High Purity Silicon Amido Precursors for Low Temperature Cvd of High к Gate Silicates

2002 ◽  
Vol 716 ◽  
Author(s):  
A.S. Borovik ◽  
C. Xu ◽  
B. C. Hendrix ◽  
J. F. Roeder ◽  
T. H. Baum
Keyword(s):  
Low Temperature ◽  
Elemental Analysis ◽  
High Purity ◽  
Gate Dielectrics ◽  
High Yield ◽  
Synthetic Method ◽  
Icp Ms ◽  
Metal Silicate ◽  
High Purity Silicon ◽  
Chemical Techniques

AbstractHigh purity silicon amido precursors provide a route to low temperature CVD of silicate gate dielectrics. We have developed a straightforward synthetic method for the production of high purity Si[N(CH3)2]4, Si(NMeEt)4, HSi(NEtMe)3 and HSi(NEt2)3 in high yield. These compounds were fully characterized by NMR, GC/MS, ICP-MS, ICchlorine, and elemental analysis. Their solution compatibility with an Hf amide source was also examined by chemical techniques. Low temperature CVD of metal silicate films is also demonstrated.

scholarly journals Studies on Synthesis of Aldimines: Part-I. Synthesis, Characterization and Biological Activity of Aldimines from Benzaldehyde with variedly substituted anilines

2018 ◽  
Author(s):  
C. J. Patil ◽  
Manisha C. Patil ◽  
Mrunmayee C. Patil
Keyword(s):  
Biological Activity ◽  
Aromatic Aldehyde ◽  
Elemental Analysis ◽  
High Purity ◽  
Aromatic Amines ◽  
Condensation Reaction ◽  
Physical Constant ◽  
High Yield ◽  
Substituted Anilines

A conventional condensation reaction of an aromatic aldehyde, Benzaldehyde with seven different aromatic amines viz. Aniline, 2-Choro-aniline, 3-Choro-aniline, 4-Choro-aniline, 2-Nitro-aniline, 3-Nitro-aniline and 4-Nitro-aniline and reacted efficiently to synthesize a series of Aldmines, I to VII, in moderate to high yield and high purity. The reaction was monitored and the products were analyzed by employing the TLC technique. All the products obtained were characterized by their colour, physical constant, TLC, elemental analysis and spectral (UV-Vis and FTIR) method. The synthesized Aldimines were subjected to in vitro biological activity.

Low Temperature Direct Reactions Between Elemental Silicon and Liquid Ammonia or Amines for Ceramics and Chemical Intermediates

1988 ◽  
Vol 121 ◽  
Author(s):  
Eloise A. Pugar ◽  
Peter E.D. Morgan
Keyword(s):  
Silicon Carbide ◽  
Silicon Nitride ◽  
Low Temperature ◽  
High Purity ◽  
Liquid Ammonia ◽  
Product Formation ◽  
Elemental Silicon ◽  
High Purity Silicon ◽  
Direct Reactions ◽  
Uv Raman

ABSTRACTDirect processes that may be used to manufacture high purity silicon nitride or silicon carbide are described. Elemental silicon has been found to react directly with liquid ammonia and amines at low temperature to yield compounds for both the ceramic and chemical industries. Silicon-amine direct reactions, previously thought not to occur, were investigated by using 29Si NMR, IR, UV, Raman, XRD, ICP, EDS and TGA methods to detect and characterize product formation. The [Si,N,H] and [Si,C,N,H] products transform to silicon nitride or silicon carbide respectively when heated above 1300°C.

Observation of Vacancy in High Purity Silicon Crystal Using Low-Temperature Ultrasonic Measurements

2019 ◽  
Vol 3 (4) ◽  
pp. 375-385 ◽  
Author(s):  
Terutaka Goto ◽  
Hiroshi Yamada-Kaneta ◽  
Yasuhiro Saito ◽  
Yuichi Nemoto ◽  
Koji Sato ◽  
...  
Keyword(s):  
Low Temperature ◽  
High Purity ◽  
Silicon Crystal ◽  
Ultrasonic Measurements ◽  
High Purity Silicon

The Peculiarities of the Sample Preparation of Bottom Sediments for ICP-MS Elemental Analysis

2020 ◽  
Vol 75 (5) ◽  
pp. 496-505
Author(s):  
Ya. V. Bychkova ◽  
D.P. Starodymova ◽  
K. V. Shaikhutdinova ◽  
D. R. Dyagileva ◽  
M. A. Semernin ◽  
...  
Keyword(s):  
Sample Preparation ◽  
Bottom Sediments ◽  
Elemental Analysis ◽  
Icp Ms

4-Hydroxy Pyridinium Triflate@SiO2 Nanoparticles as a Novel Efficient Catalyst for Fries Rearrangement of Aryl Esters with High Selectivity

2020 ◽  
Vol 17 (8) ◽  
pp. 654-660
Author(s):  
Shermineh Sadat Ghalehbandi ◽  
Dadkhoda Ghazanfari ◽  
Sayed Ali Ahmadi ◽  
Enayatollah Sheikhhosseini
Keyword(s):  
High Selectivity ◽  
Sio2 Nanoparticles ◽  
High Yield ◽  
Synthetic Method ◽  
Functionalized Silica ◽  
Efficient Catalyst ◽  
Fries Rearrangement ◽  
Free Condition ◽  
Solvent Free Condition ◽  
Work Up

Introduction: We developed a simple, fast and new method for the Fries rearrangement of aryl esters. Materials and Methods: 4-Hydroxy pyridinium triflate functionalized silica is a very efficient, reusable and economically available catalyst for the Fries rearrangement in solvent-free condition and under microwave irradiation. Results and Discussion: Also, a notable selectivity was observed in the presence of 4-hydroxy pyridinium triflate functionalized silica. Conclusion: Selectivity, shorter reaction time, high yield, and easy work-up are advantages of this synthetic method.

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