Modification of μm Thick Surface Layers Using keV Ion Energies

1983 ◽  
Vol 27 ◽  
Author(s):  
L. E. Rehn ◽  
N. Q. Lam ◽  
H. Wiedersich

ABSTRACTRoot-mean-square diffusion distances for both vacancy and interstitial defects in metals can be very large at elevated temperatures, e.g. several μm's in one second at 500°C. Consequently, defects that escape the implanted region at elevated temperature can produce compositional and microstructural changes to depths which are much larger than the ion range. Because of the high defect mobilities, and of the fact that diffusion processes must compete with the rate of surface recession, the effects of defect production (ballistic mixing), radiation-enhanced diffusion and radiation- induced segregation become spatially separated during ion bombardment at elevated temperature. Results of such experimental studies in a Cu-Ni alloy are presented, discussed and compared with predictions of a phenomenological model. Contributions to the subsurface compositional changes from radiation-enhanced diffusion and radiation- induced segregation are clearly identified.

1985 ◽  
Vol 51 ◽  
Author(s):  
Nghi Q. Lam ◽  
Gary K. Leaf

ABSTRACTA kinetic model has been developed to investigate the synergistic effects of radiation-enhanced diffusion, radiation-induced segregation and preferential sputtering on the spatial redistribution of implanted solutes during implantation at elevated temperatures. Sample calculations were performed for Al+ and Si+ ions implanted into Ni. With the present model, the influence of various implantation parameters on the evolution of implant concentration profiles could be examined in detail.


1983 ◽  
Vol 27 ◽  
Author(s):  
M. B. Lewis ◽  
C. J. Mchargue

ABSTRACTThe ion beam mixing technique has been employed to mix metal atoms into the surface layers of Al2O3. Ion beams of Fe+ and Zr+ in the 1 to 4 MeV energy range were used to irradiate Al2O3 specimens on the surfaces of which films of chromium or zirconium had been evaporated. Some specimens were irradiated at elevated temperatures of 873 or 1173 K. Rutherford backscattering (RBS) and channeling methods were used to measure the metal atom depth profiles near the surface. Analyses of the backscattering data included binary collision calculations using the codes TRIM and MARLOWE. The significance and limitations of high energy (>1 MeV) beams for ion beam mixing experiments is discussed. Evidence was found for radiation enhanced diffusion and/or solubility of zirconium and chromium in Al2O3 at 873 K.


1986 ◽  
Vol 1 (2) ◽  
pp. 251-267 ◽  
Author(s):  
Nghi Q. Lam ◽  
Gary K. Leaf

The evolution of the implant distribution during ion implantation at elevated temperatures has been theoretically studied using a comprehensive kinetic model. In the model foreign atoms, implanted into both interstitial and substitutional sites of the host lattice, could interact with implantation-induced point defects and with extended sinks such as the bombarded surface. The synergistic effects of preferential sputtering, radiation-enhanced diffusion, and radiation-induced segregation, as well as the influence of nonuniform defect production, were taken into account. The bombarded surface was allowed to move in either direction, − x or + x, depending on ion energy, i.e., on the competition between the rates of ion deposition and sputtering. The moving surface was accounted for by means of a mathematical technique of immobilizing the boundary. The ion implantation process was cast into a system of five coupled partial differential equations, which could be solved numerically using a suitable technique. Sample calculations were performed for two systems: Si+ and Al+ implantations into Ni. It has been known from previous studies that in irradiated Ni, Si atoms segregate in the same direction as the defect fluxes, whereas Al solutes migrate in the opposite direction. Thus the effects of different segregation mechanisms, as well as the influence of target temperature, ion energy, and implantation rate on the evolution of implant concentrations in time and space, could be examined with the present model.


1993 ◽  
Vol 316 ◽  
Author(s):  
A. Iwase ◽  
L. E. Rehn ◽  
P. M. Baldo ◽  
P. R. Okamoto ◽  
H. Wiedersich ◽  
...  

ABSTRACTRadiation-induced segregation (RIS) in Ni-12.7% Si and Cu-1% Au alloys was studied using Rutherford backscattering spectroscopy during He and Ne irradiation at elevated temperatures. During single ion-beam irradiation with 1.5 MeV He, strong RIS of Si toward the surface was observed in Ni-12.7% Si. Simultaneous irradiation with 400 keV Ne and 1.5 MeV He almost completely suppressed the Si segregation, even when the calculated damage production rate by Ne was only a few percent of that by He ions. A similar effect of dual-beam irradiation was observed in the Cu-1% Au alloy, i.e., the rate of near surface Au depletion was strongly reduced under simultaneous irradiation. The present result shows that dual-beam irradiation can be applied to control RIS and RED (Radiation Enhanced Diffusion) during ion beam processing.


