Defect Formation by Ion Implantation in Cz-Si Studied by a Monoenergetic Positron Beam

1992 ◽  
Vol 262 ◽  
Author(s):  
A. Uedono ◽  
Y. Ujihira ◽  
L. Wei ◽  
Y. Tabuki ◽  
S. Tanigawa ◽  
...  

ABSTRACTVacancy-type defects in ion implanted Si were studied by a monoenergetic positron beam. The depth-distributions of the defects were obtained from measurements of Doppler broadening profiles of the positron annihilation as a function of incident positron energy. The results showed that a size of vacany-clusters introduced by 150-keV P+-ion implantation was found to be smaller than that introduced by 2-MeV P+-ion implantation. This was attributed to an overlap of collision cascades in low-energy (150 keV) ion implanted specimens. From isochronal annealing experiments for 80-keV B+- and 150-keV P+-ion implanted specimens, the defected region was removed by 1200 °C annealing, however, for 2-MeV P+-implanted specimen, two-types of oxygen-vacancy complexes were found to coexist even after 1200 °C annealing.

1992 ◽  
Vol 262 ◽  
Author(s):  
A. Uedono ◽  
Y. Ujihira ◽  
L. Wei ◽  
Y. Tabuki ◽  
S. Tanigawa ◽  
...  

ABSTRACTVacancy-type defects in 60-keV Be+-implanted GaAs and InP were studied by a monoenergetic positron beam. The depth distributions of vacancy-type defects were obtained from measurements of Doppler broadening profiles of the positron annihilation as a function of incident positron energy. Vacancy-type defects introduced by ion implantation were observed in n-type GaAs. For p-type GaAs, however, this was not the case. This can be attributed to the recombination of vacancy-type defects and pre-existed interstitial-type defects in p-type GaAs. The defects induced by ion implantation in InP were also studied.


1992 ◽  
Vol 262 ◽  
Author(s):  
S. Tanigawa ◽  
Y. Tabuki ◽  
L. Wei ◽  
K. Hinode ◽  
N. Kobayashi ◽  
...  

ABSTRACTInterfacial phenomena in the W-Si systems were studied by a monoenergetic positron beam. Doppler broadening profiles of the positron annihilation were measured as a function of incident positron energy. Tungsten thin films of 100 nm in thickness were deposited on p-type, 10 »cm Cz-grown Si wafers with (100) orientation by the DC magnetron sputtering method. Specimens were annealed at various temperatures in order to form suicides. It was found that the position of the interface of both W/Si and W silicide/Si is very different from the position expected from a simple situation neglecting the effect of electric field on the diffusion of positrons. This fact arouse the utility of positrons as a test charge to probe directly the electric field gradient in the Schottky barrier.


Author(s):  
Xudong An ◽  
Hongqiang Zhang ◽  
Te Zhu ◽  
Qianqian Wang ◽  
Peng Zhang ◽  
...  

2017 ◽  
Vol 31 (06) ◽  
pp. 1750033 ◽  
Author(s):  
Alaka Panda ◽  
L. Herojit Singh ◽  
R. Govindaraj ◽  
S. Abhaya ◽  
R. Kumar Yadav ◽  
...  

Detailed Mössbauer studies carried out in liquid sodium (Na)-exposed austenitic stainless steel (SS-316) show that there is a partial formation of ferromagnetically (FM)-ordered ferritic zones in the paramagnetic austenitic matrix. Results of low energy positron beam-based Doppler broadening studies imply the occurrence of vacancy kind of defects in the liquid Na-exposed SS-316. Correlating these results, the partial occurrence of FM-ordered zones in the liquid Na-exposed SS-316 is understood to be due to open volume defects, predominantly that of Ni vacancies occurring at the surface and upto a certain depth of liquid Na-exposed stainless steel. These results are elucidated in terms of hyperfine parameters associated with ferritic zones.


2010 ◽  
Vol 307 ◽  
pp. 85-92
Author(s):  
S.B. Shrivastava ◽  
Aman Deep Acharya ◽  
R. Sharma

The diffusion trapping model has been applied to slow positron annihilation in He+ irradiated polystyrene and polystyrene – polystyrene bilayers. The S-parameter and the positron lifetime have been calculated as a function of the incident positron energy. The effect of the fluence upon the nature of the S-parameter curve has been discussed. It has been found that a change in fluence affects positronium formation. The transition rate for surface to positronium formation has been found to be dependent upon the fluence and the atomic number of the irradiated ion. The lifetime results show that, at low energy, the o-Ps annihilates mainly at the polymeric surface. The free volume hole concentration is found to decrease at low energy, and becomes constant at higher energies.


1986 ◽  
Vol 74 ◽  
Author(s):  
P. G. Snyder ◽  
A. Massengale ◽  
K. Memarzadeh ◽  
J. A. Woollam ◽  
D. C. Ingram ◽  
...  

AbstractImplantation with 400 keV Ag or Cu ions improves the near-surface microstructural quality and reflectance of diamond turned and mechanically polished flat copper laser mirrors. Spectroscopic ellipsometry is sensitive to changes in either the microscopic surface roughness, or in the nearsurface substrate void fraction, and both parameters are observed to change upon implantation. Substrate density as a function of ion fluence peaks at about 5 × 10 15cm-2. Low energy (300 eV) Ar ion implantation can cause either a reduction or increase in microscopic surface roughness, depending on fluence.


2014 ◽  
Vol 505 ◽  
pp. 012018 ◽  
Author(s):  
C W He ◽  
K Dawi ◽  
C Platteau ◽  
M F Barthe ◽  
P Desgardin ◽  
...  

Author(s):  
J. Bentley ◽  
P. Angelini

As an alternative to the use of cross-sectioned specimens, a method which uses backthinned specimens has been developed for the measurement of concentration profiles in ion-implanted materials. The technique is less direct but avoids the sometimes insurmountable problems associated with the preparation of suitable cross-sectioned specimens and is more applicable to low-energy implants where the penetration depth is small. A series of x-ray spectra is measured in a wedge-shaped, backthinned foil.


1985 ◽  
Vol 131 (1) ◽  
pp. 87-96 ◽  
Author(s):  
C. N. Afonso ◽  
C. Ortiz ◽  
G. J. Clark

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