to that of TEM.

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Choosing a Scanning Electron Microscope

Microscopy and Microanalysis ◽

10.1017/s1431927600024600 ◽

1998 ◽

Vol 4 (S2) ◽

pp. 896-897

Author(s):

W. A. Lambe ◽

P.M. Brady

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Selection Process ◽

The Other ◽

Hard Data ◽

Methodical Approach ◽

Electron Microscopes ◽

Scanning Electron Microscopes ◽

First Time ◽

Scanning Electron

The variety of instrumentation available to the researcher today can be overwhelming and confusing. Scanning Electron Microscopes (“SEM's) are no exception, and choosing one can often serve as an exercise in dealing with complexity. First time purchasers are most at risk, being subject to a barrage of information that attempts to sway the purchaser in one direction or the other. As a result, one can sometimes be drawn to the details of the latest “high end” performance parameter, while overlooking the basics. At its worst, the selection process can degrade to one of vague guesswork with little hard data to serve as a compass.By applying a methodical approach to define your individual requirements, carefully designed tests of actual instruments, and discussions with your collaborators, potential and experienced users, one can begin to ensure a successful selection process.

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Considerations in Making Stereo Micrographs With the Scanning Electron Microscope

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100071612 ◽

1973 ◽

Vol 31 ◽

pp. 234-235

Author(s):

E. R. Walter

Keyword(s):

Fine Structure ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Three Dimensional ◽

Spatial Relationships ◽

Additional Information ◽

Electron Microscopes ◽

Scanning Electron Microscopes ◽

Scanning Electron

The information obtainable with the scanning electron microscope can often be increased severalfold through the use of stereomicrograph pairs. Not only is the detail which can be observed the equivalent of a 2X increase in magnification over that apparent in a single micrograph, but, threedimensional spatial relationships are more accurately preserved. This is especially true where protruding or pyramided fine structure and/or gross reentrance exists. Since stereo micrographs are conveniently obtained with most scanning electron microscopes, it is generally desirable to add the additional information they offer whenever the three-dimensional relationships present in the specimen'are not readily apparent.

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Interfacing a Personal Computer to an Analog Scanning Electron Microscope for Storing Images on Optical Disks

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100134016 ◽

1990 ◽

Vol 48 (2) ◽

pp. 84-85

Author(s):

Mark H. Ransick ◽

Chadwick D. Barklay

Keyword(s):

Image Analysis ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Low Cost ◽

Hard Copy ◽

Analog To Digital ◽

Optical Disks ◽

Electron Microscopes ◽

Scanning Electron Microscopes ◽

Scanning Electron

Most manufacturers of scanning electron microscopes (SEM) now offer models that display an image digitally. This holds many advantages, including the ability to store the image on a disk and perform image analysis on the sample. Most SEMs in service, however, produce only an analog video output; they do not have the ability to digitize the image. Film is the only method of storing images.Consequentially, film is a significant portion of every microscopy laboratory’s budget. Completely eliminating the use of film from use is not practical. There will always be the need to examine a hard copy of the image; many programs require duplicate copies of each image generated; and it is sound practice to keep a copy of each image on file. By archiving digital images to an inexpensive media, the amount of film used or the time devoted to processing negatives can be greatly reduced.By using personal computers (PCs)s, with a digitizing board and analog to digital (A/D) board, it is possible to construct a relatively low cost digitizing system for any SEM.

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Ceramics in the environmental Scanning Electron Microscope

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100150381 ◽

1993 ◽

Vol 51 ◽

pp. 910-911

Author(s):

Stuart McKeman

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Low Voltage ◽

Ceramic Materials ◽

Environmental Scanning Electron Microscope ◽

Environmental Scanning ◽

Dynamic Experiments ◽

Electron Microscopes ◽

Scanning Electron Microscopes ◽

Scanning Electron

Several recent advances have had a major potential impact on the microscopy of ceramic materials. The ability of modern scanning electron microscopes to image uncoated materials, at low voltage for example, whilst still maintaining high resolution should make possible a wide variety of experiments that were hitherto impossible to contemplate. This ability to look at the unmodified surface of a ceramic enables iterative or dynamic experiments to be done with a lot more confidence in the results than has been possible before. A second advance has been the introduction of microscopes capable of operating at higher pressures than was previously possible. This makes possible the ability to image specimens in a variety of different environments. The environmental scanning electron microscope (ESEM) exploits of both of these novel areas. The aim of this review is to highlight areas where the unique capabilities of the ESEM may be applied to advance our understanding of ceramics.

