Different methods of capacitive comb drive MEMS accelerometer simulations

Author(s):  
Jacek Nazdrowicz ◽  
Michal Szermer ◽  
Cezary Maj ◽  
Andrzej Napieralski
Energies ◽  
2021 ◽  
Vol 14 (22) ◽  
pp. 7462
Author(s):  
Mariusz Jankowski ◽  
Piotr Zając ◽  
Piotr Amrozik ◽  
Michał Szermer ◽  
Cezary Maj ◽  
...  

In this work, we analysed the difference between the measurement and simulation results of thermal drift of a custom designed capacitive MEMS accelerometer. It was manufactured in X-FAB XMB10 technology together with a dedicated readout circuit in X-FAB XP018 technology. It turned out that the temperature sensitivity of the sensor’s output is nonlinear and particularly strong in the negative Celsius temperature range. It was found that the temperature drift is mainly caused by the MEMS sensor and the influence of the readout circuit is minimal. Moreover, the measurements showed that this temperature dependence is the same regardless of applied acceleration. Simulation of the accelerometer’s model allowed us to estimate the contribution of post-manufacturing mismatch on the thermal drift; for our sensor, the mismatch-induced drift accounted for about 6% of total thermal drift. It is argued that the remaining 94% of the drift could be a result of the presence of residual stress in the structure after fabrication.


2017 ◽  
Vol 26 (06) ◽  
pp. 1750095 ◽  
Author(s):  
Vigneswaran Narayanamurthy ◽  
Sujatha Lakshminarayanan ◽  
S. Mohamed Yacin ◽  
Fahmi Samsuri

In this paper, we present the design and analysis of the proof mass for capacitive based MEMS accelerometers. A study was done to determine the parameters (length of hinge and number of combs) to be optimized for the MEMS accelerometer design. The proposed design can measure the acceleration in [Formula: see text]-, [Formula: see text]- and [Formula: see text]-axes. The design features a proof mass with interdigitated fingers along each side. These interdigitated fingers act as parallel plate capacitors. Due to acceleration, capacitance changes along the comb drive. This change in capacitance can be used to monitor the acceleration. Analysis has been carried out with different comb width designs. Using the MEMS CAD tool CoventorWare, the structure has been designed, simulated and analyzed. The process flow for the fabrication has also been proposed for the above structure. Comparative study with several designs has been made and the efficient design parameters to be considered while designing MEMS accelerometer were proposed. Based on the study, a set of optimized design parameters for the comb accelerometer were reported.


2012 ◽  
Vol 132 (1) ◽  
pp. 1-9 ◽  
Author(s):  
Satoshi Maruyama ◽  
Muneki Nakada ◽  
Makoto Mita ◽  
Takuya Takahashi ◽  
Hiroyuki Fujita ◽  
...  

2020 ◽  
Vol 23 (7) ◽  
pp. 25-33
Author(s):  
Luciane Agnoletti dos Santos Pedotti ◽  
Ricardo Mazza Zago ◽  
Mateus Giesbrecht ◽  
Fabiano Fruett

Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1390
Author(s):  
Tomasz Ursel ◽  
Michał Olinski

This article aims to develop a system capable of estimating the displacement of a moving object with the usage of a relatively cheap and easy to apply sensors. There is a growing need for such systems, not only for robots, but also, for instance, pedestrian navigation. In this paper, the theory for this idea, including data postprocessing algorithms for a MEMS accelerometer and an optical flow sensor (OFS), as well as the developed complementary filter applied for sensor fusion, are presented. In addition, a vital part of the accelerometer’s algorithm, the zero velocity states detection, is implemented. It is based on analysis of the acceleration’s signal and further application of acceleration symmetrization, greatly improving the obtained displacement. A test stand with a linear guide and motor enabling imposing a specified linear motion is built. The results of both sensors’ testing suggest that the displacement estimated by each of them is highly correct. Fusion of the sensors’ data gives even better outcomes, especially in cases with external disturbance of OFS. The comparative evaluation of estimated linear displacements, in each case related to encoder data, confirms the algorithms’ operation correctness and proves the chosen sensors’ usefulness in the development of a linear displacement measuring system.


Author(s):  
Abhiraj Basavanna ◽  
Matthias Dienger ◽  
Jan Rockstroh ◽  
Steffen Keller ◽  
Alfons Dehe

2021 ◽  
pp. 1-1
Author(s):  
Pramod Martha ◽  
Naveen Kadayinti ◽  
V. Seena
Keyword(s):  

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