The Effect of Sound on Diamond Hot Filament Chemical Vapor Deposition

2009 ◽  
Vol 7 (1) ◽  
Author(s):  
Syed Md. Ihsanul Karim ◽  
Mohammad Asaduzzaman Chowdhury ◽  
Md. Maksud Helali
Keyword(s):  
Chemical Vapor Deposition ◽  
Deposition Rate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Xrd Analysis ◽  
Sem Analysis ◽  
Extra Energy ◽  
Temperature And Pressure ◽  
Lower Temperature ◽  
Hot Filament

This paper presents how vapor deposited coating of carbon (partially diamond) on stainless steel 304 substrate was affected by temperature, pressure and duration of deposition in conjunction with sound vibration. To do so a hot filament chemical vapor deposition apparatus was designed and fabricated. The experiments were carried out under different frequency of vibration (ranging from sonic and ultra sonic). Results show that deposition rate varies with temperature, pressure and duration under vibrating and non-vibrating conditions. It was found that the deposition rate was higher for vibrating condition than that of non-vibrating condition. In this study, the higher the temperature, pressure and duration, the higher the effectiveness of frequency of vibration on the deposition rate was obtained. During thermal CVD process, activation of reactive species was enhanced by chemical activity with the increase of temperature and pressure. By adding extra energy of sound, kinetic energy was increased more due to increase of the adsorption and diffusion rate, which causes the increase of deposition rate.A coating of carbon (partially diamond) has been deposited on the substrate, and the characterization of the coating has been done by SEM including EDX and XRD. The coating of carbon was identified by EDX, and the allotropic forms of graphite and diamond peaks of carbon are found by XRD analysis. SEM analysis shown that the microstructures of deposited coatings were more compact and smoother under higher temperature and pressure than that of lower temperature and pressure.The experimental results are compared with those available in the literature and physical explanations are provided.

Effect of Different Deposition Pressure on Diamond Films Deposited by Hot Filament Chemical Vapor Deposition

2021 ◽  
Vol 21 (8) ◽  
pp. 4512-4518
Author(s):  
Rongguang Jin ◽  
Ji Cheng Ding ◽  
Chang Weon Song ◽  
Kwang Ho Kim
Keyword(s):  
Grain Size ◽  
Chemical Vapor Deposition ◽  
Deposition Rate ◽  
Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Nucleation Density ◽  
Deposition Pressure ◽  
Raman Spectrometry ◽  
Hot Filament

A hot filament chemical vapor deposition (HFCVD) method was adopted to deposit diamond films at deposition pressures ranging from 2–6 kPa. The effects of deposition pressure on the deposition rate, phase structure, and microstructure of diamond films were investigated. The surface morphology, grain size, micro-structure, and growth rate of the diamond films were analyzed using scanning electron microscopy, X-ray diffraction (XRD), and Raman spectrometry. The experimental results showed that granules on the surface exhibited increasingly compact structure with increasing deposition pressure. The diamond films deposited at various pressures have good compactness, and the particles on the film surfaces are arranged in an ordered manner. All films exhibited orientation along the (111) plane, which was the significant characteristic XRD peak of each diamond film. The (111) peak intensity was the strongest for the film prepared at 2 kPa deposition pressure. Overall, the deposition rate and grain size decreased with increasing deposition pressure, provided other deposition conditions remained unchanged. However, the densification of the microstructure and the nucleation density increased with increasing deposition pressure. Secondary nucleation became more pronounced as deposition pressure increased, and grain size decreased as nucleation density increased.

scholarly journals Influence of Sound Vibration on Diamond-Like Carbon Deposition Rate

2012 ◽  
Vol 2012 ◽  
pp. 1-8
Author(s):  
Syed Md. Ihsanul Karim ◽  
Mohammad Asaduzzaman Chowdhury ◽  
Md. Maksud Helali
Keyword(s):  
Deposition Rate ◽  
Carbon Deposition ◽  
Chemical Vapor ◽  
Xrd Analysis ◽  
Sem Analysis ◽  
Stainless Steel 304 ◽  
The Difference ◽  
Hot Filament ◽  
Sound Vibration

This work examines how vapor-deposited coating of DLC (partially diamond) on stainless steel 304 substrate is affected by the sound vibration. For this, a specially designed chemical vapor deposition (thermal CVD and hot filament) apparatus having facility of generating sound vibration at different frequency is fabricated. A coating of DLC (partially diamond) has been deposited on the substrate, and the characterization of the coating has been done by SEM, EDX, and XRD. The coating of carbon is identified by EDX, and the allotropic forms of graphite and diamond peaks of carbon are found by XRD analysis. By SEM analysis, it is found that the microstructures of deposited coatings are more compact and smoother under vibration than those in absence of vibration. The experiments were conducted under different ranges of vibration including sonic and ultrasonic range. Studies have shown that the growth rate of deposited coating on a unit area is higher under vibration than that in absence of vibration. It is found that deposition rate varies with the distance between substrate and activation heater and frequency of vibration. The deposition rate does not vary significantly with the change of frequency in the sonic range. The amount of deposition under ultrasonic vibration increases significantly with the frequency of vibration upto 5-6 mm distance between substrate and activation heater. Within this distance, the difference of deposition rate under vibration and without vibration conditions increases almost linearly with the increase of frequency of vibration. Beyond this distance, the effect of frequency on deposition rate becomes almost constant. In addition, the higher the distance, the less is the effectiveness of frequency of vibration on the deposition rate in that range. The deposition rate increases due to the extra vibration of sound added to the system which may enhance the activation energy by increasing its kinetic energy. The experimental results are compared with those available in the literature, and physical explanations are provided.

