Efficient Fabrication Process of Metal Nanodot Arrays Using Direct Nanoimprinting Method with a Polymer Mold

A new fabrication process of metal nanodot arrays using the thermal dewetting method was developed in this study. This process was comprised of three steps: thin Au film deposition on a quartz glass substrate, groove patterning by direct nanoimprinting, and self-organization of metal nanodot arrays by thermal dewetting. A new idea to utilize a polymer film mold for groove patterning by direct nanoimprinting was examined. The polymer film mold was prepared by hot-embossing groove patterns of a mother mold on a cyclo olefin polymer (COP) film. The mother mold was prepared from a silicon wafer. The polymer film mold was used for direct nanoimprinting on a metal film deposited on a quartz substrate. The experimental results revealed that the COP film mold can effectively form a micro groove pattern on the Au film despite the COP film mold being softer than the Au film. The micro groove on the Au film was also found to be effective in aligning the nanodots in lines. The micro groove patterning using the COP film mold was also confirmed to be useful in controlling the dot size and alignment during the thermal dewetting process.

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Fabrication of Metallic Nanodot Arrays Using Nano-Chemical Stamping Technique with a Polymer Stamp

International Journal of Automation Technology ◽

10.20965/ijat.2016.p0794 ◽

2016 ◽

Vol 10 (5) ◽

pp. 794-803 ◽

Cited By ~ 2

Author(s):

Potejana Potejanasak ◽

◽

Masahiko Yoshino ◽

Motoki Terano

Keyword(s):

Polymer Film ◽

Self Organization ◽

Quartz Glass Substrate ◽

Chemical Patterning ◽

Dewetting Process ◽

Nanodot Arrays ◽

Controlled Morphology ◽

Micrometer Size ◽

Substrate Patterning ◽

Polymer Mold

The aim of this study is to develop metallic nanodot arrays with controlled morphology and alignment. To produce gold nanodot arrays with high throughput, the authors propose a new efficient fabrication process based on the templated thermal dewetting method, using a nano-chemical stamping technique with a polymer mold. This process comprises four steps: sputter etching on a quartz glass substrate, patterning of micrometer size by printing with acetone on the substrate by stamping with a polymer film stamp, deposition of a thin Au film on the substrate, and self-organization of the metal nanodot arrays by thermal dewetting. A new method, using a cyclo-olefin polymer film mold for chemical patterning by nano-chemical stamping, was examined. Since the acetone stamped on the substrate reduces the surface energy and affects the contact angle of the gold nanodots, the gold nanodots are distributed along the stamped pattern. It is found that the pattern stamped with acetone on the substrate works as a template for the thermal dewetting process. The nano-chemical stamping technique is useful in controlling the size and distribution of the nanodots.

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A Study on Fabrication Process of Gold Microdisk Arrays by the Direct Imprinting Method Using a PET Film Mold

Crystals ◽

10.3390/cryst11121452 ◽

2021 ◽

Vol 11 (12) ◽

pp. 1452

Author(s):

Potejana Potejanasak

Keyword(s):

Thin Film ◽

Quartz Substrate ◽

Thin Film Deposition ◽

Film Deposition ◽

Disk Arrays ◽

Master Mold ◽

Au Film ◽

Gold Thin Film ◽

Pet Film ◽

Etched Surface

In this study, an efficient nanofabrication process of metal microdisk arrays using direct imprinting was developed. This process was comprised of three steps; sputter etching on the quartz glass substrate, gold thin film deposition on an etched surface of a substrate, and transfer imprinting using a polyethylene terephthalate (PET) film mold on the Au thin film. A new idea to utilize a PET film mold for disk patterning by the nano transfer imprinting was examined. The PET film mold was prepared by thermally embossing the pillar pattern of a master mold on the PET film. The master mold was prepared from a silicon wafer. The PET film mold was used for transfer imprinting on a metal film deposited on a quartz substrate. The experimental results revealed that the PET film mold can effectively form gold micro-disk arrays on the Au film despite the PET film mold being softer than the Au film. This method can control the distribution and orientation of the nano-arrays on the disk. The plasmonic properties of the gold micro-disk arrays are studied and the absorbance spectrum exhibit depends on the distribution and orientation of gold micro-disk patterns. The nano-transfer imprinting technique is useful for fabricating metallic microdisk arrays on substrate as a plasmonic device.

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Wettability control of PET surface by plasma-induced polymer film deposition and plasma/UV oxidation in ambient air

Colloids and Surfaces A Physicochemical and Engineering Aspects ◽

10.1016/j.colsurfa.2018.07.033 ◽

2018 ◽

Vol 556 ◽

pp. 1-10 ◽

Cited By ~ 7

Author(s):

Keiko Gotoh ◽

Eriko Shohbuke ◽

Yasuyuki Kobayashi ◽

Hirohisa Yamada

Keyword(s):

Polymer Film ◽

Ambient Air ◽

Film Deposition ◽

Uv Oxidation

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Plasma Processing of Low Vapor Pressure Liquids to Generate Functional Surfaces

Molecules ◽

10.3390/molecules25246024 ◽

2020 ◽

Vol 25 (24) ◽

pp. 6024

Author(s):

Sandra Gaiser ◽

Urs Schütz ◽

Patrick Rupper ◽

Dirk Hegemann

Keyword(s):

