Observation of Electromigration Voiding in Cu Lines

1997 ◽  
Vol 473 ◽  
Author(s):  
Seok-Hee Lee ◽  
John C. Bravman ◽  
Paul A. Flinn ◽  
Lucile Arnaud
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Grain Size ◽  
Transmission Electron ◽  
Cu Film ◽  
Long Line ◽  
Film Characteristics ◽  
Voltage Scanning ◽  
Scanning Electron

ABSTRACTCu film characteristics and in-situ observation of electromigration voiding in passivated Cu lines are reported. Measured grain size distribution show a median grain size of 0.4 μm. A 3 μm wide, 800 μm long line passivated with 5000 Å of SiO2 was tested in a high voltage scanning electron microscopy (HVSEM), enabling dynamic in-situ events to be recorded. Electromigration voiding in this line showed some similarity to that previously observed in polygranular Al lines. Transmission electron microscopy was used to study the microstructure of the passivated Cu lines.

Morphology of Polyethylene/Montmorillonite Nanocomposites Prepared by In Situ Polymerization

2013 ◽  
Vol 457-458 ◽  
pp. 244-247
Author(s):  
Min Li ◽  
Li Guang Xiao ◽  
Hong Kai Zhao
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
In Situ Polymerization ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Reflection Peak ◽  
Basal Reflection ◽  
Scanning Electron

Polyethylene/montmorillonite (PE/MMT) nanocomposites were prepared by in situ polymerization. The morphology of MMT/MgCl2/TiCl4 catalyst and PE/MMT nanocomposites was investigated by scanning electron microscopy (SEM). It can be seen that MMT/MgCl2/TiCl4 catalyst remained the original MMT sheet structures and many holes were found in MMT and the morphology of PE/MMT nanocomposites is part of the sheet in the form of existence, as most of the petal structure. X-ray diffraction (XRD) and transmission electron microscopy (TEM) were carried out to characterize all the samples. XRD results reveal that the original basal reflection peak of PEI1 and PEI2 disappears completely and that of PEI3 become very weak. MMT/MgCl2/TiCl4 catalyst was finely dispersed in the PE matrix. Instead of being individually dispersed, most layers were found in thin stacks comprising several swollen layers.

In Situ Scanning Electron Microscopy Observation of the Pattern Formation on the Surface of Al/Ge Bilayer Films

2007 ◽  
Vol 539-543 ◽  
pp. 3568-3573
Author(s):  
H. Kumagai ◽  
M. Shibata ◽  
Tomokazu Moritani ◽  
Takao Kozakai ◽  
Minoru Doi ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Grain Size ◽  
Free Surface ◽  
Electron Microscope ◽  
Microscopy Observation ◽  
Bilayer Films ◽  
Fractal Patterns ◽  
Scanning Electron

When the Al/Ge/SiO2 bilayer films are annealed in-situ in a scanning electron microscope (SEM) at the temperatures lower than the crystallization temperature of amorphous Ge itself, the so-called metal-mediated-crystallization (MMC) takes place. In the course of MMC, crystalline Ge aggregates (Ge clusters) form in the bilayer films, which results in the formation and the evolution of impressive fractal patterns with branching on the free surface. In-situ SEM observations of annealed Al/Ge/SiO2 bilayer films indicate that the grain size of polycrystalline Al-layer influences the nucleation of Ge clusters and hence of fractal patterns. For the bilayer films containing larger Al grains, the nucleation rate of fractal patterns (Ge clusters) is faster and the number of patterns is larger.

A high-voltage scanning electron microscopy system for in situ electromigration testing

2000 ◽  
Vol 71 (7) ◽  
pp. 2848-2854 ◽  
Author(s):  
J. C. Doan ◽  
S. Lee ◽  
S.-H. Lee ◽  
N. E. Meier ◽  
J. C. Bravman ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
High Voltage ◽  
Voltage Scanning ◽  
Scanning Electron

Low-Voltage Scanning Electron Microscopy Investigation of Polymers

1988 ◽  
Vol 46 ◽  
pp. 220-221
Author(s):  
V. K. Berry
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Low Voltage ◽  
Morphological Characterization ◽  
Transmission Electron ◽  
Conducting Materials ◽  
Voltage Scanning ◽  
Scanning Electron

The morphological characterization of any polymer blend plays an important part in the development of a new blend system because the properties of blends are dictated by phase morphology which is dependent upon the chemistry and the processing conditions. Light microscopy, scanning electron microscopy and transmission electron microscopy are the most commonly used microscopical techniques for morphological characterization. Transmission electron microscopy techniques provide the best resolution (≈ 0.3 nm) but are limited in the size of sample area and require elaborate sample preparation procedures. Surface charging and beam damage problems have been some of the drawbacks of conventional scanning electron microscopy with non-conducting materials like polymers.The use of low accelerating voltage scanning electron microscopy (LVSEM) in the characterization of polymers and other non-conducting materials is beginning to be recognized.

