Magnetic Properties and Crystal Structure of High Moment FeTaN Thin Films
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ABSTRACTHigh Moment single layer FeTaN films with excellent soft magnetic properties have been grown by high rate reactive dc magnetron sputtering. The best combination of properties (easy and hard axis coercivities < 1 Oe, saturation Magnetization > 1650 emu/cc, anisotropy field of 5 Oe, and initial permeability of 4800) are found in films containing ∼3.2 a/O Ta and ∼7.5 a/o N after 400°C annealing in a 200 Oe dc field for two hours. These properties are associated with a single phase, random, nanocrystalline structure consisting of a-Fe crystallites (grain size of ∼ 100Å) whose lattice is expanded by both Ta and N.
2000 ◽
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pp. 3470-3472
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pp. 1241-1251
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