Comprehensive Mechanical and Tribological Characterization of Ultra-Thin-Films

AbstractBased on recent studies, mechanical and tribological properties such as hardness, Young's modulus, friction, and scratch adhesion strength on various coatings and ultra-thin films are reported. These results were obtained using a Universal Nano+Micro Tester UNMT-1, suitably designed for comprehensive evaluation of mechanical and tribological properties of bulk materials, coatings and thin films. Results indicate that a substrate effect for ultra-thin films is substantial when using conventional static nanoindentation technique, while negligible with an advanced dynamic nano-indentation. Comparative results of hardness and Young's modulus obtained from various techniques are presented. Also, a means to evaluate friction and adhesion strength of thin films is highlighted, using DLC specimens as an example.

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Nano/micro-mechanical and tribological characterization of Ar, C, N, and Ne ion-implanted Si

Journal of Materials Research ◽

10.1557/jmr.2010.0117 ◽

2010 ◽

Vol 25 (5) ◽

pp. 880-889 ◽

Cited By ~ 7

Author(s):

Zhi-Hui Xu ◽

Young-Bae Park ◽

Xiaodong Li

Keyword(s):

Mechanical Properties ◽

Tribological Properties ◽

Crystalline Silicon ◽

Semiconductor Industry ◽

Damage Mechanism ◽

Mechanical And Tribological Properties ◽

Tribological Characterization ◽

The Relationship ◽

Ion Implanted

Ion implantation has been widely used to improve the mechanical and tribological properties of single crystalline silicon, an essential material for the semiconductor industry. In this study, the effects of four different ion implantations, Ar, C, N, and Ne ions, on the mechanical and tribological properties of single crystal Si were investigated at both the nanoscale and the microscale. Nanoindentation and microindentation were used to measure the mechanical properties and fracture toughness of ion-implanted Si. Nano and micro scratch and wear tests were performed to study the tribological behaviors of different ion-implanted Si. The relationship between the mechanical properties and tribological behavior and the damage mechanism of scratch and wear were also discussed.

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Characterization of the Young’s modulus, residual stress and fracture strength of Cu–Sn–In thin films using combinatorial deposition and micro-cantilevers

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/25/3/035023 ◽

2015 ◽

Vol 25 (3) ◽

pp. 035023 ◽

Cited By ~ 8

Author(s):

Wardhana A Sasangka ◽

Chee Lip Gan ◽

Donny Lai ◽

Chuan Seng Tan ◽

Carl V Thompson

Keyword(s):

Thin Films ◽

Residual Stress ◽

Young’S Modulus ◽

Fracture Strength ◽

Young's Modulus

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Micromechanical Characterization of Dielectric Thin Films

MRS Proceedings ◽

10.1557/proc-308-601 ◽

1993 ◽

Vol 308 ◽

Cited By ~ 3

Author(s):

James M. Grow

Keyword(s):

Thin Films ◽

Young’S Modulus ◽

Deposition Temperature ◽

Silicon Oxide ◽

Young's Modulus ◽

Chemical Vapor ◽

Silicon Carbonitride ◽

Dielectric Thin Films ◽

Micromechanical Characterization

ABSTRACTA nanoindenter has been used to obtain Young's modulus and hardness data for a variety of dielectric thin films including silicon carbide, boron nitride, silicon carbonitride, and silicon oxide. These films, were synthesized by low pressure and plasma enhanced chemical vapor deposition, and had a thickness from 0.25 to a few microns. For the BN films, the modulus and hardness of the films decreased significantly as the deposition temperature increased while the reverse was true for the SiC films. In both cases, these changes were related to variations in the compositions of the deposits due to the onset of different reactions as the temperature is increased. Silicon carbonitride films oxidized slowly when synthesized at temperatures below 200º C and the Young's modulus of these films increased at higher deposition temperatures. For silicon dioxide, there was little change in the composition of the films over the deposition temperature range investigated (375–475º C), thus correspondingly, small variations in the micromechanical properties of the material. However, moisture and hydrogen removal caused by an anneal at 800º C resulted in an significant increase in the modulus and hardness of these films.

