Influence of power density micro-morphology of sputtered Mo films. Estimation by measurement of surface roughness factor.
1982 ◽
Vol 111-112
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pp. 704-708
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2013 ◽
Vol 135
(6)
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Keyword(s):
1997 ◽
Vol 63
(607)
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pp. 643-649
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1992 ◽
Vol 10
(1)
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pp. 138-144
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Keyword(s):
1981 ◽
Vol 103
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pp. 445-449
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2013 ◽
Vol 834-836
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pp. 872-875
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2003 ◽
Vol 82
(2)
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pp. 331-334
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Keyword(s):
2008 ◽
Vol 373-374
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pp. 184-187