Structural features and dopant gradients in Mg2SnXSi1-X ternary compounds

2014 ◽  
Vol 1642 ◽  
Author(s):  
E. Hatzikraniotis ◽  
G.S. Polymeris ◽  
C.B. Lioutas ◽  
A. Burkov ◽  
E-C. Stefanaki ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Grain Size ◽  
Fourier Transform ◽  
Structural Features ◽  
Free Carrier ◽  
Ternary Compounds ◽  
Transmission Electron ◽  
Scanning Electron

ABSTRACTIn the present work, a comparative study is attempted, dealing with the influence of the grain size distribution on the microstructure and the free carrier concentration in Mg2SnXSi1-X (x=0.2) ternary compounds doped with Sb. Structural in-homogeneities were monitored by using Transmission Electron Microscopy (TEM), Scanning Electron Microscopy (SEM) as well as Fourier transform infrared spectroscopy (FTIR) in the reflectivity mode.

The Application of Scanning Electron Microscopy in the Investigation of Human Gastrointestinal Pathology

1973 ◽  
Vol 31 ◽  
pp. 430-431
Author(s):  
S. Siew
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Three Dimensional ◽  
Morphological Characteristics ◽  
Significant Advance ◽  
Gastrointestinal Pathology ◽  
Transmission Electron ◽  
Three Dimensional Configuration ◽  
Scanning Electron

A significant advance in our knowledge of gastrointestinal pathology has been achieved through endoscopy of the accessible portions of the alimentary tract. This procedure has allowed the evaluation of morphological characteristics of the mucosa by means of direct viewing in situ and through microscopy (light and transmission electron) of biopsies taken from selected areas. The importance of examination of the three dimensional configuration of the mucosal surface has been recognized, particularly in the assessment of the intestinal villi in cases of malabsorption, where it is recommended that the biopsies should be examined first by means of the dissecting microscope. Therefore, there is an obvious indication here for scanning electron microscopy, with its far greater potential.

Microstructure and Hardness of NbC Coating Produced In Situ

2015 ◽  
Vol 1120-1121 ◽  
pp. 745-749 ◽  
Author(s):  
Xiao Long Cai ◽  
Li Sheng Zhong ◽  
Jie Fang Wang ◽  
Tian Tian Shao ◽  
Na Na Zhao ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Heat Treatment ◽  
Scanning Electron Microscopy ◽  
Gray Cast Iron ◽  
Niobium Carbide ◽  
Oriented Attachment ◽  
Lattice Orientation ◽  
Transmission Electron ◽  
Scanning Electron

The niobium carbide (NbC) coating on gray cast iron has been produced by in situ which combined infiltration casting and heat treatment. The microstructural observations of the coating have been obtained by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). And the growth mechanism of NbC grain was studied. The results show that the mechanism is orientation connection which means two particles of the same lattice orientation will be directly connected together and oriented attachment growth. Fine NbC grain can improve the nanohardness value of the coating with 23 GPa, meanwhile, it increase the elastic modulus with the value of 493.7 GPa.

Antibacterial Activity and Stability of the Electrospun Antibacterial Polymer/Silver Nanoparticle Nanohybrid Mats

2016 ◽  
Vol 848 ◽  
pp. 538-542
Author(s):  
Jin Hui Wu ◽  
Run Ze Wang ◽  
Li Mei Hao ◽  
Ying Yi ◽  
Ming Zhao ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Poly Vinyl Alcohol ◽  
Spectroscopy Analysis ◽  
Spectra Analysis ◽  
Transmission Electron ◽  
Bactericidal Effects ◽  
One Step ◽  
Scanning Electron

In our previous work, silver nanoparticles (AgNPs) with ultrasmall sizes (4.3 ± 0.7 nm) can be in-situ obtained within the poly (vinyl alcohol) (PVA) fibers by mediating the electro-spun conditions. The obtained AgNPs “trapped” within the electro-spun PVA nanofibers were believed to be stable in the dry state, as the abundant PVA molecules could protect the dispersed AgNPs from agglomerating with each other. In this study, based on former study, aging tests about the nanohybrid mats were performed. Through ATR-FTIR spectra analysis, the formation mechanism of AgNPs within the PVA nanofiber by one-step electro-spun was confirmed. Atomic Absorption Spectroscopy analysis of the as-prepared PVA-Ag samples was performed in 14 h and the release of Ag+ was believed to be the main cause of its bactericidal effects. Scanning electron microscopy and transmission electron microscopy were used to characterize the nanofibers with AgNPs. After 4-month storage, the size of AgNPs doped in the PVA nanofiber became twice larger and the content of AgNPs was almost doubled.

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