Investigation of Pt Bottom Electrodes for "In-Situ" Deposited Pb(Zr,Ti)O3 (PZT) thin Films

1991 ◽  
Vol 243 ◽  
Author(s):  
Rainer Bruchhaus ◽  
Dana Pitzer ◽  
Oliver Eibl ◽  
Uwe Scheithauer ◽  
Wolfgang Hoesler
Keyword(s):  
Elevated Temperatures ◽  
Diffusion Processes ◽  
Rutherford Backscattering Spectrometry ◽  
Layer Sequence ◽  
Si Substrates ◽  
Transmission Electron ◽  
In Situ Deposition ◽  
Electron Spectrometry ◽  
Heating Up

AbstractThe deposition of the bottom electrode plays a key role in the fabrication of ferroelectric capacitors. Processing at elevated temperatures of up to 800°C can give rise to diffusion processes and thereof formation of harmful dielectric layers.In this paper we used Rutherford backscattering spectrometry (RBS), Auger electron spectrometry (AES) and transmission electron microscopy (TEM) to study Pt/Ti/SiO2/Si substrates with various thicknesses of the Ti and Pt layers. During heating up to about 450°C in vacuum the initial layer sequence remains unchanged. However, drastic changes occur when the electrodes are exposed to Ar/O2 atmosphere during heat treatment. Oxidation induced diffusion of Ti into Pt and oxidation of Ti were observed. A Pt electrode with a 100 nm thick Ti adhesion layer proved to be suitable for the "in-situ" deposition of PZT films.

Effects of Annealings on Pt/TiN/Ti Interfacial Reactions

1994 ◽  
Vol 361 ◽  
Author(s):  
F. Varniere ◽  
B. Eakim ◽  
B. Agius ◽  
R. Bisaro ◽  
J. Olivier ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Barrier Layer ◽  
Elevated Temperatures ◽  
Diffusion Processes ◽  
Rutherford Backscattering Spectrometry ◽  
Lead Zirconate ◽  
Poor Quality ◽  
Si Substrates ◽  
Pzt Film ◽  
Electron Spectrometry

ABSTRACTThe selection of a suitable electrode and barrier layer is important in the integration of lead zirconate titanate (PZT) into memory circuits. Processing at elevated temperatures of up to 800°C can give rise to diffusion processes and therefore to formation of poor quality layers.In this paper we used Rutherford Backscattering Spectrometry (RBS), Auger Electron Spectrometry (AES), and X-ray Diffraction (XRD) to study the effects of annealings on the interdiffusion of Pt/TiN/Ti trilayers deposited on BPSG/Si substrates. The wafers were annealed in Ar, N2 or O2 ambients with temperatures ranging from 550 to 700°C for 60 min, 30 min or 30 sec. Drastic changes occur when the as deposited Pt/TiN/Ti layers on BPSG/Si structures are exposed to classical heat treatment: oxidation induces diffusion of Ti into Pt and oxidation of Ti is also observed. Regardeless of annealing proceedure used, significant improvement in the interdiffusion of Pt, Ti and O have been achieved when the TiN/Ti/BPSG/Si structure was heated up to 450°C in vacuum. Platinum films deposited on such a structure seem to be a promising barrier layer for PZT film elements as there was no indication of Pb diffusion into the underlying layers and furthermore the desired crystal structure was obtained.

scholarly journals High-Resolution Microstructure Characterization of Additively Manufactured X5CrNiCuNb17-4 Maraging Steel during Ex and in Situ Thermal Treatment

2021 ◽  
Author(s):  
Mihaela Albu ◽  
Bernd Panzirsch ◽  
Hartmuth Schröttner ◽  
Stefan Mitsche ◽  
Klaus Reichmann ◽  
...  
Keyword(s):  
Maraging Steel ◽  
Elevated Temperatures ◽  
Scanning Transmission Electron Microscope ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
The Matrix ◽  
Powder Particles ◽  
In Situ Heating ◽  
Heating Up

Powder and SLM additively manufactured parts of X5CrNiCuNb17-4 maraging steel were systematically investigated by electron microscopy to understand the relationship between the properties of the powder grains and the microstructure of the printed parts. We prove that satellites, irregularities and superficial oxidation of powder particles can be transformed into an advantage through the formation of nanoscale (AlMnSiTiCr)-oxides in the matrix during the printing process. The nano-oxides showed extensive stability in terms of size, spherical morphology, chemical composition and crystallographic disorder upon in situ heating up to 950°C in the scanning transmission electron microscope. Their presence thus indicates a potential for oxide-dispersive strengthening of this steel, which may be beneficial for creep resistance at elevated temperatures. The nucleation of copper clusters and their evolution into nanoparticles as well as the precipitation of Ni and Cr particles upon in situ heating have as well been systematically documented.