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Comparative study of nitrogen implantation effect on mechanical and tribological properties of Ti-6Al-4V and Ti-10Zr-10Nb-5Ta alloys

The European Physical Journal Applied Physics ◽

10.1051/epjap/2019180149 ◽

2019 ◽

Vol 85 (2) ◽

pp. 21301 ◽

Cited By ~ 2

Author(s):

Stéphanie Carquigny ◽

Jamal Takadoum ◽

Steliana Ivanescu

Keyword(s):

Comparative Study ◽

Young’S Modulus ◽

Tribological Properties ◽

Tribological Behavior ◽

Young's Modulus ◽

Implantation Dose ◽

Nitrogen Implantation ◽

Mechanical And Tribological Properties ◽

Counterpart Material

The effect of nitrogen implantation on mechanical and tribological properties of Ti-6Al-4V and Ti-10Zr-10Nb-5Ta alloys was studied. Increasing implantation dose from 1 × 1016 N+/cm2 to 2 × 1017 N+/cm2 leads to increase gradually both hardness and Young's modulus. The results show that implantation of 2 × 1017 N+/cm2 allowed to double the value of Young's modulus and to triple the value of hardness. Friction tests that have been conducted against 100Cr6 steel and alumina balls showed that tribological behavior of the two alloys depend on the nature of the counterpart material and is strongly affected by the implanted dose of nitrogen.

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Investigation of Nano-Mechanical and- Tribological Properties of Hydrogenated Diamond Like Carbon (DLC) Coatings

Journal of Mechanics ◽

10.1017/jmech.2016.106 ◽

2016 ◽

Vol 33 (6) ◽

pp. 769-776 ◽

Cited By ~ 5

Author(s):

Y.-R. Jeng ◽

S. Islam ◽

K-T. Wu ◽

A. Erdemir ◽

O. Eryilmaz

Keyword(s):

Mechanical Properties ◽

Fracture Toughness ◽

Friction Coefficient ◽

Young’S Modulus ◽

Tribological Properties ◽

Young's Modulus ◽

Chemical Vapour ◽

Diamond Like Carbon ◽

Dlc Coatings ◽

Mechanical And Tribological Properties

AbstractHydrogenated diamond like Carbon (H-DLC) is a promising lubricious coating that attracted a great deal of interest in recent years mainly because of its outstanding tribological properties. In this study, the nano-mechanical and -tribological properties of a range of H-DLC films were investigated. Specifically, four kinds of H-DLC coatings were produced on Si substrates in pure acetylene, pure methane, 25% methane + 75% hydrogen, 50% methane + 50% hydrogen discharge plasmas using a plasma enhanced chemical vapour deposition (PECVD) system. Nano indentation was performed to measure the mechanical properties such as hardness and young's modulus and nanoscartching was performed to investigate the frictional behavior and wear mechanism of the H-DLC samples in open air. Moreover, Vickers indentation method was utilized to assess the fracture toughness of the samples. The results revealed that there is a strong correlation between the mechanical properties (hardness, young's modulus, fracture toughness) and the friction coefficient of DLC coatings and the source gas chemistry. Lower hydrogen to carbon ratio in source gas leads to higher hardness, young's modulus, fracture toughness and lower friction coefficient. Furthermore, lower wear volume of the coated materials was observed when the friction coefficient was lower. It was also confirmed that lower hydrogen content of the DLC coating leads to higher wear resistance under nanoscratch conditions.

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THE INFLUENCE OF REDUCING TEMPERATURE ON CHANGING YOUNG’S MODULUS AND THE COEFFICIENT OF FRICTION OF SELECTED SLIDING POLYMERS

Tribologia ◽

10.5604/01.3001.0012.7018 ◽

2018 ◽

Vol 279 (3) ◽

pp. 107-111

Author(s):

Anita PTAK ◽

Piotr KOWALEWSKI

Keyword(s):

