One of the major shortcomings of conventional PEEM and of LEEM is the lack of chemical information about the surface. Although the imaging of the LEED pattern in the back focal plane of the objective lens of a LEEM instrument allows chemical characterization via the crystalline structure derived from the LEED pattern, this method fails in the absence of a characteristic LEED pattern. Direct information about the atomic composition of the surface is then needed which can be best obtained from inner shell electrons either directly by x-ray-induced photoemission (XPEEM) or by x-ray- or electron-induced Auger electron emission (AEEM). These modes of excitation and imaging can be combined with conventional PEEM and LEEM in one instrument which is presently being developed. Thus a complete structural and chemical characterization becomes possible in one instrument, with parallel detection and high resolution.In contrast to LEEM, in which up to more than 50% of the incident intensity is available for image formation, the intensity of the emitted electrons is much lower in XPEEM and AEEM and the signal is much lower than the background in AEEM. Therefore, intensity I and resolution d have to be optimized simultaneously which is best done by maximizing Q = I/d2 with respect to maximum emission angle α and relative energy distribution ε = ΔVo/V accepted by the instrument. For a well-designed magnetic lens section of the cathode lens its aberrations are determined by the accelerating field F in front of the specimen. For a homogeneous accelerating field F and a cosine emission distribution one obtains for the optimum α and ε values αo,εo a radius of the minimum disc of confusion of
Knochengesundheit und Hochleistungssport