scholarly journals Ion Beam Modification of PVDC and Pe Polymers

1995 ◽  
Vol 396 ◽  
Author(s):  
A. L. Evelyn ◽  
D. Ila ◽  
J. Fisher ◽  
D. B. Poker
Keyword(s):  
Chemical Structure ◽  
Microprobe Analysis ◽  
Ion Beam ◽  
Electronic Energy ◽  
Alpha Particles ◽  
Stopping Power ◽  
Nuclear Stopping ◽  
Resistivity Measurements ◽  
Ion Beam Modification ◽  
Raman Microprobe

AbstractThe electronic and nuclear stopping effects produced by MeV ion bombardment in polyvinylidine chloride (PVDC) and polyethylene (PE) are separated by stacking thin films of the polymers. The resulting multi-layer laminates of each polymer were bombarded with 3.5 MeV alpha particles. The energy of the incident ions was selected, using TRIM, such that the first layers experienced most of the effects of the electronic energy deposited and the last layers received most of the effects of the nuclear stopping power. The changes in the conductance and the chemical structure of each layer were measured by direct resistivity measurements and Raman microprobe analysis.

Effects of MeV Ion Beam on Polymers

1996 ◽  
Vol 438 ◽  
Author(s):  
A. L. Evelyn ◽  
D. Ila ◽  
R. L. Zimmerman ◽  
K. Bhat ◽  
D. B. Poker ◽  
...  
Keyword(s):  
Chemical Structure ◽  
Microprobe Analysis ◽  
Ion Beam ◽  
Electrical Conductance ◽  
Electronic Energy ◽  
Alpha Particles ◽  
Layered System ◽  
Nuclear Stopping ◽  
Resistivity Measurements ◽  
Film Polymer

AbstractThe electronic (εe) and nuclear (εa) stopping effects produced by 3.5 MeV and 5.0 MeV ion bombardment in polyvinylidine chloride (PVDC), polyethylene (PE) and polyethylene sulfide were studied and compared. To separate these effects we chose two bombardment energies and a thin film polymer stacking technique developed in house. The resulting stacked layered system consisting of each polymer was bombarded with 3.5 MeV and 5.0 MeV alpha particles. The layered system was selected such that the first few layers experience most of the effects of the electronic energy deposited and the last layer receives the effects of the nuclear stopping. The electrical conductance and the changes in the chemical structure were measured by direct resistivity measurements, Raman microprobe analysis, RBS, and FTIR. The post-irradiation characterization resolved the effects of the stopping powers on the polymer films.

Study of the effects of MeV Ions on PS and PES

1997 ◽  
Vol 504 ◽  
Author(s):  
A. L. Evelyn ◽  
D. Ila ◽  
R. L. Zimmerman ◽  
K. Bhat ◽  
D. B. Poker ◽  
...  
Keyword(s):  
Chemical Structure ◽  
Microprobe Analysis ◽  
Crosslinking Agent ◽  
Electronic Energy ◽  
Gas Analysis ◽  
Alpha Particles ◽  
Layered System ◽  
Nuclear Stopping ◽  
Raman Microprobe ◽  
Nuclear Effects

ABSTRACTThe electronic and nuclear stopping effects produced by MeV ion bombardment in polyethylene (PE) and polyvinylidene chloride (PVDC) have been previously studied and reported. We have subsequently selected two other insulators: polystyrene (PS) and polyethersulfone (PES) which contains sulfur as a crosslinking agent, and irradiated them with MeV alpha particles. The electronic and nuclear effects of the incident ions were separated by stacking thin films of the polymers. A layered system was selected such that the first layers experienced most of the effects of the electronic energy deposited and the last layers received most of the effects of the nuclear stopping. The changes in the chemical structure were measured by residual gas analysis (RGA), Raman microprobe analysis, RBS and FTIR. The post-irradiation characterization resolved the effects of the stopping powers on the PS and PES and the results were compared with those from PE and PVDC.

scholarly journals The role of electronic energy loss in ion beam modification of materials

2015 ◽  
Vol 19 (1) ◽  
pp. 1-11 ◽  
Author(s):  
William J. Weber ◽  
Dorothy M. Duffy ◽  
Lionel Thomé ◽  
Yanwen Zhang
Keyword(s):  
Energy Loss ◽  
Ion Beam ◽  
Electronic Energy ◽  
Ion Beam Modification ◽  
Modification Of Materials

Ion Beam Induced Graphitization of Phenolformaldehyde

1993 ◽  
Vol 321 ◽  
Author(s):  
D. Ila ◽  
A. L. Evelyn ◽  
G. M. Jenkins
Keyword(s):  
Electrical Conductivity ◽  
Phase Transformation ◽  
Ion Beam ◽  
Alpha Particles ◽  
Resistance Measurement ◽  
Raman Microprobe

ABSTRACTWe have studied MeV ion beam induced phase transformation in phenolformaldehyde cured at 170°C by both Raman Microprobe spectroscopy and in situ resistance measurement of the irradiated area. Samples were irradiated using various doses of protons, alphas and nitrogen beams. Irradiated volumes in each sample were tested in situ for enhanced electrical conductivity and later on by Raman Microprobe spectroscopy. The results have shown changes in the resistance as much as seven orders of magnitude by alpha particles, six orders by nitrogen bombardment and three orders by hydrogen. Raman Microprobe spectroscopy of the darkened phase shows development of the D- and G-lines which are characteristic of the production of a carbonized resin. These spectra indicate that maximum carbonization was caused by the nitrogen beam.