Formation of Sub-100 NM GE Wires on Si by E-Beam Evaporation/Lithography

1995 ◽  
Vol 380 ◽  
Author(s):  
C. Deng ◽  
J. C. Wu ◽  
C. J. Barbero ◽  
T. W. Sigmon ◽  
M. N. Wybourne
Keyword(s):  
Cross Section ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Si Substrates ◽  
Novel Technique ◽  
Atomic Force ◽  
Transmission Electron ◽  
First Time ◽  
Scanning Electron

ABSTRACTA fabrication process for sub-100 nm Ge wires on Si substrates is reported for the first time. Wires with a cross section of 6 × 57 nm2 are demonstrated. The wire structures are analyzed by atomic force (AFM), scanning electron (SEM), and transmission electron microscopy (TEM). Sample preparation for TEM is performed using a novel technique using both pre and in situ deposition of multiple protection layers using a Focused Ion Beam (FIB) micromachining system.

scholarly journals Temperature Calibration forIn SituEnvironmental Transmission Electron Microscopy Experiments

2015 ◽  
Vol 21 (6) ◽  
pp. 1622-1628 ◽  
Author(s):  
Jonathan P. Winterstein ◽  
Pin Ann Lin ◽  
Renu Sharma
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Elevated Temperatures ◽  
Lattice Parameter ◽  
Hydrogen Gas ◽  
Material Behavior ◽  
Sample Temperature ◽  
Transmission Electron ◽  
Local Sample

AbstractIn situenvironmental transmission electron microscopy (ETEM) experiments require specimen heating holders to study material behavior in gaseous environments at elevated temperatures. In order to extract meaningful kinetic parameters, such as activation energies, it is essential to have a direct and accurate measurement of local sample temperature. This is particularly important if the sample temperature might fluctuate, for example when room temperature gases are introduced to the sample area. Using selected-area diffraction (SAD) in an ETEM, the lattice parameter of Ag nanoparticles was measured as a function of the temperature and pressure of hydrogen gas to provide a calibration of the local sample temperature. SAD permits measurement of temperature to an accuracy of ±30°C using Ag lattice expansion. Gas introduction can cause sample cooling of several hundred degrees celsius for gas pressures achievable in the ETEM.

To-and-Fro Motion of W5Si3 on a β-Si3N4 Substrate at Elevated Temperatures

2002 ◽  
Vol 8 (1) ◽  
pp. 16-20 ◽  
Author(s):  
S. Arai ◽  
K. Suzuki ◽  
H. Saka
Keyword(s):  
Electron Microscope ◽  
High Temperatures ◽  
Transmission Electron Microscope ◽  
Elevated Temperatures ◽  
Fine Particles ◽  
Transmission Electron ◽  
In Situ Heating

Behavior of fine crystalline particles of W5Si3 on a β-Si3N4 substrate at high temperatures was observed by an in situ heating experiment in a transmission electron microscope. Some of the fine particles of W5Si3 moved in a to-and-fro manner.

Controlled Environment Specimen Transfer

2014 ◽  
Vol 20 (4) ◽  
pp. 1038-1045 ◽  
Author(s):  
Christian D. Damsgaard ◽  
Henny Zandbergen ◽  
Thomas W. Hansen ◽  
Ib Chorkendorff ◽  
Jakob B. Wagner
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Elevated Temperatures ◽  
Controlled Environment ◽  
Ambient Atmosphere ◽  
Air Exposure ◽  
X Ray ◽  
Environmental Transmission ◽  
Transmission Electron

