Screen Printable Semiconductor Grade Inks for N and P type Doping of Polysilicon

MRS Advances ◽  
2016 ◽  
Vol 1 (14) ◽  
pp. 965-970 ◽  
Author(s):  
Aditi Chandra ◽  
Mao Takashima ◽  
Martha Montague ◽  
Joey Li ◽  
Arvind Kamath

ABSTRACTThis article describes the electrical and physical properties of polysilicon doped with novel N+ and P+ screen printed inks using a thermally activated process. Unique ink formulations for N and P type doping of silicon are evaluated in volume production in order to enable a low cost, high throughput process. Inks can be used with multiple substrate types and form factors. The concentrated doping source combined with thermal drive in and activation results in degenerately doped layers of polysilicon. Inks are semiconductor grade which is demonstrated by their use in fabricating high mobility, low leakage Thin Film Transistor (TFT) devices on 300 mm stainless steel substrates. Reproducible sheet resistance values (700 A polysilicon) can be engineered from levels typically ranging from 200 - 2000 ohm/sq. The additive approach substitutes the use of high capital cost ion implantation and lithography processes. The ink formulation results in screen printed widths capable of ranging from 100-300 um. As both N and P type layers can be printed adjacent to each other, it is critical to prevent cross doping using surface preparation techniques. Post doping cleaning of surfaces can be achieved in-situ or by plasma removal depending on process integration and product considerations. Reproducibility and uniformity data to demonstrate manufacturability in a production environment is shown. In summary, a simple, low cost, high throughput additive process based on proprietary inks that can be used in multiple product flows (CMOS TFT, Solar etc.) is demonstrated.

MRS Advances ◽  
2017 ◽  
Vol 2 (18) ◽  
pp. 1029-1036 ◽  
Author(s):  
Aditi Chandra ◽  
Mao Takashima ◽  
Joey Li ◽  
Patricia Beck ◽  
Scott Bruner ◽  
...  

ABSTRACTStainless steel substrates enable a combination of low cost, flexibility, durability, high processing temperatures, and sub-100 um thickness making it well suited for sheet based and roll-to-roll processing. NFC (13.56 MHz) based circuits using high performance polysilicon TFTs on steel sheets have been manufactured using a hybrid printed process in a production environment. The process scheme utilizes a hybrid, additive materials approach encompassing low cost manufacturing steps such as slot die coating and screen printing of silicon and dopant inks to enable a high throughput, low cost, manufacturing flow. This paper describes the approach for migrating from a sheet-based hybrid process flow to a R2R-based process. A comparison of substrate choices and considerations for R2R process integration is presented. A sensitive electrical method for evaluating the feasibility of R2R-based process integration schemes and materials selection is presented. MIM capacitor leakage, TFT device characteristics, NFC circuit performance, and defect density considerations are shown as a function of steel substrate bending, down to a diameter of 0.75 inches. Electrical characteristics and optical inspections show no measurable change to insulator characteristics, demonstrating a high degree of flexibility and overall device and process capability for R2R processing.


2001 ◽  
Vol 708 ◽  
Author(s):  
Janos Veres ◽  
Simon Ogier ◽  
Stephen Leeming ◽  
Beverley Brown ◽  
Domenico Cupertino

ABSTRACTThe rapidly expanding field of organic semiconductors for display and low-cost electronic applications requires materials, which not only have high mobility but also benefit from solution processability and environmental stability. In this paper we present a new class of solution coatable organic materials with excellent stability to air and light. Spin-coated FET devices operate at ambient conditions without encapsulation and show p-type field-effect mobilities of 2 x 10-3 cm2V-1s-1 and on/off ratios greater than 104. Thin films can be deposited from common organic solvents onto a variety of substrates. These films are mechanically robust and can withstand temperatures in excess of 100 °C without significant changes in electrical performance. FET switching and transient characteristics at higher frequencies are also discussed. These types of materials should find applications in many areas of flexible electronics.


2015 ◽  
Vol 28 (1) ◽  
pp. 30-34 ◽  
Author(s):  
Amit Bhatia ◽  
Geoffroy Hautier ◽  
Tan Nilgianskul ◽  
Anna Miglio ◽  
Jingying Sun ◽  
...  

