Monolithic Three-Dimensional Integration of Micro-Fluidic Channels and Optical Waveguides in Fused Silica

2003 ◽  
Vol 782 ◽  
Author(s):  
Yves Bellouard ◽  
Ali Said ◽  
Mark Dugan ◽  
Philippe Bado
Keyword(s):  
Optical Waveguides ◽  
Single Channel ◽  
Three Dimensional ◽  
Fused Silica ◽  
Microfluidic Channels ◽  
Major Step ◽  
Micro Fabrication ◽  
Silica Substrate ◽  
Massively Parallel Processing ◽  
Integrated Device

ABSTRACTThis paper presents dramatic improvements in the micro-fabrication of three-dimensional microfluidic channels and high-aspect ratio tunnels within the bulk of a fused silica substrate. We also report the fabrication of optical waveguides within the same substrate, which is a major step towards the integration of sensing capabilities within microfluidic networks.This integrated device, which combines both fluidic channels and optical waveguides, opens new opportunities in bio- and chemical sensing. The flexibility of the improved manufacturing process offers substantial new design capabilities, especially for single channel probing and massively parallel processing and sensing.

scholarly journals Femtosecond Laser Micromachining of Fabry-Pérot Interferometers for Magnetic Field Sensing

2019 ◽  
Vol 215 ◽  
pp. 13001 ◽  
Author(s):  
João M. Maia ◽  
Vítor A. Amorim ◽  
Duarte Viveiros ◽  
P. V. S. Marques
Keyword(s):  
Magnetic Field ◽  
Refractive Index ◽  
Optical Waveguides ◽  
Light Propagation ◽  
Three Dimensional ◽  
Laser Micromachining ◽  
Fused Silica ◽  
Microfluidic Channels ◽  
Focal Volume ◽  
Fabry Perot

Fs-laser micromachining is a high precision fabrication technique that can be used to write novel three-dimensional structures, depending on the nature of light-matter interaction. In fused silica, the material modification can lead to (i) an increase of the refractive index around the focal volume, resulting in the formation of optical circuits, or (ii) an enhancement of the etch rate of the laser-affected zones relative to the pristine material, leading to a selective and anisotropic etching reaction that enables fabrication of microfluidic systems. Here, both effects are combined to fabricate a Fabry-Pérot interferometer, where optical waveguides and microfluidic channels are integrated monolithically in a fused silica chip. By filling the channel with a magnetic fluid whose refractive index changes with an external magnetic field, the device can be used as a magnetic field sensor. A linear sensitivity of -0.12 nm/mT is obtained in the 5.0±0.5 to 33.0±0.5 mT range, with the field being applied parallel to the light propagation direction.

scholarly journals A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding

Micromachines ◽  
2020 ◽  
Vol 11 (2) ◽  
pp. 213 ◽  
Author(s):  
Jia Qi ◽  
Wenbo Li ◽  
Wei Chu ◽  
Jianping Yu ◽  
Miao Wu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Fused Silica ◽  
Wet Etching ◽  
Mixing Efficiency ◽  
Cross Sectional ◽  
Microfluidic Mixer ◽  
Silica Substrate ◽  
Femtosecond Laser Micromachining ◽  
Bonding Method

We demonstrate a microfluidic mixer of high mixing efficiency in fused silica substrate using femtosecond laser-induced wet etching and hydroxide-catalysis bonding method. The micromixer has a three-dimensional geometry, enabling efficient mixing based on Baker’s transformation principle. The cross-sectional area of the fabricated micromixer was 0.5 × 0.5 mm2, enabling significantly promotion of the throughput of the micromixer. The performance of the fabricated micromixers was evaluated by mixing up blue and yellow ink solutions with a flow rate as high as 6 mL/min.

SEM analysis of DC magnetron sputtered beryllium films

1988 ◽  
Vol 46 ◽  
pp. 960-961
Author(s):  
E. F. Lindsey ◽  
C. W. Price ◽  
E. L. Pierce ◽  
E. J. Hsieh
Keyword(s):  
Fine Structure ◽  
Electron Emission ◽  
Secondary Electron ◽  
Low Voltage ◽  
Ion Beam ◽  
Secondary Electron Emission ◽  
Sem Analysis ◽  
Fused Silica ◽  
Grain Structure ◽  
Silica Substrate

Columnar structures produced by DC magnetron sputtering can be altered by using RF biased sputtering or by exposing the film to nitrogen pulses during sputtering, and these techniques are being evaluated to refine the grain structure in sputtered beryllium films deposited on fused silica substrates. Beryllium is brittle, and fractures in sputtered beryllium films tend to be intergranular; therefore, a convenient technique to analyze grain structure in these films is to fracture the coated specimens and examine them in an SEM. However, fine structure in sputtered deposits is difficult to image in an SEM, and both the low density and the low secondary electron emission coefficient of beryllium seriously compound this problem. Secondary electron emission can be improved by coating beryllium with Au or Au-Pd, and coating also was required to overcome severe charging of the fused silica substrate even at low voltage. The coating structure can obliterate much of the fine structure in beryllium films, but reasonable results were obtained by using the high-resolution capability of an Hitachi S-800 SEM and either ion-beam coating with Au-Pd or carbon coating by thermal evaporation.