Microstructure of Carbon Film Deposited Using Hot-Filament Chemical Vapor Deposition

2015 ◽  
Vol 48 (6) ◽  
pp. 104-109
Author(s):  
Youn-Joon Baik ◽  
Do-Hyun Kwon ◽  
Jong-Keuk Park ◽  
Wook-Seong Lee
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Hot Filament

Anisotropic Plasma ChemicalVapor Deposition of Copper Films in Trenches

2003 ◽  
Vol 766 ◽  
Author(s):  
Kosuke Takenaka ◽  
Masao Onishi ◽  
Manabu Takenshita ◽  
Toshio Kinoshita ◽  
Kazunori Koga ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Deposition Rate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Anisotropic Plasma ◽  
Bottom Surface ◽  
Chemical Vapor Deposition Method ◽  
Copper Films ◽  
Deposition Method ◽  
Via Holes

AbstractAn ion-assisted chemical vapor deposition method by which Cu is deposited preferentially from the bottom of trenches (anisotropic CVD) has been proposed in order to fill small via holes and trenches. By using Ar + H2 + C2H5OH[Cu(hfac)2] discharges with a ratio H2 / (H2 + Ar) = 83%, Cu is filled preferentially from the bottom of trenches without deposition on the sidewall and top surfaces. The deposition rate on the bottom surface of trenches is experimentally found to increase with decreasing its width.

scholarly journals Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process

Materials ◽  
2021 ◽  
Vol 14 (2) ◽  
pp. 426
Author(s):  
Byeong-Kwan Song ◽  
Hwan-Young Kim ◽  
Kun-Su Kim ◽  
Jeong-Woo Yang ◽  
Nong-Moon Hwang
Keyword(s):  
Growth Rate ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Methane Concentration ◽  
Chemical Vapor ◽  
Diamond Growth ◽  
Lower Growth ◽  
Filament Temperature ◽  
Diamond Phase ◽  
Hot Filament

Although the growth rate of diamond increased with increasing methane concentration at the filament temperature of 2100 °C during a hot filament chemical vapor deposition (HFCVD), it decreased with increasing methane concentration from 1% CH4 –99% H2 to 3% CH4 –97% H2 at 1900 °C. We investigated this unusual dependence of the growth rate on the methane concentration, which might give insight into the growth mechanism of a diamond. One possibility would be that the high methane concentration increases the non-diamond phase, which is then etched faster by atomic hydrogen, resulting in a decrease in the growth rate with increasing methane concentration. At 3% CH4 –97% H2, the graphite was coated on the hot filament both at 1900 °C and 2100 °C. The graphite coating on the filament decreased the number of electrons emitted from the hot filament. The electron emission at 3% CH4 –97% H2 was 13 times less than that at 1% CH4 –99% H2 at the filament temperature of 1900 °C. The lower number of electrons at 3% CH4 –97% H2 was attributed to the formation of the non-diamond phase, which etched faster than diamond, resulting in a lower growth rate.

A soft X-ray absorption study of nanodiamond films prepared by hot-filament chemical vapor deposition

2003 ◽  
Vol 372 (3-4) ◽  
pp. 320-324 ◽  
Author(s):  
Y.H Tang ◽  
X.T Zhou ◽  
Y.F Hu ◽  
C.S Lee ◽  
S.T Lee ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Absorption Study ◽  
X Ray ◽  
Hot Filament ◽  
X Ray Absorption

Examination of the material properties and performance of thin-diamond film cutting tool inserts produced by arc-jet and hot filament chemical vapor deposition

1996 ◽  
Vol 11 (7) ◽  
pp. 1765-1775 ◽  
Author(s):  
James M. Olson ◽  
Michael J. Dawes
Keyword(s):  
Wear Resistance ◽  
Chemical Vapor Deposition ◽  
Diamond Film ◽  
Vapor Deposition ◽  
Cutting Tool ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Polycrystalline Diamond ◽  
And Performance ◽  
Hot Filament

Thin diamond film coated WC-Co cutting tool inserts were produced using arc-jet and hot-filament chemical vapor deposition. The diamond films were characterized using SEM, XRD, and Raman spectroscopy to examine crystal structure, fracture mode, thickness, crystalline orientation, diamond quality, and residual stress. The performance of the tools was evaluated by comparing the wear resistance of the materials to brazed polycrystalline diamond-tipped cutting tool inserts (PCD) while machining A390 aluminum (18% silicon). Results from the experiments carried out in this study suggest that the wear resistance of the thin diamond films is primarily related to the grain boundary strength, crystal orientation, and the density of microdefects in the diamond film.

Effect of Argon during Diamond Deposition by Hot Filament Chemical Vapor Deposition

2016 ◽  
Vol 869 ◽  
pp. 721-726 ◽  
Author(s):  
Divani C. Barbosa ◽  
Ursula Andréia Mengui ◽  
Mauricio R. Baldan ◽  
Vladimir J. Trava-Airoldi ◽  
Evaldo José Corat
Keyword(s):  
Growth Rate ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Diamond Growth ◽  
Gas Mixture ◽  
X Ray Diffraction ◽  
Hot Filament ◽  
Argon Content

The effect of argon content upon the growth rate and the properties of diamond thin films grown with different grains sizes are explored. An argon-free and argon-rich gas mixture of methane and hydrogen is used in a hot filament chemical vapor deposition reactor. Characterization of the films is accomplished by scanning electron microscopy, Raman spectroscopy and high-resolution x-ray diffraction. An extensive comparison of the growth rate values and films morphologies obtained in this study with those found in the literature suggests that there are distinct common trends for microcrystalline and nanocrystalline diamond growth, despite a large variation in the gas mixture composition. Included is a discussion of the possible reasons for these observations.

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