Vapor Pressure ◽

Polymer Film ◽

Photoelectron Spectroscopy ◽

Laser Scanning ◽

Film Deposition ◽

Plasma Polymer ◽

Covalent Attachment ◽

Confocal Laser ◽

Water Contact ◽

Functional Surfaces

The concept of depositing solid films on low-vapor pressure liquids is introduced and developed into a top-down approach to functionalize surfaces by attaching liquid polyethylene glycol (PEG). Solid-liquid gradients were formed by low-pressure plasma treatment yielding cross-linking and/or deposition of a plasma polymer film subsequently bound to a flexible polydimethylsiloxane (PDMS) backing. The analysis via optical transmission spectroscopy (OTS), optical, confocal laser scanning (CLSM) and scanning electron microscopy (SEM), Fourier transform infrared (FTIR) and X-ray photoelectron spectroscopy (XPS) as well as by water contact angle (WCA) measurements revealed correlations between optical appearance, chemical composition and surface properties of the resulting water absorbing, covalently bound PEG-functionalized surfaces. Requirements for plasma polymer film deposition on low-vapor pressure liquids and effective surface functionalization are defined. Namely, the thickness of the liquid PEG substrate was a crucial parameter for successful film growth and covalent attachment of PEG. The presented method is a practicable approach for the production of functional surfaces featuring long-lasting strong hydrophilic properties, making them predestined for non-fouling or low-friction applications.

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Polymer film deposition on agar using a dielectric barrier discharge jet and its bacterial growth inhibition

Applied Physics Letters ◽

10.1063/1.4747806 ◽

2012 ◽

Vol 101 (7) ◽

pp. 074107 ◽

Cited By ~ 11

Author(s):

T.-C. Tsai ◽

J. Cho ◽

K. Mcintyre ◽

Y.-K. Jo ◽

D. Staack

Keyword(s):

Growth Inhibition ◽

Polymer Film ◽

Dielectric Barrier Discharge ◽

Bacterial Growth ◽

Barrier Discharge ◽

Film Deposition ◽

Dielectric Barrier ◽

Bacterial Growth Inhibition

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Plasma-driven self-organization of Ni nanodot arrays on Si(100)

Applied Physics Letters ◽

10.1063/1.3012572 ◽

2008 ◽

Vol 93 (18) ◽

pp. 183102 ◽

Cited By ~ 46

Author(s):

I. Levchenko ◽

K. Ostrikov ◽

K. Diwan ◽

K. Winkler ◽

D. Mariotti

Keyword(s):

Self Organization ◽

Nanodot Arrays

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Study of a Fabrication Process and Characterization of One Dimensional Array of Un-cooled Micro-bolometers Based on Germanium Films Deposited by Plasma

MRS Proceedings ◽

10.1557/proc-0989-a19-01 ◽

2007 ◽

Vol 989 ◽

Author(s):

Mario Moreno ◽

Andrey Kosarev ◽

Alfonso Torres ◽

Roberto Ambrosio

Keyword(s):

High Resistance ◽

Low Frequency ◽

Deposition Process ◽

Film Deposition ◽

Fabrication Process ◽

Thermal Coefficient ◽

One Dimensional ◽

Dimensional Array ◽

Bridge Type

AbstractIn our previous works we have studied the fabrication process and characterization of single cell micro-bolometers based on germanium thin films deposited by low frequency (LF) PECVD technique at low temperature and fully compatible with the IC fabrication technology. We have demonstrated promising properties of those devices for further development of IR imaging systems.In this work we report the study of a fabrication process and characterization of one dimensional array of 32 un-cooled micro-bolometers. We have used surface micro-machining techniques for the array fabrication onto a silicon wafer. The micro-bolometers in the array have a “bridge type” configuration, in which a SiNx supporting film is suspended 2.5 μm from the substrate by two legs forming the bridge in order to provide sufficient thermo-isolation for thermo-sensing layer, which is deposited by LF PECVD over it. The a-GexSiy:H film used in this devices showed high activation energy Ea= 0.34 eV, providing high thermal coefficient of resistance, TCR=α=0.043 K-1 and improved but still high resistance. We studied the effect of include boron in the a-GexSiy:H film deposition process in order to reduce its undesirable high resistance and we used this layer (a-GexBySiz:H) as thermo-sensing film in the micro-bolometers arrays also. The active area of the cells in the array is Ab=70×66 μm2 and the area of the array including interconnection lines and pads is A=1600×3120 μm2. The temperature dependence of conductivity σ(T), current-voltage characteristics I(U) and spectral noise density have been measured in the micro-bolometers in the array in order to characterize and compare their performance characteristics, such as responsivity and detectivity.

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Gold Nanoisland Agglomeration upon the Substrate Assisted Chemical Etching Based on Thermal Annealing Process

Crystals ◽

10.3390/cryst10060533 ◽

2020 ◽

Vol 10 (6) ◽

pp. 533 ◽

Cited By ~ 1

Author(s):

Potejana Potejanasak ◽

Sethavut Duangchan

Keyword(s):

Thermal Annealing ◽

Quartz Glass ◽

Glass Substrate ◽

Chemical Etching ◽

Annealing Process ◽

The Self ◽

Self Organization ◽

Quartz Glass Substrate ◽

Chemically Treated ◽

Thermal Annealing Process

In this study, we proposed the self-organization process and its localized surface plasmon resonance property (LSPR) to study the effect of chemically treated quartz glass substrates for gold nanoisland array formation. Firstly, we etched a quartz glass substrate using a sputter etching machine. Secondly, n-butanol was treated on the surface of the substrate. Then, we deposited a gold thin film on the substrate with assisted chemical etching. Finally, the self-organization method examined the thermal annealing of gold nanoisland arrays on a substrate. The results showed that the gold nanoisland that was aggregated on an etched quartz glass substrate was large and sparse, while the gold nanoisland aggregated on a chemically treated substrate was small and dense. Further, it was revealed that a substrate’s surface energy reduced chemical treating and increased the gold nanoisland contact angle on the substrate via the thermal annealing process. It was also confirmed that chemical treatment was useful to control the morphology of gold nanoisland arrays on a substrate, particularly when related to tuning their optical property.

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