Study of conditions of gas- discharge synthesis of Zinc oxide nanostructures under automatic UV-irradiation of the substrate by plasma

The spectroscopic characteristics of a bipolar, overstressed discharge of nanosecond duration between zinc electrodes in oxygen at a pressure p(O2) = 13.3 kPa are presented. In the process of microexplosions of inhomogeneities on the working surfaces of the electrodes in a strong electric field, zinc vapor is introduced into the discharge gap. This creates the prerequisites for the formation of zinc oxide molecules and clusters in the plasma and the synthesis of thin island zinc oxide films, which can be deposited on a dielectric substrate installed near the center of the discharge gap. The spectral characteristics of the discharge were investigated from the central part of the discharge gap 2 mm in size. The main excited components of the plasma of a vapor-gas mixture based on zinc and oxygen were established at high values ​​of the parameter E / N (where E is the electric field strength; N is the total concentration of particles in the plasma), which, when deposited outside the discharge plasma, can lead to the formation of fine nanostructured films based on zinc oxide.