Mechanisms of Cu Columns Growth
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ABSTRACTThe Cu <111> columns, which are formed during magnetron sputtering deposition, are faceted on the top and zigzag on sides. Our numerical results of large facet-facet diffusion barriers offer an explanation of the facet dimension. Based on the stacking fault formation energies of various face-centered-cubic metals, we suggest that the zigzag shape of Cu <111> columns is a result of deposition twins. Our molecular dynamics simulations indeed confirm this suggestion. Further, the dynamics simulations reveal the transient role of {100} facets, which facilitate the formation of {111} facets and disappear afterwards.
2009 ◽
Vol 633-634
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pp. 31-38
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2017 ◽
Vol 748
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pp. 375-380
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2007 ◽
Vol 22
(10)
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pp. 2758-2769
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2021 ◽
Vol 148
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pp. 104281
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