Design and Fabrication of a Strain-Powered Microelectromechanical System (MEMS) Switch

2014 ◽  
Author(s):  
Cory R. Knick ◽  
Christopher J. Morris

Author(s):  
Morgan Chen ◽  
Nicole Evers ◽  
Chris Kapusta ◽  
Joe Iannotti ◽  
Anh-Vu Pham ◽  
...  

We present the development of a hermetic shield packaging enclosure for RF microelectromechanical system switches (MEMS) using Liquid Crystal Polymer (LCP). A cavity formed in LCP has been laminated, at low temperature, onto a Si MEMS switch to create a hermetically sealed package. The hermetically sealed enclosure is a stack-up layer of the multi-layer organic chip-on-flex system-on-a-package (SOP). The entire SOP hermetically sealed package has a total insertion loss of ∼0.5 dB at X-band. E595 outgas tests demonstrate that the LCP package is reliable and hermetically protects the MEMS switch.



2013 ◽  
Vol 2013 ◽  
pp. 1-4 ◽  
Author(s):  
Adel Saad Emhemmed ◽  
Abdulmagid A. Aburwein

We present a new design of a miniature RF microelectromechanical system (MEMS) metal-contact switch and investigate various aspects associated with lowering the pull-down voltage and overcoming the stiction problem. Lowering the pull-down voltage in this design is based on reducing the spring constant by changing the cantilever beam geometry of the RF MEMS switch, and the stiction problem is overcome by a simple integrated method using two tiny posts located on the substrate at the free end of the cantilever beam.



2011 ◽  
Author(s):  
Stanley Karter ◽  
Tony Ivanov


2015 ◽  
Vol 32 (2) ◽  
pp. 55-62 ◽  
Author(s):  
Hatem Samaali ◽  
Fehmi Najar ◽  
Bouraoui Ouni ◽  
Slim Choura

Purpose – This paper aims to propose a novel design of an ohmic contact single-pole double-throw (SPDT) microelectromechanical system (MEMS) microswitch for radio frequency applications. Design/methodology/approach – The proposed microswitch (SPDT design) shares antenna between transmitter and receiver in a wireless sensor. An electrical voltage is used to create an electrostatic force that controls the ON/OFF states of the microswitch. First, the authors develop a mathematical model of the proposed microswitch and propose a reduced-order model of the design, based on the differential quadrature method, which fully incorporates the electrostatic force nonlinearities. The authors solve the static, transient and dynamic behavior and compare the results with finite element solutions. Then, the authors examine the dynamic solution of the switch under different actuation waveforms. Findings – The obtained results showed a significant reduction in actuation voltage, pull-in bandwidth and switching time. Originality/value – In this paper, a new design of SPDT MEMS switch is proposed, the SPDT switch needs low voltage to be actuated and it can be easily integrated with integrated circuits.



2020 ◽  
Vol 12 ◽  
Author(s):  
Pampa Debnath ◽  
Ujjwal Mondal ◽  
Arpan Deyasi

Aim:: Computation of loss factors for one-bit RF MEMS switch over Ku, K and Ka-band for two different insulating substrates. Objective:: Numerical investigation of return loss, insertion loss, isolation loss are computed under both actuated and unactuated states for two different insulating substrates of the 1-bit RF MEMS switch, and corresponding up and down-capacitances are obtained. Methods:: The unique characteristics of a 1-bit RF MEMS switch of providing higher return loss under both actuated and unactuated states and also of isolation loss with negligible insertion loss makes it as a prime candidate for phase shifter application. This is presented in this manuscript with a keen focus on improvement capability by changing transmission line width, and also of overlap area; where dielectric constant of the substrate also plays a vital role. Results:: The present work exhibits very low down-capacitance over the spectrum whereas considerable amount of up-capacitance. Also when overall performance in terms of all loss parameters are considered, switch provides very low insertion loss, good return loss under actuated state and standard isolation loss. Conclusion:: Reduction of transmission line width of about 33% improved the performance of the switch by increasing isolation loss. Isolation loss of -40 dB is obtained at actuated condition in higher microwave spectra for SiO 2 at higher overlap area. Down capacitance of ~ 1dB is obtained which is novel as compared with other published literature. Moreover, a better combination of both return loss, isolation loss and insertion loss are reported in this present work compared with all other published data so far.





2020 ◽  
Vol 1695 ◽  
pp. 012157
Author(s):  
N V Marukhin ◽  
I V Uvarov


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