scholarly journals DESIGN OF A NOVEL MICROWAVE PLASMA SOURCE BASED ON RIDGED WAVEGUIDE

2021 ◽  
Vol 101 ◽  
pp. 19-27
Author(s):  
Pingping Deng ◽  
Wei Xiao ◽  
Fengxia Wang ◽  
Zhengping Zhang
Keyword(s):  
Microwave Plasma ◽  
Plasma Source ◽  
Ridged Waveguide

Simple low‐cost microwave plasma source

1986 ◽  
Vol 57 (2) ◽  
pp. 164-166 ◽  
Author(s):  
L. G. Meiners ◽  
D. B. Alford
Keyword(s):  
Microwave Plasma ◽  
Low Cost ◽  
Plasma Source

scholarly journals A Linear Microwave Plasma Source Using a Circular Waveguide Filled with a Relatively High-Permittivity Dielectric: Comparison with a Conventional Quasi-Coaxial Line Waveguide

2021 ◽  
Vol 11 (12) ◽  
pp. 5358
Author(s):  
Ju-Hong Cha ◽  
Sang-Woo Kim ◽  
Ho-Jun Lee
Keyword(s):  
Electron Density ◽  
Microwave Plasma ◽  
Circular Waveguide ◽  
Coaxial Line ◽  
Plasma Source ◽  
Tangential Plane ◽  
High Permittivity ◽  
Deposition Area ◽  
Extended Plasma ◽  
Transverse Electromagnetic

For a conventional linear microwave plasma source (LMPS) with a quasi-coaxial line transverse electromagnetic (TEM) waveguide, a linearly extended plasma is sustained by the surface wave outside the tube. Due to the characteristics of the quasi-coaxial line MPS, it is easy to generate a uniform plasma with radially omnidirectional surfaces, but it is difficult to maximize the electron density in a curved selected region. For the purpose of concentrating the plasma density in the deposition area, a novel LMPS which is suitable for curved structure deposition has been developed and compared with the conventional LMPS. As the shape of a circular waveguide, it is filled with relatively high-permittivity dielectric instead of a quasi-coaxial line waveguide. Microwave power at 2.45 GHz is transferred to the plasma through the continuous cylindrical-slotted line antenna, and the radiated electric field in the radial direction is made almost parallel to the tangential plane of the window surface. This research includes the advanced 3D numerical analysis and compares the results with the experiment. It shows that the electron density in the deposition area is higher than that of the conventional quasi-coaxial line plasma MPS.

Numerical Analysis of Tuning Procedure of a Waveguide-Based Microwave Plasma Source

2011 ◽  
Vol 39 (11) ◽  
pp. 2906-2907 ◽  
Author(s):  
Helena Nowakowska ◽  
Mariusz Jasinski ◽  
Jerzy Mizeraczyk
Keyword(s):  
Numerical Analysis ◽  
Microwave Plasma ◽  
Plasma Source

X-ray powder diffraction data for indium nitride

1999 ◽  
Vol 14 (4) ◽  
pp. 258-260 ◽  
Author(s):  
W. Paszkowicz
Keyword(s):  
Diffraction Pattern ◽  
Powder Diffraction ◽  
Diffraction Data ◽  
Microwave Plasma ◽  
Indium Nitride ◽  
Plasma Source ◽  
Unit Cell ◽  
Powder Diffraction Data ◽  
Calculated Density ◽  
X Ray

X-ray powder diffraction pattern for InN synthesized using a microwave plasma source of nitrogen is reported. The data were obtained with the help of an automated Bragg-Brentano diffractometer using Ni-filtered CuKα radiation. The lattice parameters for the wurtzite-type unit cell are ao=3.5378(1) Å, co=5.7033(1) Å. The calculated density is 6.921±0.002 g/cm3.

scholarly journals Composition, Mixing State and Water Affinity of Meteoric Smoke Analogue Nanoparticles Produced in a Non-Thermal Microwave Plasma Source

2018 ◽  
Vol 232 (5-6) ◽  
pp. 635-648 ◽  
Author(s):  
Mario Nachbar ◽  
Denis Duft ◽  
Alexei Kiselev ◽  
Thomas Leisner
Keyword(s):  
Silicon Oxide ◽  
Microwave Plasma ◽  
Plasma Reactor ◽  
Stoichiometric Composition ◽  
Plasma Source ◽  
Mixing State ◽  
Iron Oxide Particles ◽  
Pure Silicon ◽  
Meteoric Smoke ◽  
Water Affinity

Abstract The article reports on the composition, mixing state and water affinity of iron silicate particles which were produced in a non-thermal low-pressure microwave plasma reactor. The particles are intended to be used as meteoric smoke particle analogues. We used the organometallic precursors ferrocene (Fe(C5H5)2) and tetraethyl orthosilicate (TEOS, Si(OC2H5)4) in various mixing ratios to produce nanoparticles with radii between 1 nm and 4 nm. The nanoparticles were deposited on sample grids and their stoichiometric composition was analyzed in an electron microscope using energy dispersive X-ray spectroscopy (EDS). We show that the pure silicon oxide and iron oxide particles consist of SiO2 and Fe2O3, respectively. For Fe:(Fe+Si) ratios between 0.2 and 0.8 our reactor produces (in contrast to other particle sources) mixed iron silicates with a stoichiometric composition according to FexSi(1−x)O3 (0≤x≤1). This indicates that the particles are formed by polymerization of FeO3 and SiO3 and that rearrangement to the more stable silicates ferrosilite (FeSiO3) and fayalite (Fe2SiO4) does not occur at these conditions. To investigate the internal mixing state of the particles, the H2O surface desorption energy of the particles was measured. We found that the nanoparticles are internally mixed and that differential coating resulting in a core-shell structure does not occur.

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