Characterization of Diamond like Carbon film Fabricated by ECR Plasma CVD at room Temperature

1997 ◽  
Vol 504 ◽  
Author(s):  
K. Kuramoto ◽  
Y. Domoto ◽  
H. Hirano ◽  
H. Tarui ◽  
S. Kiyama
Keyword(s):  
Electron Cyclotron Resonance ◽  
Carbon Film ◽  
Chemical Vapor ◽  
High Hardness ◽  
Major Influence ◽  
Diamond Like Carbon ◽  
Ecr Plasma ◽  
High Electrical Resistivity ◽  
Film Hardness

ABSTRACTLow temperature (about 50°C) fabrication of diamond like carbon (DLC) films with a high hardness (>3000Hv) and a high electrical resistivity (>1011 Ωm) has been achieved.In order to obtain such a result, the effect of ion impingement on the growth and structural change of DLC films in an electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition (CVD) method was investigated. It was confirmed that ion impingement was fundamentally required in the growth of DLC films. Furthermore, impingement with ions energized by bias voltages between 50V and 150V had a major influence on the sp 2/sp 3 configuration in DLC films. This configuration is found to be rather sensitive to optoelectronic properties but not so sensitive to film hardness.Additionally, this method could fabricate ultrathin DLC films that exhibited excellent wear resistance for protective applications.

MULTILAYERS DIAMOND-LIKE CARBON FILM WITH GERMANIUM BUFFER LAYERS BY PULSED LASER DEPOSITION

2017 ◽  
Vol 24 (02) ◽  
pp. 1750014 ◽  
Author(s):  
Y. CHENG ◽  
Y. M. LU ◽  
Y. L. GUO ◽  
G. J. HUANG ◽  
S. Y. WANG ◽  
...  
Keyword(s):  
Critical Load ◽  
Carbon Film ◽  
High Hardness ◽  
Buffer Layers ◽  
Diamond Like Carbon ◽  
Dlc Film ◽  
Diamond Like Carbon Film ◽  
Film Hardness ◽  
Protective Films ◽  
Germanium Substrate

Multilayer diamond-like carbon film with germanium buffer layers, which was composed of several thick DLC layers and thin germanium island “layers” and named as Ge-DLC film, was prepared on the germanium substrate by ultraviolet laser. The Ge-DLC film had almost same surface roughness as the pure DLC film. Hardness of the Ge-DLC film was above 48.1[Formula: see text]GPa, which was almost the same as that of pure DLC film. Meanwhile, compared to the pure DLC film, the critical load of Ge-DLC film on the germanium substrate increased from 81.6[Formula: see text]mN to 143.8[Formula: see text]mN. Moreover, Ge-DLC film on germanium substrates had no change after fastness tests. The results showed that Ge-DLC film not only kept high hardness but also had higher critical load than that of pure DLC film. Therefore, it could be used as practical protective films.

Characterization and Optical Investigation of Diamondlike Carbon Prepared by Electron Cyclotron Resonance Plasma

1999 ◽  
Vol 14 (4) ◽  
pp. 1617-1625 ◽  
Author(s):  
Xiao-Ming He ◽  
S-T. Lee ◽  
I. Bello ◽  
A. C. Cheung ◽  
W. Z. Li ◽  
...  
Keyword(s):  
Visible Light ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
High Hardness ◽  
Electron Cyclotron ◽  
Optical Investigation ◽  
Ecr Plasma ◽  
High Electrical Resistivity ◽  
Diamondlike Carbon ◽  
Ar Gas

Diamondlike carbon (DLC) films have been prepared on radio-frequency (rf) biased substrates maintained at low temperature (∼60 °C) using electron cyclotron resonance CH4 –Ar plasma. The structures of the resultant films were characterized by Fourier transform infrared (FTIR), Raman, and ultraviolet/visible (UV/VIS) spectrometry. The studies revealed that the deposited structures were DLC films with sp3/sp2 bond hybridization, extremely high hardness (>3000 kgf/mm2), and high electrical resistivity (up to 1014 Ω cm). The DLC films deposited on colorless (transparent) polymer plastics were examined to determine visible light transparencies and optical bandgaps. The results indicate that electron cyclotron resonance (ECR) plasma processing with low negative rf bias, low deposition temperature, and suitable CH4/Ar gas composition can form optically visible light transparent and hard protective DLC films on polymer plastic surfaces.

