Research and Development of MEMS Accelerometer's Sensor

2021 ◽  
Vol 23 (2) ◽  
pp. 63-67
Author(s):  
Timoshenkov S.P. ◽  
◽  
Anchutin S.A. ◽  
Zarjankin N.M. ◽  
Kalugin V.V. ◽  
...  
Keyword(s):  
Research And Development ◽  
Sensitive Element ◽  
Inertial Sensor ◽  
Geometric Model ◽  
Mathematical Physics ◽  
Important Task ◽  
Mems Accelerometer ◽  
Deep Etching ◽  
Mems Accelerometers ◽  
Technological Route

Currently, MEMS accelerometers are one of the most promising areas in the inertial sensor industry. The design and study of MEMS accelerometers structures is associated with solving problems of mathematical physics. Also, a very important task is to comply with the technological route, including carrying out such operations as deep etching of silicon. This article describes the modeling of the developed geometric model of the sensitive element MEMS accelerometer. The calculations were carried out, which showed that the developed structure is efficient. As a result of the study of the Bosch process using methods for planning multifactor experiments, the modes of deep etching of silicon were optimized. Prototypes of sensitive element MEMS accelerometers have been produced.

scholarly journals Displacement Estimation Based on Optical and Inertial Sensor Fusion

Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1390
Author(s):  
Tomasz Ursel ◽  
Michał Olinski
Keyword(s):  
Sensor Fusion ◽  
Inertial Sensor ◽  
External Disturbance ◽  
Linear Displacement ◽  
Measuring System ◽  
Displacement Estimation ◽  
Mems Accelerometer ◽  
Pedestrian Navigation ◽  
Complementary Filter ◽  
Optical Flow Sensor

This article aims to develop a system capable of estimating the displacement of a moving object with the usage of a relatively cheap and easy to apply sensors. There is a growing need for such systems, not only for robots, but also, for instance, pedestrian navigation. In this paper, the theory for this idea, including data postprocessing algorithms for a MEMS accelerometer and an optical flow sensor (OFS), as well as the developed complementary filter applied for sensor fusion, are presented. In addition, a vital part of the accelerometer’s algorithm, the zero velocity states detection, is implemented. It is based on analysis of the acceleration’s signal and further application of acceleration symmetrization, greatly improving the obtained displacement. A test stand with a linear guide and motor enabling imposing a specified linear motion is built. The results of both sensors’ testing suggest that the displacement estimated by each of them is highly correct. Fusion of the sensors’ data gives even better outcomes, especially in cases with external disturbance of OFS. The comparative evaluation of estimated linear displacements, in each case related to encoder data, confirms the algorithms’ operation correctness and proves the chosen sensors’ usefulness in the development of a linear displacement measuring system.

Identification of Vibration Parameters of Mechanical System Utilizing Low-Cost MEMS Accelerometers

2019 ◽  
Vol 894 ◽  
pp. 1-8
Author(s):  
Khanh Duong Quang ◽  
Huong Vuong Thi ◽  
Anh Luu Van
Keyword(s):  
High Speed ◽  
Low Cost ◽  
Damping Ratio ◽  
Vibration Reduction ◽  
Mechanical Systems ◽  
Micro Electro Mechanical Systems ◽  
Mems Accelerometer ◽  
System Parameters ◽  
Mems Accelerometers ◽  
Vibration Parameters

Multi-axial mechanical systems commonly encounter the problem of vibration while attempting to drive machining systems at high speed. Many effective methods based on feed-forward and feedback control have been proposed and applied for vibration reduction. In order to design controllers all methods require the exact knowledge of system parameters: vibration frequency and damping ratio. In recent years, low-cost Micro Electro Mechanical Systems (MEMS) accelerometers have been used for many applications in industry. This paper presents the advantage of low cost MEMS accelerometer to identify vibration parameters of mechanical systems in comparison to conventional expensive devices.