Friction Coefficient ◽

Young’S Modulus ◽

Coefficient Of Friction ◽

Tribological Properties ◽

Young's Modulus ◽

Polymeric Materials ◽

Kinetic Friction ◽

Mechanical And Tribological Properties ◽

Pin On Disc ◽

The Coefficient Of Friction

For the polymeric materials, changing of the temperature causes changes in mechanical and tribological properties of sliding pairs. The goal of the present study was to determine the change in Young's modulus and kinetic friction coefficient depending of the temperature. Three thermoplastic polymers, PA6, PET and PEEK, were tested. These materials cooperated in sliding motion with a C45 construction steel disc. As part of the experiment, the Young's modulus tests (by 3-point bending method) and kinetic friction coefficient studies (using pin-on-disc stand) were carried out. The temperature range of mechanical and tribological tests was determined at T = –50°C±20°C. Comparing the results of mechanical and tribological properties, there is a tendency to decrease the coefficient of friction as the Young's modulus increases while reducing the working temperature.

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On-Chip Young’s Modulus Characterization of the Effect of Phosphorus Heavy Doping on Polysilicon Thin Films

Volume 12: Micro and Nano Systems, Parts A and B ◽

10.1115/imece2009-13083 ◽

2009 ◽

Author(s):

E. Bassiachvili ◽

P. Nieva ◽

A. Khajepour

Keyword(s):

Thin Films ◽

Young’S Modulus ◽

Doping Concentration ◽

Young's Modulus ◽

Bottom Layer ◽

Phosphorus Concentration ◽

Mems Devices ◽

Heavy Doping ◽

On Chip

Information on material properties of structural thin films for MEMS fabrication is very limited. The small information available in the literature suggests that the Young’s modulus of structural thin films such as polysilicon can change up to 30% with heavy doping at room temperature. Accurate knowledge of these variations is critical for proper design as well as operation of MEMS devices, especially for applications that require them to be exposed to harsh environmental conditions. In this paper, devices for the on-chip characterization of the Young’s modulus of polysilicon as a function of the doping concentration conditions are presented. Analytical modeling has been performed to predict the change in the devices’ pull-in voltage as a function of doping concentration. The devices were fabricated using the PolyMUMPs process on two different polysilicon layers on the same chip separated by a layer of oxide. The top layer devices are heavily doped while the bottom layer devices are left lightly doped. The lightly doped devices serve as a reference, allowing some account for fabrication uncertainties in order to ensure consistent results. Devices for measuring in-plane stresses, out-of-plane stress gradients and specially designed resistor structures that account for the effect of contact resistance have also been fabricated to monitor these quantities while testing. The devices will be tested using a customized vacuum chamber to study the effect of phosphorus concentration on these structures.

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CHARACTERIZATION OF MULTICOMPONENT, TRIBOLOGICAL AlCrTiN COATINGS, PRODUCED BY THE FILTERED CATHODIC VACUUM ARC METHOD

Tribologia ◽

10.5604/01.3001.0010.8052 ◽

2017 ◽

Vol 276 (6) ◽

pp. 5-11

Author(s):

Jan BUJAK ◽

Zbigniew SŁOMKA

Keyword(s):

Young’S Modulus ◽

Tribological Properties ◽

Young's Modulus ◽

Vacuum Arc ◽

Mechanical And Tribological Properties ◽

Filtration System ◽

Wide Range ◽

Plasma Filtration ◽

Filtered Cathodic Vacuum Arc ◽

Cathodic Arc

In this paper, the AlCrTiN coatings deposited by the cathodic arc method using a plasma filtration system have been studied to determine the effect of the use of this technology on the structural, mechanical, and tribological properties of these coatings. The results of the studies have revealed that using a plasma filtering system in the cathodic arc evaporation process has a significant influence on smoothness, hardness, Young's modulus, and plasticity of the coatings. Compared to the AlTiCrN coatings that have been deposited by the standard arc cathodic process, the coatings produced by filtered method have very smooth surfaces as well as lowered values of hardness, less Young's modulus, and a lower plasticity index H3/E2. Presented properties make coatings of this type able to dissipate elastic energy that is accumulated in them during the abrasion process by plastic deformations, which in turn, results in the reduction of the tendency to create damage in the coatings and cause a limitation of wear rate. Improved tribological properties of the AlTiCrN coatings produced by filtered cathodic arc technology indicate a very promising solution for a wide range of tribological applications.

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