Ion Beam Modification of Matrimid® Gas Separation Membrane—Evolution in Chemical Structure, Microstructure and Gas Permeation Properties

2002 ◽  
Vol 752 ◽  
Author(s):  
Xinglong Xu ◽  
Ling Hu ◽  
Maria Coleman
Keyword(s):  
Transport Properties ◽  
Chemical Structure ◽  
Gas Transport ◽  
Ion Irradiation ◽  
Ion Beam ◽  
Gas Permeation ◽  
Ion Beam Modification ◽  
Gas Transport Properties ◽  
Wide Range ◽  
Permeation Properties

ABSTRACTMatrimid® is a widely used polyimide that has both attractive thermal and gas transport properties. In addition, it has been used as a precursor polymer for production of carbon molecular sieving membranes with commercially interesting gas separations. Ion beam irradiation over a wide range of doses was used to modify a series of Matrimid® membranes. A combined analysis of impact of ion irradiation on the chemical structure, microstructure and gas transport properties of Matrimid® will be presented. Specifically, the evolution in gas permeation properties following irradiation over a wide range of doses will be discussed. Ion irradiation resulted in combined increased permeability and permselectivity for several gas pairs of interest.

Comparison of Impact of Virgin Polymer Structure on Properties of Irradiated Membranes – Hydrogen Ion Irradiation on Polyimide Isomers

2002 ◽  
Vol 752 ◽  
Author(s):  
Xinglong Xu ◽  
Ling Hu ◽  
J. Ilconich
Keyword(s):  
Transport Properties ◽  
Chemical Structure ◽  
Ion Irradiation ◽  
Ion Beam ◽  
Composite Membranes ◽  
Polymer Structure ◽  
Gas Permeation ◽  
Ion Beam Modification ◽  
Wide Range ◽  
The Impact

ABSTACTThis study focused on the impact of virgin polymer structure and microstructure on the transport properties of irradiated polyimide. Two fluorine containing polyimide isomers (6FDA-6FpDA and 6FDA-6FmDA) that differ solely in the location of the linkage between the diamine and dianhydride residues were used for this study. While these polymers differ in the location of a single bond, the virgin transport properties are dramatically different. The para connected isomer (6FDA-6FpDA) has much higher permeabilities and lower selectivities than the meta connect isomer (6FDA-6FmDA). The pure gas permeabilities in polyimide-ceramic composite membranes following H+ ion irradiation over a wide range of doses will be compared for these polyimide isomers. In addition, the evolution in chemical structure was monitored using Fourier transform infrared spectroscopy (FTIR). These polymers exhibited different decay rate in chemical structure following ion irradiation. Interestingly, the evolution in gas transport properties of these polymers following H+ ion irradiation was also quite different. We will discuss how the microstructure would affect the gas permeation properties of ion beam modification of polymer.

Fluorocarbon Precursor for High Aspect Ratio via Milling in Focused Ion Beam Modification of Integrated Circuits

2004 ◽  
Author(s):  
Valery Ray
Keyword(s):  
Side Effects ◽  
Aspect Ratio ◽  
Integrated Circuits ◽  
High Aspect Ratio ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Enabling Technology ◽  
Si Substrate ◽  
Ion Beam Modification ◽  
The Past

Abstract Gas Assisted Etching (GAE) is the enabling technology for High Aspect Ratio (HAR) circuit access via milling in Focused Ion Beam (FIB) circuit modification. Metal interconnect layers of microelectronic Integrated Circuits (ICs) are separated by Inter-Layer Dielectric (ILD) materials, therefore HAR vias are typically milled in dielectrics. Most of the etching precursor gases presently available for GAE of dielectrics on commercial FIB systems, such as XeF2, Cl2, etc., are also effective etch enhancers for either Si, or/and some of the metals used in ICs. Therefore use of these precursors for via milling in dielectrics may lead to unwanted side effects, especially in a backside circuit edit approach. Making contacts to the polysilicon lines with traditional GAE precursors could also be difficult, if not impossible. Some of these precursors have a tendency to produce isotropic vias, especially in Si. It has been proposed in the past to use fluorocarbon gases as precursors for the FIB milling of dielectrics. Preliminary experimental evaluation of Trifluoroacetic (Perfluoroacetic) Acid (TFA, CF3COOH) as a possible etching precursor for the HAR via milling in the application to FIB modification of ICs demonstrated that highly enhanced anisotropic milling of SiO2 in HAR vias is possible. A via with 9:1 aspect ratio was milled with accurate endpoint on Si and without apparent damage to the underlying Si substrate.

Raman microprobe analysis of gaseous inclusion in diagenetically recrystallized calcites

1984 ◽  
Vol 107 (2) ◽  
pp. 193-202 ◽  
Author(s):  
Nicole Guilhaumou ◽  
Bruce Velde ◽  
Claire Beny
Keyword(s):  
Microprobe Analysis ◽  
Gaseous Inclusion ◽  
Raman Microprobe
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