Fabrication of Three-Dimensional Micro-Structures with Two-Photon Absorption by Femtosecond Laser

2006 ◽  
Vol 532-533 ◽  
pp. 568-571
Author(s):  
Ming Zhou ◽  
Hai Feng Yang ◽  
Li Peng Liu ◽  
Lan Cai
Keyword(s):  
Photonic Crystal ◽  
Femtosecond Laser ◽  
Detection System ◽  
Three Dimensional ◽  
Photon Absorption ◽  
Micro Fabrication ◽  
Two Photon Absorption ◽  
Two Photon ◽  
Photo Polymerization ◽  
System A

The photo-polymerization induced by Two-Photon Absorption (TPA) is tightly confined in the focus because the efficiency of TPA is proportional to the square of intensity. Three-dimensional (3D) micro-fabrication can be achieved by controlling the movement of the focus. Based on this theory, a system for 3D-micro-fabrication with femtosecond laser is proposed. The system consists of a laser system, a microscope system, a real-time detection system and a 3D-movement system, etc. The precision of micro-machining reaches a level down to 700nm linewidth. The line width was inversely proportional to the fabrication speed, but proportional to laser power and NA. The experiment results were simulated, beam waist of 0.413μm and TPA cross section of 2×10-54cm4s was obtained. While we tried to optimize parameters, we also did some research about its applications. With TPA photo-polymerization by means of our experimental system, 3D photonic crystal of wood-pile structure twelve layers and photonic crystal fiber are manufactured. These results proved that the micro-fabrication system of TPA can not only obtain the resolution down to sub-micron level, but also realize real 3D micro-fabrication.

Fabrication of Phase Mask for Optical Fiber Grating

2007 ◽  
Vol 364-366 ◽  
pp. 719-723
Author(s):  
Quan Liu ◽  
Jian Hong Wu ◽  
Ling Ling Fang ◽  
Chao Ming Li
Keyword(s):  
Diffraction Efficiency ◽  
Ion Beam ◽  
Fused Silica ◽  
Phase Mask ◽  
Fiber Grating ◽  
Ion Beam Etching ◽  
First Order ◽  
Silica Substrate ◽  
Order Diffraction ◽  
A New Technique

A fused silica phase mask with the period of 1069nm, and ruled area 50×50mm2 has been fabricated by a new technique, which combines holographic-ion beam etching and reactive ion beam etching. This involves several steps: coating of substrates with controlled thickness of photoresist, formation of a grating mask by holograph interference exposure and development, and finally transferring etching of this mask into the fused silica substrate to form a permanent phase mask. Experimental measurements have shown that the zero order diffraction efficiency is less than 4% and the plus and minus first-order diffraction efficiency is more than 35%. Theoretical analysis has shown that these phase masks can be used for fabricating UV written Fiber Bragg Gratings.

scholarly journals 3D Hydrodynamic Focusing in Microscale Optofluidic Channels Formed with a Single Sacrificial Layer

Micromachines ◽  
2020 ◽  
Vol 11 (4) ◽  
pp. 349 ◽  
Author(s):  
Erik S. Hamilton ◽  
Vahid Ganjalizadeh ◽  
Joel G. Wright ◽  
Holger Schmidt ◽  
Aaron R. Hawkins
Keyword(s):  
Cross Sections ◽  
Optical Waveguides ◽  
Sacrificial Layer ◽  
Three Dimensional ◽  
Single Layer ◽  
Detection Sensitivity ◽  
Low Flow ◽  
Hydrodynamic Focusing ◽  
Induced Focusing ◽  
Pressure Driven Flow

Optofluidic devices are capable of detecting single molecules, but greater sensitivity and specificity is desired through hydrodynamic focusing (HDF). Three-dimensional (3D) hydrodynamic focusing was implemented in 10-μm scale microchannel cross-sections made with a single sacrificial layer. HDF is achieved using buffer fluid to sheath the sample fluid, requiring four fluid ports to operate by pressure driven flow. A low-pressure chamber, or pit, formed by etching into a substrate, enables volumetric flow ratio-induced focusing at a low flow velocity. The single layer design simplifies surface micromachining and improves device yield by 1.56 times over previous work. The focusing design was integrated with optical waveguides and used in order to analyze fluorescent signals from beads in fluid flow. The implementation of the focusing scheme was found to narrow the distribution of bead velocity and fluorescent signal, giving rise to 33% more consistent signal. Reservoir effects were observed at low operational vacuum pressures and a balance between optofluidic signal variance and intensity was achieved. The implementation of the design in optofluidic sensors will enable higher detection sensitivity and sample specificity.

Sign in / Sign up

Export Citation Format

Share Document