Low Temperature Si Homoepitaxy: Effects of Impurities on Microstructure
Keyword(s):
AbstractHydrogen is shown to influence the surface roughness during low temperature Si MBE. Small partial pressures (1 × 10-7 Torr) of deuterium, introduced during Si growth at 310°C, are sufficient to increase the surface width to ∼30 Å before breakdown of epitaxy. This work is consistent with previous studies of the dependence of epitaxial thickness on hydrogen partial pressure and supports a model in which surface roughening leads to the breakdown of epitaxy.
2015 ◽
Vol 60
(2)
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pp. 1547-1549
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2002 ◽
Vol 299-302
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pp. 87-92
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1996 ◽
Vol 54
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pp. 950-951
2017 ◽
Vol 47
(8)
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pp. 2029-2049
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