Характер изменения обратного тока в туннельных МДП-диодах с фторидом кальция на Si(111) при создании дополнительного оксидного слоя
AbstractThe currents flowing in metal–CaF_2– n -Si and metal–SiO_2–CaF_2– n -Si structures with the same (about 1.5 nm) fluoride thickness are compared in the reverse-bias mode. It is revealed that the current in the case of a two-layer dielectric can be notably higher within a certain voltage range. Such unexpected behavior is associated with the coexistence of both electron and hole components of the current as well as with the configuration of the SiO_2–CaF_2 barrier through which tunneling occurs. The results of measurements and explanatory simulation data are presented.
2010 ◽
Vol 645-648
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pp. 343-346
1993 ◽
Vol 51
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pp. 452-453
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2010 ◽
Vol 69
(11)
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pp. 1005-1017
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Keyword(s):
2018 ◽
2012 ◽
Vol 2
(4)
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pp. 443-451
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