Stress and Microstructure in Rf-Diode and Dc-Magnetron Sputtered Beryllium Thin Films

1991 ◽  
Vol 239 ◽  
Author(s):  
Risto H. Mutikainen
Keyword(s):  
Thin Films ◽  
Grain Growth ◽  
Deposition Parameters ◽  
Film Microstructure ◽  
Columnar Grain ◽  
Free Films

ABSTRACTThe effect of deposition parameters on the properties of sputtered Be films has been studied. The parameters have been optimized to obtain stress free films. Nitrogen pulsing has been used to improve the film microstructure by suppressing the columnar grain growth.

scholarly journals Columnar grain growth of FePt(L10) thin films

2012 ◽  
Vol 111 (7) ◽  
pp. 07B720 ◽  
Author(s):  
En Yang ◽  
Hoan Ho ◽  
David E. Laughlin ◽  
Jian-Gang Zhu
Keyword(s):  
Thin Films ◽  
Grain Growth ◽  
Columnar Grain

Single-crystal and Nano-columnar Growth of Gadolinium-doped Ceria Thin Films on Oxide Substrates Studied Using Electron Microscopy

2003 ◽  
Vol 795 ◽  
Author(s):  
D. X. Huang ◽  
C. L. Chen ◽  
A. J. Jacobson
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Single Crystal ◽  
Grain Growth ◽  
Lattice Mismatch ◽  
Compressive Strain ◽  
Doped Ceria ◽  
Columnar Grain ◽  
Film Substrate ◽  
Gadolinium Doped Ceria

ABSTRACTGadolinium-doped ceria (GDC) thin films were grown by pulsed laser ablation on various oxide single crystal substrates including MgO, YSZ, LAO, NGO, and STO with different film-substrate lattice mismatch ratios. The film microstructures were characterized mainly by using electron microscopy. A clear influence of the filmsubstrate lattice mismatch on the film crystallinity has been observed. The GDC films usually exhibit columnar grain growth for a large range of film-substrate lattice mismatch ratios. A cube-on-cube growth of GDC film on MgO has been observed with a surprisingly high lattice mismatch ratio of 28%. The highest film crystallinity is obtained on the LAO substrates under a small compressive strain. This single-crystalline GDC film shows no columnar grain growth but presents a novel directionally-aligned precipitated Gd-rich nanoparticle system, which plays a specific role in relaxing various kinds of strain fields induced during the thin film growth to ensure the film crystallinity.

Novel yttrium-stabilized zirconia polymeric precursor for the fabrication of thin films

2004 ◽  
Vol 19 (9) ◽  
pp. 2708-2713 ◽  
Author(s):  
Roger M. Smith ◽  
Xiao-Dong Zhou ◽  
Wayne Huebner ◽  
Harlan U. Anderson
Keyword(s):  
Thin Films ◽  
Activation Energy ◽  
Grain Growth ◽  
Residual Strain ◽  
Annealing Temperature ◽  
Arrhenius Equation ◽  
Polymeric Precursor ◽  
Ambient Conditions ◽  
Stabilized Zirconia ◽  
Free Films

An acetate-based polymeric precursor for producing yttrium-stabilized zirconia (YSZ) was developed. The precursor was prepared under ambient conditions and contains only yttrium and zirconium cations. Dense, crack-free films were fabricated with this precursor on alumina substrates at a rate of 60 nm per deposition, producing polycrystalline YSZ at temperatures as low as 600 °C. Grain growth in thin YSZ films followed Arrhenius equation with an activation energy approximately 0.45 eV. The residual strain in YSZ films decreased with increasing annealing temperature from 600 to 900 °C.

scholarly journals Multiple oxide content media for columnar grain growth in L10 FePt thin films

2013 ◽  
Vol 102 (11) ◽  
pp. 112411 ◽  
Author(s):  
Hoan Ho ◽  
En Yang ◽  
David E. Laughlin ◽  
Jian-Gang Zhu
Keyword(s):  
Thin Films ◽  
Grain Growth ◽  
Oxide Content ◽  
Columnar Grain ◽  
Fept Thin Films

Observations on the growth of YBa2Cu3O7-δ thin films on MgO by pulsed-laser ablation

1991 ◽  
Vol 49 ◽  
pp. 1068-1069
Author(s):  
M. Grant Norton ◽  
C. Barry Carter
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Laser Ablation ◽  
Substrate Surface ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Laser Ablation Process ◽  
Deposition Parameters

Pulsed-laser ablation has been widely used to produce high-quality thin films of YBa2Cu3O7-δ on a range of substrate materials. The nonequilibrium nature of the process allows congruent deposition of oxides with complex stoichiometrics. In the high power density regime produced by the UV excimer lasers the ablated species includes a mixture of neutral atoms, molecules and ions. All these species play an important role in thin-film deposition. However, changes in the deposition parameters have been shown to affect the microstructure of thin YBa2Cu3O7-δ films. The formation of metastable configurations is possible because at the low substrate temperatures used, only shortrange rearrangement on the substrate surface can occur. The parameters associated directly with the laser ablation process, those determining the nature of the process, e g. thermal or nonthermal volatilization, have been classified as ‘primary parameters'. Other parameters may also affect the microstructure of the thin film. In this paper, the effects of these ‘secondary parameters' on the microstructure of YBa2Cu3O7-δ films will be discussed. Examples of 'secondary parameters' include the substrate temperature and the oxygen partial pressure during deposition.

scholarly journals Influence of deposition parameters on the optical absorption of amorphous silicon thin films

2020 ◽  
Vol 2 (3) ◽  
Author(s):  
Lukas Terkowski ◽  
Iain W. Martin ◽  
Daniel Axmann ◽  
Malte Behrendsen ◽  
Felix Pein ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Absorption ◽  
Amorphous Silicon ◽  
Silicon Thin Films ◽  
Deposition Parameters

Ionic Conductivities of Doped CeO2 Thin Films as Related to Their Microstructure

1995 ◽  
Vol 411 ◽  
Author(s):  
Chunyan Tian ◽  
Siu-Wai Chan
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Ionic Conductivities ◽  
Dielectric Constants ◽  
Grain Structure ◽  
X Ray Diffraction ◽  
Fine Grain ◽  
Brick Layer Model ◽  
Columnar Grain ◽  
Beam Deposition

ABSTRACTThin films of 4% Y2O3 doped CeO2/Pd film/(001)LaA103 with a very low pinhole density were successfully prepared using electron-beam deposition technique. The microstructure of the films was characterized by x-ray diffraction and the electrical properties were studied as a function of temperature with AC impedance spectroscopy. A brick layer model was adopted to correlate the electrical properties to the microstructure of the films, which can be simplified as either a series or a parallel equivalent circuit associated with either a fine grain or a columnar grain structure, respectively. The conductivities of the films fell between the conductivities derived from the two circuit models, suggesting that the films are of a mixed fine grain and columnar grain structure. The measured dielectric constants of the films were found smaller than that of the bulk.

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