Contact damage of tetrahedral amorphous carbon thin films on silicon substrates

2009 ◽  
Vol 24 (11) ◽  
pp. 3286-3293 ◽  
Author(s):  
Oscar Borrero-López ◽  
Mark Hoffman ◽  
Avi Bendavid ◽  
Phil J. Martin
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Cross Sections ◽  
Focused Ion Beam ◽  
Microelectromechanical Systems ◽  
Ion Beam ◽  
Carbon Films ◽  
Silicon Substrates ◽  
Tetrahedral Amorphous Carbon ◽  
Thick Coatings

We have investigated the fracture behavior of tetrahedral amorphous carbon films, with thicknesses 0.15 (ultrathin), 0.5 (thin), and 1.2 (thick) microns on silicon substrates. To that end, the systems were progressively loaded into a nanoindenter using a spherical tip, and surface and cross sections were subsequently examined using a focused ion beam miller at different loads. A transition was found as a function of film thickness: for ultrathin and thin films, cracking (radial and lateral) initiated in the silicon substrate and followed a similar path in the films. Thicker films, on the other hand, provided a higher level of protection to the substrate, and cracking (lateral and radial at the interface) was constrained to the film. The damage modes and the transition obtained differ from those that occur in thick coatings. Lateral cracks are highly dangerous, leading to delamination of thick films and to spallation when thinner films are used. The results have implications concerning the mechanical reliability of microelectromechanical systems.

An Study of Influence of Imperfections on the Delamination of Diamond-Like Carbon Films

2002 ◽  
Vol 719 ◽  
Author(s):  
Myoung-Woon Moon ◽  
Kyang-Ryel Lee ◽  
Jin-Won Chung ◽  
Kyu Hwan Oh
Keyword(s):  
Cross Sections ◽  
Focused Ion Beam ◽  
Imaging System ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Glass Substrates ◽  
Atomic Force ◽  
Initiation And Propagation

AbstractThe role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.

scholarly journals Elastic Constants of Diamond-Like Carbon Films by Surface Brillouin Scattering

1999 ◽  
Vol 593 ◽  
Author(s):  
A.C. Ferrari ◽  
J. Robertson ◽  
R. Pastorelli ◽  
M.G. Beghi ◽  
C.E. Bottani
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Elastic Constants ◽  
Acoustic Waves ◽  
Brillouin Scattering ◽  
Surface Acoustic Waves ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

ABSTRACTThe elastic constants of thin Diamond-Like Carbon (DLC) films supply important information, but their measurement is difficult. Standard nanoindentation does not directly measure the elastic constants and has strong limitations particularly in the case of hard thin films on softer substrates, such as tetrahedral amorphous carbon on Si. Surface acoustic waves provide a better mean to investigate elastic properties. Surface Brillouin scattering (SBS) intrinsically probes acoustic waves of the wavelength which is appropriate to test the properties of films in the tens to hundreds of nanometers thickness range. SBS can be used to derive all the isotropic elastic constants of hard-on-soft and soft-on-hard amorphous carbon films of different kinds, with thickness down to less than 10 nm. The results help to resolve the previous uncertainties in mechanical data. The Young's modulus of tetrahedral amorphous carbon (ta-C) turns out to be lower than that of diamond, while the moduli of hydrogenated ta-C (ta-C:H) are considerably lower than those of ta-C because of the weakening effect of C-H bonding.

scholarly journals Elastic Constants of Diamond Like Carbon Films by Surface Brillouin Scattering

1999 ◽  
Vol 594 ◽  
Author(s):  
A. C. Ferrari ◽  
J. Robertson ◽  
R. Pastorelli ◽  
M. G. Beghi ◽  
C. E. Bottani
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Elastic Constants ◽  
Acoustic Waves ◽  
Brillouin Scattering ◽  
Surface Acoustic Waves ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

