Inter Layer Dielectric Defect Induced High Contact Resistance

Author(s):  
Re-Long Chiu ◽  
Jason Higgins ◽  
Toby Kinder ◽  
Juha Tyni ◽  
Sharon Ying ◽  
...  

Abstract High contact resistance can be caused by moisture absorption in low phosphorus content BPTEOS. Moisture diffused through the TiN glue layer is absorbed by the BPTEOS during subsequent thermal processes resulting in increased contact resistance. This failure mode was studied by combining different failure analysis methods and was confirmed by duplication on experimental wafers.

Author(s):  
I. Österreicher ◽  
S. Eckl ◽  
B. Tippelt ◽  
S. Döring ◽  
R. Prang ◽  
...  

Abstract Depending on the field of application the ICs have to meet requirements that differ strongly from product to product, although they may be manufactured with similar technologies. In this paper a study of a failure mode is presented that occurs on chips which have passed all functional tests. Small differences in current consumption depending on the state of an applied pattern (delta Iddq measurement) are analyzed, although these differences are clearly within the usual specs. The challenge to apply the existing failure analysis techniques to these new fail modes is explained. The complete analysis flow from electrical test and Global Failure Localization to visualization is shown. The failure is localized by means of photon emission microscopy, further analyzed by Atomic Force Probing, and then visualized by SEM and TEM imaging.


2018 ◽  
Vol 69 (21) ◽  
pp. 4993-4996 ◽  
Author(s):  
Doris Vetterlein ◽  
Mika Tarkka

Author(s):  
Tomáš Lošák ◽  
Jaroslav Hlušek ◽  
Ivana Lampartová ◽  
Jakub Elbl ◽  
Gabriela Mühlbachová ◽  
...  

The pot experiment was established in vegetation hall in the year 2015. Spring barley, variety KWS Irina, was grown. Two different soils – chernozem from Brno (with a low phosphorus content and alkali soil reaction – 7.37) and haplic luvisol from Jaroměřice nad Rokytnou (with a high phosphorus content and slightly acid soil reaction – 6.01) were used for comparison. The rates of phosphorus in the form of triple superphosphate (45 % P2O5) were increased from 0.3 – 0.6 – 1.2 g per pot (5 kg of soil – Mitscherlich pots). Nitrogen was applied in the form of CAN (27 % N) at a rate of 1 g N per pot in all the treatments incl. the control. Using statistical analysis, significant differences were found between the two soil types both in terms of the postharvest soil P content and yields of aboveground biomass. The content of post‑harvest soil phosphorus increased significantly with the applied rate (96 – 141 – 210 mg/kg in chernozem and 128 – 179 – 277 mg/kg in haplic luvisol). Dry matter yields of the aboveground biomass grown on chernozem were the lowest in the control treatment not fertilised with P (38.97 g per pot) and increased significantly with the P rate applied (46.02 – 47.28 g per pot), although there were no significant differences among the fertilised treatments. On haplic luvisol phosphorus fertilisation was not seen at all, demonstrating that the weight of the biomass in all the treatments was balanced (48.12 – 49.63 g per pot).


2018 ◽  
Vol 2 (Special edition 2) ◽  
pp. 123-132
Author(s):  
Jasminka Bonato ◽  
Martina Badurina ◽  
Julijan Dobrinić

The paper aims at presenting the FMEA method based on the fuzzy technique, representing a new approach to the failure analysis and its effects on the observed system. The FMEA (Failure Mode and Effect Analysis) method has assigned the risks a coefficient i.e. a numerical indicator that very clearly defines the degree of risk. The risk is calculated as a mathematical function of RPN which depends on the effects S, probability O that some case will lead to a failure and to a probability that a failure D can not be detected before its effects are realized. RPN = S O D. The FMEA method, based on the fuzzy logic, makes a more reliable evaluation of the observed system failures possible.


2012 ◽  
Vol 97 (5) ◽  
pp. 698-706 ◽  
Author(s):  
Xiangxiu Chen ◽  
Aijuan Gu ◽  
Guozheng Liang ◽  
Li Yuan ◽  
Dongxian Zhuo ◽  
...  

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