1986 ◽  
Vol 74 ◽  
Author(s):  
R. S. Averback ◽  
S. -J. Kim ◽  
T. Diaz de la Rubia

AbstractThe roles of energetic displacement cascades are ubiquitous in the fields of radiation damage and ion beam modifications of materials. These roles can be described on two time scales. For the first, which lasts ≈ 10-11 s, small cascade volumes are characterized by large supersaturations of point defects, structural disorder, and energy densities in excess of some tenths of eV's per atom. During this period, the system can be driven far from equilibrium with significant rearrangement of target atoms and the production of Frenkel pairs. Experimental studies of ion beam mixing in conjunction with molecular dynamics computer simulations, have contributed largely toward understanding these dynamic cascade processes. At later times, the microstructure of the material evolves as cascades begin to overlap, or at elevated temperatures, point defects migrate away from their nascent cascades. It will be shown how the primary state of damage in cascades influences this microstructural development. Examples involving radiation-enhanced diffusion and ion-induced amorphization will be discussed.


2021 ◽  
Author(s):  
Nathan J. Madden ◽  
Samuel A. Briggs ◽  
Diana Perales ◽  
Timothy J. Boyle ◽  
Khalid Hattar ◽  
...  

Author(s):  
Kathleen B. Reuter

The Fe-Ni phase diagram is not well understood below 400°C. Of particular interest in this region is a disorder to order reaction whereby Fe-50 wt% Ni transforms from an FCC structure to an L1o superstructure. The kinetics of this transformation, however, are extremely slow (Table I). Therefore, to observe low-temperature transformations in the Fe-Ni system, extremely slow-cooled alloys must be studied (e.g., meteorites) or diffusion must be enhanced. One method to speed diffusion is irradiation. In 1962 Fe-50 wt% Ni was neutron irradiated; electrical resistivity measurements revealed a critical temperature (Tc)of 320°C. In 1977 Fe-50 wt% Ni was irradiated on a high voltage electron microscope (HVEM) and a T of 320°C was again found. A question arises, however, whether radiation enhanced diffusion or whether the radiation induced the transformation, causing a non-equilibrium ordered phase to form.


1985 ◽  
Vol 45 ◽  
Author(s):  
M. Rangaswamy ◽  
D. Farkas

ABSTRACTVarious models for predicting high fluence ion collection profiles are reviewed. Recent calculations based on the diffusion approximation are described. The solute and defect probability distributions are calculated by a MONTECARLO code, TRIM. The method takes into account the effects of sputtering, including preferential sputtering of one of the components, and lattice dilation. In addition, the effects of radiation enhanced diffusion and radiation induced segregation are also considered. The calculations include the coupling of solute and defect fluxes. The described formalism can account for observed maximum attainable concentrations and distributions in high fluence implantation conditions of practical interest.


1993 ◽  
Vol 311 ◽  
Author(s):  
R.R. Averback ◽  
Mai Ghaly ◽  
Y.Y. Lee ◽  
H. Zhu

ABSTRACTAtomic transport in irradiated solids has been investigated in both the prompt and delayed regimes. Prompt effects are revealed on an atomic level through molecular dynamics computer simulations. It is demonstrated that for metals like gold, which have high atomic numbers and low melting points, thermal spikes play a primary role in the cascade dynamics and that concepts like melting and rapid quenching are useful descriptions. Surface effects in these metals are also discussed. For metals with higher melting points and lower atomic numbers, the cascade dynamics are determined almost exclusively by energetic collisions far above thermal energies. This is illustrated by simulations of cascades in NiAl. The effect of the high ordering energy in this intermetallic compound on the radiation-induced defect structure has also been studied.Atomic transport in the delayed regime is illustrated by two examples: an order-disorder alloy, Cu3Au, and an amorphous alloy, NiZr. The first example is used to illustrate various aspects of radiation enhanced diffusion (RED): ion beam mixing, diffusion kinetics, the effects of primary recoil spectrum, and the importance of chemical order. The second example illustrates that the basic theory of RED, which was developed to describe crystalline materials, appears to work adequately for amorphous metal alloys, suggesting that similar mechanisms may be operating. It is shown, however, that the kinetics of RED observed in amorphous alloys are not unique to point defect models.


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