AbstractSpecimen transfer under controlled environment conditions, such as temperature, pressure, and gas composition, is necessary to conduct successive complementary in situ characterization of materials sensitive to ambient conditions. The in situ transfer concept is introduced by linking an environmental transmission electron microscope to an in situ X-ray diffractometer through a dedicated transmission electron microscope specimen transfer holder, capable of sealing the specimen in a gaseous environment at elevated temperatures. Two catalyst material systems have been investigated; Cu/ZnO/Al2O3 catalyst for methanol synthesis and a Co/Al2O3 catalyst for Fischer–Tropsch synthesis. Both systems are sensitive to ambient atmosphere as they will oxidize after relatively short air exposure. The Cu/ZnO/Al2O3 catalyst, was reduced in the in situ X-ray diffractometer set-up, and subsequently, successfully transferred in a reactive environment to the environmental transmission electron microscope where further analysis on the local scale were conducted. The Co/Al2O3 catalyst was reduced in the environmental microscope and successfully kept reduced outside the microscope in a reactive environment. The in situ transfer holder facilitates complimentary in situ experiments of the same specimen without changing the specimen state during transfer.

scholarly journals In-situ Transmission Electron Microscopy at pressures above 1 bar and elevated temperatures

2012 ◽  
Vol 18 (S2) ◽  
pp. 1114-1115 ◽  
Author(s):  
H. Zandbergen
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Elevated Temperatures ◽  
Transmission Electron

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

In-Situ High Resolution Transmission Electron Microscopy of Dynamic Events During the Amorphous to Crystalline Phase Transformation in Silicon

1985 ◽  
Vol 62 ◽  
Author(s):  
M. A. Parker ◽  
T. W. Sigmon ◽  
R. Sinclair
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Phase Transformation ◽  
Solid State ◽  
High Resolution ◽  
Elevated Temperatures ◽  
Video Recording ◽  
Dynamic Events ◽  
Transmission Electron

ABSTRACTA technique has been developed which employs high resolution transmission electron microscopy (HRTEM) for the observation of the atomic mechanisms associated with solid state phase transformation as they occur at elevated temperatures. It consists of the annealing in-situ of cross-section transmission electron microscopy (TEM) specimens that have been favorably oriented for lattice fringe imaging and the video-recording of dynamic events as they occur in real-time. By means of this technique, we report the first video-recorded lattice images of crystallographic defect motion in silicon, viz. the motion of dislocations and stacking faults, as well as the first such images of the atomic mechanisms responsible for the amorphous to crystalline (a-c) phase transformation, viz. heterogeneous nucleation of crystal nuclei, coalescence of crystal nuclei by co-operative atomic processes, ledge motion at the growth interface, and normal growth in silicon. This technique holds great potential for the elucidation of the atomic mechanisms involved in reaction kinetics in the solid state.

scholarly journals High-Resolution Microstructure Characterization of Additively Manufactured X5CrNiCuNb17-4 Maraging Steel during Ex and In Situ Thermal Treatment

Materials ◽  
2021 ◽  
Vol 14 (24) ◽  
pp. 7784
Author(s):  
Mihaela Albu ◽  
Bernd Panzirsch ◽  
Hartmuth Schröttner ◽  
Stefan Mitsche ◽  
Klaus Reichmann ◽  
...  
Keyword(s):  
Maraging Steel ◽  
Elevated Temperatures ◽  
Scanning Transmission Electron Microscope ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
The Matrix ◽  
Powder Particles ◽  
In Situ Heating ◽  
Crystallographic Disorder

Powder and selective laser melting (SLM) additively manufactured parts of X5CrNiCuNb17-4 maraging steel were systematically investigated by electron microscopy to understand the relationship between the properties of the powder grains and the microstructure of the printed parts. We prove that satellites, irregularities and superficial oxidation of powder particles can be transformed into an advantage through the formation of nanoscale (AlMnSiTiCr) oxides in the matrix during the printing process. The nano-oxides showed extensive stability in terms of size, spherical morphology, chemical composition and crystallographic disorder upon in situ heating in the scanning transmission electron microscope up to 950 °C. Their presence thus indicates a potential for oxide-dispersive strengthening of this steel, which may be beneficial for creep resistance at elevated temperatures. The nucleation of copper clusters and their evolution into nanoparticles, and the precipitation of Ni and Cr particles upon in situ heating, have been systematically documented as well.

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