Fabrication of Porous Metal Bonded Diamond Grinding Wheels for Flat-Surface Nanomachining
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The articles thus far in this MRS Bulletin issue on Emerging Methods for Micro- and Nanofabrication have addressed the creation of structures or devices on a small scale. What is implicit in some of these articles is that a substrate of sufficient flatness is available upon which to build these structures in a controlled way. A related area, therefore, is the formation of these flat surfaces, as well as the development of the tools to make them.
2012 ◽
Vol 523-524
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pp. 137-142
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2007 ◽
Vol 359-360
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pp. 234-238
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2017 ◽
Vol 67
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pp. 82-89
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