The Use of Secondary Ion Mass Spectrometry to Investigate Wire Bonding Yield Problems on Gold Contacts

1995 ◽  
Vol 390 ◽  
Author(s):  
G. R. Mount ◽  
T. L. Walzak ◽  
Y. C. Koo ◽  
D. McClure
Keyword(s):  
Mass Spectrometry ◽  
High Performance ◽  
Secondary Ion Mass Spectrometry ◽  
Low Cost ◽  
Gold Wire ◽  
Wire Bond ◽  
Bond Yield ◽  
Ion Mass Spectrometry ◽  
Bond Pads ◽  
Secondary Ion

ABSTRACTWith ongoing demand for high density wiring and high I/O on VLSI chips, the requirement of high wire bond yield is a challenge to achieve low cost, high performance and reliable products. Secondary Ion Mass Spectrometry (SIMS) was used to investigate the metallurgical contaminants on the gold wire bond pads and their impact on wire bond yields. SIMS depth profile studies showed that copper and nickel in concentrations greater than 1 wt% caused poor wire bondability, while copper concentration at less than 0.1 wt% resulted in good bondability of Al ultrasonic wire bonded to the gold pads.

A test apparatus for secondary ion mass spectrometry

1983 ◽  
Vol 61 (4) ◽  
pp. 535-542 ◽  
Author(s):  
N. Klaus ◽  
J. D. Brown
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Low Cost ◽  
Ion Source ◽  
Channel Electron Multiplier ◽  
Electron Multiplier ◽  
Spherical Source ◽  
Ion Mass Spectrometry ◽  
Cylindrical Source ◽  
Secondary Ion

A low cost test device for secondary ion mass spectrometry (SIMS) components is described. It consists of a turbomolecular pumped vessel containing an insulated sample stage on an x−y manipulator, extraction optics, quadrupole mass filter, and channel electron multiplier. The construction and characteristics of a cylindrical and a spherical saddlefield ion source are described. The output of the cylindrical source is 10−4 A cm−2 whereas that of the spherical source is in the order of 10−3 A cm−2 at voltages up to 9 kV and at a beam divergence of 4°.

Secondary Ion Mass Spectrometry Studies of Polycrystalline Thin-Film Cdte/Cds Solar Cells

1990 ◽  
Vol 48 (2) ◽  
pp. 304-305
Author(s):  
S.E. Asher
Keyword(s):  
Thin Film ◽  
Mass Spectrometry ◽  
High Temperature ◽  
High Efficiency ◽  
Secondary Ion Mass Spectrometry ◽  
Spray Pyrolysis Technique ◽  
Low Cost ◽  
Large Area ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Polycrystalline thin films of CdTe deposited on CdS are one of the most promising materials systems currently being investigated for the fabrication of low cost, large area, high efficiency photovoltaic devices. However, many of the deposition processes being used to fabricate these thin film materials have not yet been well characterized. It has been found that a post-fabrication heat-treatment is necessary to improve the quantum efficiency of these devices. Secondary ion mass spectrometry (SIMS) was used to study the interdiffusion of S and Te in CdTe/CdS structures grown by two different methods. The depth profiles revealed significant differences in the sputtering behavior depending on the film morphology.Two sets of CdTe/CdS samples were studied. The first set of films was deposited at high temperature using a spray pyrolysis technique with no post deposition anneal. The second set of films was electroplated, followed by treatment with CdCl2 and a high temperature anneal.

scholarly journals Correlative fluorescence microscopy, transmission electron microscopy and secondary ion mass spectrometry (CLEM-SIMS) for cellular imaging

2020 ◽  
Author(s):  
Felix Lange ◽  
Paola Agüi-Gonzalez ◽  
Dietmar Riedel ◽  
Nhu T.N. Phan ◽  
Stefan Jakobs ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Mass Spectrometry ◽  
Fluorescence Microscopy ◽  
High Performance ◽  
Secondary Ion Mass Spectrometry ◽  
Cell Structure ◽  
Light And Electron Microscopy ◽  
Epifluorescence Microscopy ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

AbstractElectron microscopy (EM) has been employed for decades to analyze cell structure. To also analyze the positions and functions of specific proteins, one typically relies on immuno-EM or on a correlation with fluorescence microscopy, in the form of correlated light and electron microscopy (CLEM). Nevertheless, neither of these procedures is able to also address the isotopic composition of cells. To solve this, a correlation with secondary ion mass spectrometry (SIMS) would be necessary. SIMS has been correlated in the past to EM or to fluorescence microscopy in biological samples, but not to CLEM. We achieved this here, using a protocol based on transmission EM, conventional epifluorescence microscopy and nanoSIMS. The protocol is easily applied, and enables the use of all three technologies at high performance parameters. We suggest that CLEM-SIMS will provide substantial information that is currently beyond the scope of conventional correlative approaches.

Summary Abstract: High‐performance molecular secondary ion mass spectrometry (SIMS)

1982 ◽  
Vol 20 (4) ◽  
pp. 1068-1069 ◽  
Author(s):  
J. E. Campana ◽  
T. M. Barlak ◽  
J. R. Wyatt ◽  
J. J. DeCorpo ◽  
R. J. Colton
Keyword(s):  
Mass Spectrometry ◽  
High Performance ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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