scholarly journals Optical properties of AlN determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry data

1999 ◽  
Vol 14 (11) ◽  
pp. 4337-4344 ◽  
Author(s):  
D. J. Jones ◽  
R. H. French ◽  
H. Müllejans ◽  
S. Loughin ◽  
A. D. Dorneich ◽  
...  
Keyword(s):  
Optical Properties ◽  
Spectroscopic Ellipsometry ◽  
Optical Constants ◽  
Vacuum Ultraviolet ◽  
Accurate Knowledge ◽  
Vacuum Ultraviolet Spectroscopy ◽  
Data Extrapolation ◽  
Compact Disks ◽  
Ellipsometry Data ◽  
Interatomic Bonding

Precise and accurate knowledge of the optical properties of aluminum nitride (AlN) in the ultraviolet (UV) and visible (VIS) regions is important because of the increasing application of AlN in optical and electro-optical devices, including compact disks, phase shift lithography masks, and AlN/GaN multilayer devices. The interband optical properties in the vacuum ultraviolet (VUV) region of 6–44 eV have been investigated previously because they convey detailed information on the electronic structure and interatomic bonding of the material. In this work, we have combined spectroscopic ellipsometry with UV/VIS and VUV spectroscopy to directly determine the optical constants of AlN in this range, thereby reducing the uncertainty in the preparation of the low-energy data extrapolation essential for Kramers–Kronig analysis of VUV reflectance. We report the complex optical properties of AlN, over the range of 1.5–42 eV, showing improved agreement with theory when contrasted with earlier results.

Determination and Critical Assessment of the Optical Properties of Common Substrate Materials Used in III-V Nitride Heterostructures with Vacuum Ultraviolet Spectroscopic Ellipsometry

2001 ◽  
Vol 693 ◽  
Author(s):  
N.V. Edwards ◽  
O.P.A. Lindquist ◽  
L.D. Madsen ◽  
S. Zollner ◽  
K. Järrehdahl ◽  
...  
Keyword(s):  
Optical Properties ◽  
Dielectric Function ◽  
Spectroscopic Ellipsometry ◽  
Optical Constants ◽  
Vacuum Ultraviolet ◽  
Critical Assessment ◽  
Optical Transitions ◽  
Common Substrate ◽  
Materials Used

AbstractAs a first step toward enabling the in-line metrology of III-V nitride heterostructure and materials, we present the optical constants of the two common substrate materials over an unprecendented spectral range. Vacuum Ultraviolet spectroscopic ellipsometry (VUVSE) was used to obtain the optical constants for Al2O3 and the ordinary and extra-ordinary component of the dielectric function for both 4H- and 6H-SiC. The results are discussed in the context of anisotropy, polytypism, bandstructure, optical transitions, and preparation/characterization of abrupt surfaces, where appropriate.

Optical properties of amorphous hydrogenated carbon films: A spectroscopic ellipsometry study

1987 ◽  
Vol 2 (5) ◽  
pp. 645-647 ◽  
Author(s):  
Shuhan Lin ◽  
Shuguang Chen
Keyword(s):  
Optical Properties ◽  
Spectroscopic Ellipsometry ◽  
Carbon Films ◽  
Index Of Refraction ◽  
The Real ◽  
Complex Index ◽  
Tentative Explanation ◽  
Amorphous Hydrogenated Carbon ◽  
Ellipsometry Data ◽  
Complex Index Of Refraction

Optical properties of plasma-deposited amorphous hydrogenated carbon films were studied by spectroscopic ellipsometry. From the ellipsometry data, the real and imaginary parts, n and k, of the complex index of refraction of the film have been deduced for photon energies between 2.0 and 4.0 eV for as-grown as well as for thermally annealed films. Here n and k showed considerable variation with subsequent annealing, even under 400°C. A tentative explanation of the results is proposed.

Effects of alloying on the optical properties of organic–inorganic lead halide perovskite thin films

2016 ◽  
Vol 4 (33) ◽  
pp. 7775-7782 ◽  
Author(s):  
Paul F. Ndione ◽  
Zhen Li ◽  
Kai Zhu
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Spectroscopic Ellipsometry ◽  
Optical Constants ◽  
Optical Transitions ◽  
Inorganic Perovskite ◽  
Inorganic Lead ◽  
Halide Perovskite ◽  
Lead Halide

Spectroscopic ellipsometry analysis of optical transitions and optical constants in hybrid organic–inorganic perovskite alloys.