Author(s):  
Jinhwa Park ◽  
Sagar Shrestha ◽  
Sajjan Parajuli ◽  
Younsu Jung ◽  
Gyoujin Cho

Abstract Current Si-based technologies have reached their intrinsic limits in meeting the demands of flexible electronics where free-form factors and low cost are critical for successful applications. For this reason, roll-to-roll (R2R) gravure printing has been considered a way to achieve the free-form factor and the low cost. However, the R2R gravure systems (servomechanism, electronic ink, printing process, and device design) could not integrate a number of thin-film transistors (TFTs) with small threshold voltage (Vth) variations. Therefore, we designed a 4-bit code generator by combining one ring oscillator, 6 NAND gates, and one OR gate based on 37 p-type single-walled carbon nanotube (SWCNT) TFTs as a concept devices to test the R2R gravure system. First, ring oscillators with different physical dimensions were printed on a poly (ethylene terephthalate) (PET) roll using the R2R gravure. Then, we extracted important factors (channel length, channel width, and SWCNT network density) to optimize the Vth variation and demonstrated a 4-bit code generator integrated with 37 p-type TFTs. This work will be further extended in the near future to develop R2R gravure printed Near-Field Communication labels for smart packaging.


2016 ◽  
Vol 4 (40) ◽  
pp. 9438-9444 ◽  
Author(s):  
Fukai Shan ◽  
Ao Liu ◽  
Huihui Zhu ◽  
Weijin Kong ◽  
Jingquan Liu ◽  
...  

High-performance p-type NiOx thin-film transistors are fabricated via a low-cost solution process and exhibit a high mobility of around 15 cm2 V−1 s−1.


2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Woo Seok Kim ◽  
Sungcheol Hong ◽  
Milenka Gamero ◽  
Vivekanand Jeevakumar ◽  
Clay M. Smithhart ◽  
...  

AbstractThe vagus nerve supports diverse autonomic functions and behaviors important for health and survival. To understand how specific components of the vagus contribute to behaviors and long-term physiological effects, it is critical to modulate their activity with anatomical specificity in awake, freely behaving conditions using reliable methods. Here, we introduce an organ-specific scalable, multimodal, wireless optoelectronic device for precise and chronic optogenetic manipulations in vivo. When combined with an advanced, coil-antenna system and a multiplexing strategy for powering 8 individual homecages using a single RF transmitter, the proposed wireless telemetry enables low cost, high-throughput, and precise functional mapping of peripheral neural circuits, including long-term behavioral and physiological measurements. Deployment of these technologies reveals an unexpected role for stomach, non-stretch vagal sensory fibers in suppressing appetite and demonstrates the durability of the miniature wireless device inside harsh gastric conditions.


Processes ◽  
2021 ◽  
Vol 9 (4) ◽  
pp. 575
Author(s):  
Jelena Ochs ◽  
Ferdinand Biermann ◽  
Tobias Piotrowski ◽  
Frederik Erkens ◽  
Bastian Nießing ◽  
...  

Laboratory automation is a key driver in biotechnology and an enabler for powerful new technologies and applications. In particular, in the field of personalized therapies, automation in research and production is a prerequisite for achieving cost efficiency and broad availability of tailored treatments. For this reason, we present the StemCellDiscovery, a fully automated robotic laboratory for the cultivation of human mesenchymal stem cells (hMSCs) in small scale and in parallel. While the system can handle different kinds of adherent cells, here, we focus on the cultivation of adipose-derived hMSCs. The StemCellDiscovery provides an in-line visual quality control for automated confluence estimation, which is realized by combining high-speed microscopy with deep learning-based image processing. We demonstrate the feasibility of the algorithm to detect hMSCs in culture at different densities and calculate confluences based on the resulting image. Furthermore, we show that the StemCellDiscovery is capable of expanding adipose-derived hMSCs in a fully automated manner using the confluence estimation algorithm. In order to estimate the system capacity under high-throughput conditions, we modeled the production environment in a simulation software. The simulations of the production process indicate that the robotic laboratory is capable of handling more than 95 cell culture plates per day.


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