Deposition and Etching of Amorphous Carbon Films Prepared by ECR-Plasma-Enhanced Benzene Chemical Vapor Deposition

1998 ◽  
Vol 555 ◽  
Author(s):  
Xiao-Hua Chen ◽  
Laren M. Tolbert ◽  
Z. Y. Ning ◽  
Dennis W. Hess
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Electron Cyclotron Resonance ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Benzene Vapor ◽  
Plasma Etch ◽  
Ecr Plasma ◽  
Amorphous Hydrogenated Carbon

AbstractAmorphous hydrogenated carbon thin films have been deposited from benzene vapor in a microwave electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition (CVD) system. Plasma enhanced dissociation and reaction of benzene were monitored by mass spectrometry. Deposited films were characterized by Fourier transform infrared spectroscopy and fluorescence spectroscopy. The effect of the deposition rate on the film density and plasma etch resistance was also studied. The etch resistance of deposited carbon film is higher than the conventional resist Novolac.

Influence on the Proprieties of PET Coated Diamond-Like Carbon Film for Different Preparing Condition by PECVD

2011 ◽  
Vol 80-81 ◽  
pp. 104-107 ◽  
Author(s):  
Gai Mei Zhang ◽  
Qiang Chen ◽  
Wen Cai Xu ◽  
Fei Pan ◽  
Bao Ping Miao
Keyword(s):  
Binding Capacity ◽  
Carbon Film ◽  
Chemical Vapor ◽  
High Hardness ◽  
Barrier Properties ◽  
High Wear Resistance ◽  
Diamond Like Carbon ◽  
Dlc Coating ◽  
Atomic Force ◽  
Pet Film

Diamond-like carbon (DLC) films exhibit high hardness, high wear resistance and a low friction coefficient. They are extensively utilized in the mechanical, electronic and biomedical industries. Due to the gas barrier properties, it is used in the food industry also. To investigate the binding capacity of the DLC with the substrate and reduce the contamination for foods. The DLC (a-C: H) films on the glass slide and PET film were prepared successfully for different process parameters by plasma enhanced chemical vapor deposition (PECVD). In order to characterize the DLC film, the images of DLC was visualized by the atomic force microscope (AFM). The films were analyzed by Fourier transform infrared spectroscopy (RTIF). The contact angle and oxygen permeation analyzer (OTR) of the PET with and without the DLC coating were investigated experimentally. The results show that the DLC coating can improve the barriers and surface properties.

Effect of RF Negative Bias on the Structure and Performance of Diamond-Like Carbon Films in ECR Plasma

2013 ◽  
Vol 423-426 ◽  
pp. 756-761
Author(s):  
Li Jun Sang ◽  
Qiang Chen ◽  
Zhong Wei Liu ◽  
Zheng Duo Wang
Keyword(s):  
Friction Coefficient ◽  
Electron Cyclotron Resonance ◽  
Crystalline Silicon ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Negative Bias ◽  
Film Property ◽  
Ecr Plasma ◽  
Peak Intensity ◽  
Stretching Vibration

Diamond-like carbon films (DLC) were deposited on single crystalline silicon surface under different RF negative bias in microwave electron cyclotron resonance (ECR) plasma source. The chemical structure and morphology were characterized by Fourier transformation infrared spectroscopy (FTIR) and atomic force microscopy (AFM). The friction coefficient of films was measured to examine the film property later. The results show that the smooth and compact deposited films were typical hydrogenated diamond-like carbon with CHn stretching vibration in 2800-3000cm-1. It is noticed that with the increase of RF bias on the substrate the peak intensity for C-H stretching vibration in spectrum between 2800cm-1~3000cm-1 increased at the beginning and then decreased, which caused the friction coefficient of the film being smaller and then larger in reverse. In 50W RF biased power one can obtain the maximum-CHn peak intensity and the minimum friction coefficient.

DIAMOND-LIKE CARBON: A NEW MATERIAL BASE FOR NANO-ARCHITECTURES

COSMOS ◽  
2008 ◽  
Vol 04 (02) ◽  
pp. 203-234 ◽  
Author(s):  
XIJUN LI ◽  
DANIEL H. C. CHUA
Keyword(s):  
Carbon Film ◽  
High Hardness ◽  
Diamond Like Carbon ◽  
Protective Film ◽  
Material Base ◽  
Wear Resistant Coatings ◽  
Novel Material ◽  
New Material ◽  
High Fraction ◽  
Mechanical Devices

Diamond-like carbon (DLC) is a form of amorphous carbon which has high fraction of sp3 hybridization. Due to its nature of sp3 bonding, diamond-like carbon has been shown to have excellent properties similar to that of diamond. This includes high hardness, excellent wear-resistance, large modulus and chemically inert. Traditional applications include wear resistant coatings and protective film. This article intends to review the synthesis and material properties of diamond-like carbon as well as its potential as a novel material for applications in nano-architecture and nano-mechanical devices. An introduction into metal-dopants in diamond-like carbon film will be briefly mentioned as well as techniques on the design and fabrication of this material.

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