OPTICAL PROPERTIES OF GLASSY CARBON

2002 ◽  
Vol 09 (01) ◽  
pp. 473-477 ◽  
Author(s):  
L. PAJASOVÁ ◽  
L. SOUKUP ◽  
L. JASTRABÍK ◽  
D. CHVOSTOVÁ
Keyword(s):  
Heat Treatment ◽  
Optical Properties ◽  
Glassy Carbon ◽  
Spectroscopic Ellipsometry ◽  
Optical Constants ◽  
Three Dimensional ◽  
Polarized Light ◽  
Electron Plasma ◽  
Electron Transitions ◽  
Average Size

The optical constants and dielectric functions of a series of samples of glassy carbon subjected to a heat treatment from 1000°C to 3000°C have been evaluated in the spectral region of 1.5–13.8 eV. In the region of 1.5–5.0 eV the method of spectroscopic ellipsometry and multiangle reflectivity with p-polarized light was applied, while in the VUV region the optical constants were evaluated by means of multiangle reflectivity with partially polarized light as well as by means of Kramers–Kronig analysis. The optical spectra are discussed, in analogy with graphite, in terms of single-electron transitions and π electron plasma excitations. The changes in the spectra by heating are ascribed to increasing average size of ordered regions and sample densification in the absence of three-dimensional graphitization.

Optical properties of InP from infrared to vacuum ultraviolet studied by spectroscopic ellipsometry

2017 ◽  
Vol 421 ◽  
pp. 813-818 ◽  
Author(s):  
Indra Subedi ◽  
Michael A. Slocum ◽  
David V. Forbes ◽  
Seth M. Hubbard ◽  
Nikolas J. Podraza
Keyword(s):  
Optical Properties ◽  
Spectroscopic Ellipsometry ◽  
Vacuum Ultraviolet

scholarly journals Morphology and Spectroscopic Ellipsometry of PMMA Thin Films

2017 ◽  
Vol 9 (2) ◽  
pp. 5 ◽  
Author(s):  
H. M. El-Nasser
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Spectroscopic Ellipsometry ◽  
Silicon Substrates ◽  
Analysis Method ◽  
Force Microscopy ◽  
Atomic Force ◽  
Mean Grain Size ◽  
Multiple Sample ◽  
Ellipsometry Data

The morphology and optical properties of PMMA thin films deposited on silicon substrates were investigated. The spin coated films were characterized by atomic force microscopy and spectroscopic ellipsometry. Regardless that, the samples were deposited at different coating speeds, the surface structures of all PMMA thin films were consistent, and found to be relatively smooth, with a mean grain size in the range of 13-25 nm. The refractive index as well as the extinction coefficient of the films was determined using spectroscopic ellipsometry data over the wavelength range 380-750 nm. For this purpose, we used the Cauchy dispersion relation in order to represent PMMA layers, and then models were built by adding a roughness layer, which simply corrects any possible deviation from planarity. Besides, the thicknesses of all four films were calculated simultaneously based on multiple sample analysis method. By using this method, optical properties were coupled in such way that, the optical constants for all samples were assumed to be identical.

scholarly journals Оптические и магнитные свойства трехслойных систем Dy-=SUB=-x-=/SUB=-Co-=SUB=-1-x-=/SUB=-/Bi/Py

2021 ◽  
Vol 47 (3) ◽  
pp. 7
Author(s):  
Н.Н. Косырев ◽  
В.Ю. Яковчук ◽  
Г.С. Патрин ◽  
В.А. Комаров ◽  
Е.Н. Волченко ◽  
...  
Keyword(s):  
Optical Properties ◽  
Temperature Dependence ◽  
Exchange Interaction ◽  
Spectroscopic Ellipsometry ◽  
Kerr Effect ◽  
Optical Constants ◽  
Compensation Temperature ◽  
Optical Kerr Effect ◽  
Magneto Optical Kerr Effect

The optical and magneto-optical properties of the DyxCo1-x/Bi/NiFe three-layer systems are presented. The magneto-optical Kerr effect to study the temperature dependence of the magnetization and spectroscopic ellipsometry to obtain optical constants were used. It is shown that the thickness of the bismuth interlayer affects the exchange interaction between the NiFe and DyCo layers, which is manifested in a change of the magnetisation compensation temperature.

Sign in / Sign up

Export Citation Format

Share Document