Research and Development of UG-Based CAD/ CAM System for Turbine Blade

2011 ◽  
Vol 201-203 ◽  
pp. 215-219
Author(s):  
Fang Jie Ren ◽  
Shi Quan Zhou ◽  
Jian Li ◽  
Zhi Qian Wan ◽  
Yi Zhao ◽  
...  
Keyword(s):  
Research And Development ◽  
Geometric Model ◽  
Three Dimensional ◽  
Cnc Machining ◽  
Design Efficiency ◽  
Machining Center ◽  
Cad Cam ◽  
Database Technology ◽  
Open Api ◽  
Cnc Machining Center

A CAD/ CAM system has been developed for turbine blade’s manufacturing based on the software of UG in accordance with a type of static blade of China Chang Jiang Energy Corp. (Group) in this paper. According to a few parameters input by users, the system automatically generate three-dimensional geometric model of the blade, and through its CAM module, it automatically generates the CNC track for four-axis CNC machining center. A management system has been developed by using UG / Open API, MFC, and database technology so as to improving the design efficiency in the UG.

scholarly journals High-G Calibration Denoising Method for High-G MEMS Accelerometer Based on EMD and Wavelet Threshold

Micromachines ◽  
2019 ◽  
Vol 10 (2) ◽  
pp. 134 ◽  
Author(s):  
Qing Lu ◽  
Lixin Pang ◽  
Haoqian Huang ◽  
Chong Shen ◽  
Huiliang Cao ◽  
...  
Keyword(s):  
High Frequency ◽  
Low Frequency ◽  
Original Signal ◽  
Denoising Method ◽  
Mems Accelerometer ◽  
Mode Decomposition ◽  
Impact Peak ◽  
Reconstructed Signal ◽  
Mems Accelerometers ◽  
The Impact

High-G MEMS accelerometers have been widely used in monitoring natural disasters and other fields. In order to improve the performance of High-G MEMS accelerometers, a denoising method based on the combination of empirical mode decomposition (EMD) and wavelet threshold is proposed. Firstly, EMD decomposition is performed on the output of the main accelerometer to obtain the intrinsic mode function (IMF). Then, the continuous mean square error rule is used to find energy cut-off point, and then the corresponding high frequency IMF component is denoised by wavelet threshold. Finally, the processed high-frequency IMF component is superposed with the low-frequency IMF component, and the reconstructed signal is denoised signal. Experimental results show that this method integrates the advantages of EMD and wavelet threshold and can retain useful signals to the maximum extent. The impact peak and vibration characteristics are 0.003% and 0.135% of the original signal, respectively, and it reduces the noise of the original signal by 96%.

scholarly journals Fusion Algorithm-Based Temperature Compensation Method for High-G MEMS Accelerometer

2019 ◽  
Vol 2019 ◽  
pp. 1-13 ◽  
Author(s):  
Qing Lu ◽  
Chong Shen ◽  
Huiliang Cao ◽  
Yunbo Shi ◽  
Jun Liu
Keyword(s):  
Temperature Compensation ◽  
Signal Reconstruction ◽  
Measurement Data ◽  
Wavelet Thresholding ◽  
Fusion Algorithm ◽  
Temperature Drift ◽  
Mems Accelerometer ◽  
Accelerometer Signal ◽  
Mems Accelerometers ◽  
And Performance

In recent years, High-G MEMS accelerometers have been widely used in aviation, medicine, and other fields. So it is extremely important to improve the accuracy and performance of High-G MEMS accelerometers. For this purpose, we propose a fusion algorithm that combines EMD, wavelet thresholding, and temperature compensation to process measurement data from a High-G MEMS accelerometer. In the fusion algorithm, the original accelerometer signal is first decomposed by EMD to obtain the intrinsic mode function (IMF). Then, sample entropy (SE) is used to divide the IMF components into three segments. The noise segment is directly omitted, wavelet thresholding is performed on the mixing segment, and a GA-BP performs temperature compensation on the drift segment. Finally, signal reconstruction is implemented. Later, a comparative analysis is carried out on the results from four models: EMD, wavelet thresholding, EMD + wavelet thresholding, and EMD + wavelet thresholding + temperature compensation. The experimental data show that the acceleration random walk change from 1712.66 g/h/Hz0.5 to 79.15 g/h/Hz0.5 and the zero-deviation stability change from 49275 g/h to 774.7 g/h. This indicates that the fusion algorithm (EMD + wavelet thresholding + temperature compensation) not only effectively suppresses the noise of high-frequency components but also compensates for temperature drift in the accelerometer.

