scholarly journals Deposition temperature effect of the memory characteristics for Al2O3/Y2O3/SiO2 (AYO) multi-stacked film

2012 ◽  
Vol 120 (1407) ◽  
pp. 525-529
Author(s):  
Hye Young JUNG ◽  
Yoo Youl CHOI ◽  
Hyung Keun KIM ◽  
Doo Jin CHOI
Keyword(s):  
Temperature Effect ◽  
Deposition Temperature ◽  
Memory Characteristics

Deposition Temperature Effect on the Structure and Optical Property of RF-PACVD-Derived Hydrogenated SiCNO Film

2006 ◽  
Vol 37 (2) ◽  
pp. 173-177 ◽  
Author(s):  
Y. Zhou ◽  
X. Yan ◽  
E. Kroke ◽  
R. Riedel ◽  
D. Probst ◽  
...  
Keyword(s):  
Optical Property ◽  
Temperature Effect ◽  
Deposition Temperature

Deposition temperature effect on a-Si:H produced by DC magnetron sputtering

2011 ◽  
Author(s):  
R. J. Santana ◽  
T. D. O. Moura ◽  
G. R. Guimaraes ◽  
D. O. Miranda ◽  
R. T. Proenca ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Temperature Effect ◽  
Deposition Temperature ◽  
Dc Magnetron Sputtering

Deposition temperature effect on electrical properties and interface of high-kZrO2capacitor

2008 ◽  
Vol 41 (17) ◽  
pp. 172005 ◽  
Author(s):  
Joo-Hyung Kim ◽  
Velislava A Ignatova ◽  
Johannes Heitmann ◽  
Lars Oberbeck
Keyword(s):  
Electrical Properties ◽  
Temperature Effect ◽  
Deposition Temperature

Deposition-Temperature Effect on Nitride Trapping Layer of Silicon–Oxide–Nitride–Oxide–Silicon Memory

2007 ◽  
Vol 46 (5A) ◽  
pp. 2827-2830 ◽  
Author(s):  
Jia-Lin Wu ◽  
Chin-Hsing Kao ◽  
Hua-Ching Chien ◽  
Cheng-Yen Wu ◽  
Je-Chuang Wang
Keyword(s):  
Temperature Effect ◽  
Deposition Temperature ◽  
Silicon Oxide ◽  
Nitride Oxide
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