Радиоактивационный контроль плотности износостойких покрытий AlN и CrN на кремнии
2021 ◽
Vol 47
(10)
◽
pp. 26
Keyword(s):
In this work, the mass and linear thicknesses of AlN and CrN coatings deposited onto silicon substrates by magnetron sputtering were measured, respectively, by a combination of the methods of nondestructive radioactivation analysis on proton beams of the U-120M cyclotron and optical micro-interferometry. It is shown that, at linear thicknesses in the range of 2.2-5.7 μm, the coating density is close to the values for bulk materials AlN (3.26 g / cm3) and CrN (5.9 g / cm3), and the stoichiometry of nitrides is controlled by the parameters of magnetron deposition. The technique can also be used to determine the density of wear-resistant coatings from carbides and metal oxides.
2019 ◽
Vol 60
(5)
◽
pp. 598-607
◽
2020 ◽
Vol 11
(3)
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Keyword(s):
2010 ◽
Vol 51
(4)
◽
pp. 370-375
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Keyword(s):
1993 ◽
Vol 60
(1-3)
◽
pp. 525-530
◽
2007 ◽
Vol 124-126
◽
pp. 1513-1516
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Keyword(s):
2011 ◽
Vol 189-193
◽
pp. 3633-3639