A low-cost integrated positioning system for autonomous off-highway vehicles

2008 ◽  
Vol 222 (11) ◽  
pp. 1997-2009 ◽  
Author(s):  
L-S Guo ◽  
Q Zhang
Keyword(s):  
Inertial Sensor ◽  
Low Cost ◽  
Maximum Error ◽  
Positioning System ◽  
Differential Gps ◽  
Fusion Algorithm ◽  
Position Information ◽  
Mems Accelerometer ◽  
Sensor Unit ◽  
Update Rate

This article reports a method for integrating a low-cost positioning system, constructed using a Garmin N17 global positioning system (GPS) and an integrated inertial sensor unit, consisting of three single-axis microelectromechanical system (MEMS) gyros and one triaxial MEMS accelerometer, for autonomous off-highway vehicle use. Based on a vehicle position—velocity—attitude (PVA) model, a data fusion algorithm was formulated to extract more accurate and reliable positioning information from the raw data sensed by the GPS and inertial sensor unit. The developed integrated positioning system (IPS) was evaluated on an agricultural utility vehicle on three different sites. A real-time kinematic (RTK) differential GPS unit, capable of providing 2–3cm dynamic positioning accuracy while the position dilution of precision is low enough, was installed on the test vehicle to provide accurate positioning references in those evaluation tests. Results obtained from those tests showed that, when the vehicle was travelling on paved roads near buildings and/or under the trees, the maximum positioning error of the developed IPS was 0.50m, and that this maximum error level was reduced to 0.30m when the vehicle was travelling in open fields. The IPS could provide a position update rate at 50Hz; even the GPS could provide only a 1Hz update rate. Test results also revealed that this system could continuously provide accurate position signals when the GPS signal is lost for up to 30s. This research verified that a low-cost IPS could provide satisfactory position information for autonomous off-highway vehicle uses.

Research and Development of 300kW Class Ceramic Gas Turbine (Development of the Static Ceramic Components for CGT303)

1995 ◽  
Author(s):  
Mitsuharu Murota ◽  
Issei Ohhashi ◽  
Yoshiyuki Ito ◽  
Sadao Arakawa
Keyword(s):  
Research And Development ◽  
Gas Turbine ◽  
Pressure Ratio ◽  
Important Task ◽  
Inlet Temperature ◽  
Gas Temperature ◽  
Turbine Inlet Temperature ◽  
Engine Operation ◽  
Heat Cycle ◽  
Ceramic Components

As the result of setting the low pressure ratio at 4.5, sizes of the static ceramic components forming the gas passage in CGT303 have been increased, and establishing reliability of these components was thought to be the most important task. So, the heat-cycle tests were conducted, in advance of the engine operation, and improvements have been made on their material and constructions. After conducting 600 times of the heat-cycle tests, so far, up to the gas temperature of 1200°C, we have succeeded in the engine operation at the turbine inlet temperature of 1200°C Examples of the problems encountered in the test and of the solutions therefore are introduced in this paper.

Assessment the readiness of the well for pipeline pulling during the construction of underwater crossing

2020 ◽  
Vol 10 (5) ◽  
pp. 470-478
Author(s):  
Zarif Z. Sharafutdinov ◽  
◽  
Said F. Urmancheev ◽  
Rim A. Kapaev ◽  
◽  
...  
Keyword(s):  
Research And Development ◽  
Survey Data ◽  
Strain State ◽  
Geometric Model ◽  
Well Bore ◽  
Stress Strain ◽  
The Real ◽  
Survey Results ◽  
Aluminum Pipe ◽  
Development Methods

Directional survey results are used to monitor the condition of the well when pulling through the pipeline. They can be considered as a technical justification for the regulation of design and contracting organizations specialized in the construction of underwater crossings. The objective of this paper is to analyze methods of obtaining and processing directional survey data to assess the suitability of a well for pipeline pulling. It is established that using modern research and development methods it is possible to describe the directional survey results and construct a geometric model of the well to calculate the stress-strain state of the pipeline during pulling. However, in order to build a model as close to the real conditions as possible, it is necessary to provide the results of the directional survey both on the lower generating line and on the arch. This is possible using downhole gyroscopes. It is possible to survey the lower generating line by any methods, and to survey the well arch only through a plastic (polypropylene) or aluminum pipe. The results of the directional survey carried out along the lower generating line and arch of the well will make it possible to describe them in an analytical way, to build an appropriate geometric model of the well bore and use it to assess the readiness of the well for pulling the pipeline during the submerged crossing construction.

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