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New Scanning Electron Microscope Sharpness Standard: NIST Reference Material 8091 (Rm 8091)

Microscopy and Microanalysis ◽

10.1017/s1431927600028543 ◽

2001 ◽

Vol 7 (S2) ◽

pp. 494-495

Author(s):

M. T. Postek ◽

A. E. Vladar ◽

N.-F. Zhang ◽

R. Larrabee

Keyword(s):

Electron Microscope ◽

Reference Material ◽

Scanning Electron Microscope ◽

Contributing Factors ◽

University Of Tennessee ◽

Wafer Inspection ◽

Semiconductor Chip ◽

Electron Microscopes ◽

Scanning Electron Microscopes ◽

Scanning Electron

All scanning electron microscopes, whether they are in laboratory or on the production line, slowly lose performance as the instrument is used. This loss of performance is due to a whole array of contributing factors including misalignments, contamination and increases in source diameter. Identifying a loss in “sharpness” easily recognizes this performance decrease. Reference Material 8091 (RM 8091) is intended primarily for use in routinely checking the sharpness performance of scanning electron microscopes (Fig. 1). RM 8091 is designed to be used in conjunction with the SPECTEL SEM Monitor Program, the NIST Kurtosis program,3 or the University of Tennessee SMART program. RM 8091 is supplied as a small, approximately 2 mm x 2 mm diced semiconductor chip. This sample is capable of being mounted directly on to a wafer, wafer piece or specimen stub for insertion into a laboratory scanning electron microscope or wafer inspection scanning electron microscope.

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Automation of Gunshot-Residue Analysis by Functional Integration of a Scanning Electron Microscope and an Energy Dispersive Microanalysis System

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100134235 ◽

1990 ◽

Vol 48 (2) ◽

pp. 128-129

Author(s):

Marc H. Peeters

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Functional Integration ◽

Residue Analysis ◽

Energy Dispersive ◽

Gunshot Residue ◽

Ratio Determination ◽

Electron Microscopes ◽

Scanning Electron Microscopes ◽

Scanning Electron

Over the past ten years, the combination of scanning electron microscopy and energy dispersive analysis has proven to be a good and reliable tool for elemental characterization of the different components of gunshot residue. The technique evolved from a qualitative technique, involving a large amount of operator involvement, to a higher degree of quantification and automation allowing unattended analysis of gunshot residue samples. The PHAX-Scan system is geared to automated unattended analysis, particularly suited to applications such as gunshot-residue analysis.PHAX-Scan is a system based on a Philips scanning electron microscope and an EDAX PV9900 energy dispersive microanalyser in combination with highly optimised software. The system makes use of the dual processor structure of the EDAX analyser and of the bus structure of the Philips scanning electron microscopes. It is designed such that it performs a fully quantitative data reduction, including background subtraction, peak deconvolution, no-standards k-ratio determination and Z*A*F correction in typically 100 milliseconds.

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Multi-Beam Ion Microscopy

Microscopy Today ◽

10.1017/s1551929512000569 ◽

2012 ◽

Vol 20 (5) ◽

pp. 10-15 ◽

Cited By ~ 4

Author(s):

David C. Joy

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Beam Energy ◽

Relative Strength ◽

The Past ◽

Ion Microscopy ◽

Electron Microscopes ◽

Scanning Electron Microscopes ◽

Fundamental Limitation ◽

Scanning Electron

Over the past fifty years the scanning electron microscope (SEM) has established itself as the most versatile and productive tool for imaging and microanalysis in many areas of science and technology, and some seventy-thousand instruments generate millions of micrographs every day. Scanning electron microscopes do, however, have one fundamental limitation in that the only experimental variable available to the operator is the choice of the accelerating voltage. Although the ability to vary beam energy is both necessary and important, it is an unfortunate fact that changing the beam energy also alters many aspects of performance: imaging resolution, relative strength of different signal components, depth of beam penetration, capabilities of the various analytical systems, and the severity of charging and beam-induced damage. This makes it difficult or impossible to optimize the interaction of interest.

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Analysis of Interesting Materials in the Environmental SEM: You Put What in Your Microscope?

Microscopy and Microanalysis ◽

10.1017/s1431927600029950 ◽

2001 ◽

Vol 7 (S2) ◽

pp. 776-777

Author(s):

John F. Mansfield

Keyword(s):

Electron Microscope ◽

Chemical Engineering ◽

Materials Science ◽

Variable Pressure ◽

Environmental Scanning ◽

Specimen Preparation ◽

Wide Range ◽

Electron Microscopes ◽

Scanning Electron Microscopes ◽

Scanning Electron

The environmental scanning electron microscope (ESEM™) and variable pressure electron microscope (VPSEM) have become accepted tools in the contemporary electron microscopy facility. Their flexibility and their ability to image almost any sample with little, and often no, specimen preparation has proved so attractive that each manufacturer of scanning electron microscopes now markets a low vacuum model.The University of Michigan Electron Microbeam Analysis Laboratory (EMAL) operates two variable pressure instruments, an ElectroScan E3 ESEM and a Hitachi S3200N VPSEM. The E3 ESEM was acquired in the early 1990s with funding from the Amoco Foundation and it has been used to examine an extremely wide variety of different materials. Since EMAL serves the entire university community, and offers support to neighboring institutions and local industry, the types of materials examined span a wide range. There are users from Materials Science & Engineering, Chemical Engineering, Nuclear Engineering, Electrical Engineering, Physics, Chemistry, Geology, Biology, Biophysics, Pharmacy and Pharmacology.

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