Analysis of the Amorphous Silicon Carbide/Crystalline Silicon Interface
Keyword(s):
ABSTRACTThe performance and reliability of silicon-based hetero-structure devices depend critically on their interfacial characteristics. Here we present high-resolution TEM (HRTEM) results for the a-SiC:H/c-Si (100) interface, substrate doping, and interface electrical characteristics derived from an Al/undoped a-SiC:H/p-Si metal-insulator-semiconductor (MIS) structure. The HRTEM study reveals an interface with a maximum asperity of three atomic planes. The substrate dopant profile for depths less than an extrinsic Debye length from the interface is computed from an iterative fit to the C-V data. A density of interface traps (Dit) of 1011 eV−1cm−2 at midgap is obtained.
Keyword(s):
2014 ◽
Vol 16
(29)
◽
pp. 15400-15410
◽
Keyword(s):
2009 ◽
Vol 93
(6-7)
◽
pp. 737-741
◽
Keyword(s):
2013 ◽
Vol 582
◽
pp. 181-184
◽