Micro-RBS Analysis of Masklessly Fabricated Structures
Keyword(s):
Ion Beam
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ABSTRACTRutherford backscattering (RBS) analysis of small-sized structures, fabricated by laser chemical vapor deposition (LCVD) with a focused laser beam and ion implantation with a focused ion beam (FIB), has been performed by a microprobe with focused 1.5 MeV helium ions. Micro-RBS spectra and RBS-mapping images revealed a local distribution of masklessly deposited Mo layers on GaAs and local doses of masklessly implanted Au atoms in Si.
2012 ◽
Vol 51
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pp. 065001
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