AbstractThe elastic constants of thin Diamond-Like Carbon (DLC) films supply important information, but their measurement is difficult. Standard nanoindentation does not directly measure the elastic constants and has strong limitations particularly in the case of hard thin films on softer substrates, such as tetrahedral amorphous carbon on Si. Surface acoustic waves provide a better mean to investigate elastic properties. Surface Brillouin scattering (SBS) intrinsically probes acoustic waves of the wavelength which is appropriate to test the properties of films in the tens to hundreds of nanometers thickness range. SBS can be used to derive all the isotropic elastic constants of hard-on-soft and soft-on-hard amorphous carbon films of different kinds, with thickness down to less than 10 nm. The results help to resolve the previous uncertainties in mechanical data. The Young's modulus of tetrahedral amorphous carbon (ta-C) turns out to be lower than that of diamond, while the moduli of hydrogenated ta-C (ta-C:H) are considerably lower than those of ta-C because of the weakening effect of C-H bonding.

scholarly journals Ion Beam Induced Darkening in Tetrahedral Amorphous Carbon Thin Films

2015 ◽  
Vol 128 (5) ◽  
pp. 953-956 ◽  
Author(s):  
M. Sandulov ◽  
M. Berova ◽  
T. Tsvetkova ◽  
J. Zuk
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Ion Beam ◽  
Tetrahedral Amorphous Carbon ◽  
Carbon Thin Films

Fabrication of patterned domains with graphitic clusters in amorphous carbon using a combination of ion implantation and electron irradiation techniques

2005 ◽  
Vol 908 ◽  
Author(s):  
Eiji Iwamura ◽  
Tatsuhiko Aizawa
Keyword(s):  
Thin Films ◽  
Ion Implantation ◽  
Amorphous Carbon ◽  
Ion Beam ◽  
Film Surface ◽  
Carbon Films ◽  
Implantation Technique ◽  
Ion Beam Sputtering ◽  
Si Substrates ◽  
Beam Sputtering

AbstractFabrication of domains containing graphitic structures in amorphous carbon (a-C) films was demonstrated. Amorphous carbon thin films with 200 nm thickness were deposited on Si substrates by ion-beam sputtering. Iron atoms in a range from 4×1013 to 3.7×1016 cm-2 were doped to the a-C films by an ion implantation technique through a nickel mask with a grid of square windows of 500×500 μm and a net of 50 μm in width as a template. After removing the metal mask, the partly Fe-containing a-C films were exposed to a low-energy electron shower. In the regions where Fe atoms were implanted, Fe were crystallized and preferably diffused toward the film surface leaving graphitic structures more than 10 nm in size in the interior of the amorphous carbon films. On the other hand, the masked regions, where Fe atoms were not implanted, remained amorphous. The results suggest that regions, which consist of amorphous domains and graphitic domains, can be intentionally arranged in a-C thin films.

Strength Measurement in Brittle Thin Films

2007 ◽  
Vol 1049 ◽  
Author(s):  
Oscar Borrero-Lopez ◽  
Mark Hoffman ◽  
Avi Bendavid ◽  
Phil J Martin
Keyword(s):  
Thin Films ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Nanocomposite Films ◽  
Silicon Substrates ◽  
Cross Sectional ◽  
Test Methodology ◽  
Soft Foundation ◽  
Theory Of Plates ◽  
Strength Variability

AbstractIn this work we have investigated the strength variability of brittle thin films (thickness ≤ 1 μm) utilising a simple test methodology. Nanoindentation of as-deposited tetrahedral amorphous carbon (ta-C) and Ti-Si-N nanocomposite films on silicon substrates followed by cross-sectional examination of the damage with a Focused Ion Beam (FIB) Miller allows the occurrence of cracking to be assessed in comparison with discontinuities (pop-ins) in the load-displacement curves. Strength is determined from the critical loads at which cracking occurs using the theory of plates on a soft foundation. This is of great relevance, since the fracture strength of thin films ultimately controls their reliable use in a broad range of functional applications.

Concurrent synthesis and boron-doping of amorphous carbon films by focused ion beam-assisted chemical vapor deposition

2021 ◽  
pp. 138704
Author(s):  
Ryo Matsumoto ◽  
El Hadi S. Sadki ◽  
Hiromi Tanaka ◽  
Sayaka Yamamoto ◽  
Shintaro Adachi ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Amorphous Carbon ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Boron Doping ◽  
Carbon Films ◽  
Amorphous Carbon Films
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