scholarly journals TRENCH-ISOLATED BULK-TYPE PRESSURE SENSOR ON SILICON-ON-INSULATOR FOR HIGH-TEMPERATURE AND HIGH-PRESSURE DOWNHOLE APPLICATIONS

2018 ◽  
Author(s):  
E. Chan ◽  
D. Lin ◽  
L. Lu ◽  
K. Chau ◽  
M. Wong
Keyword(s):  
High Pressure ◽  
High Temperature ◽  
Pressure Sensor ◽  
Silicon On Insulator ◽  
Type Pressure

The Design and Simulation of Wide Range Pressure Sensor Based on HTCC for High-Temperature Applications

2014 ◽  
Vol 609-610 ◽  
pp. 1053-1059
Author(s):  
Zhong Ren ◽  
Qiu Lin Tan ◽  
Chen Li ◽  
Tao Luo ◽  
Ting Cai ◽  
...  
Keyword(s):  
High Pressure ◽  
High Temperature ◽  
Pressure Sensor ◽  
Simulation Analysis ◽  
Zirconia Ceramic ◽  
Passive Measurement ◽  
Series Resonance ◽  
Wide Range ◽  
Spiral Inductors ◽  
Temperature Applications

A wide range pressure sensor is designed based on the theoretical basis of LC series resonance circuit model to realize the wireless passive measurement in the harsh environment, such as high temperature and high pressure. The capacitive pressure sensitive device is devised by the technology of high-temperature co-fired ceramics (HTCC) to form nine density cavities in zirconia ceramic substrates, and thick film technology to print capacitance plates and planar spiral inductors. The theoretical calculation and simulation analysis of the designed sensor are made respectively under high pressure (10MPa) and temperature (600 °C), the results of which verify the feasibility of the design in a wide range of pressure for high-temperature applications, and provide the reliable theory basis for the fabrication of wide range pressure sensor.

scholarly journals Hierarchical network enabled flexible textile pressure sensors with ultra-high sensitivity, ultra-wide linearity and high-temperature resistance

2021 ◽  
Author(s):  
Meiling Jia ◽  
Chenghan Yi ◽  
Yankun Han ◽  
Xin Li ◽  
Guoliang Xu ◽  
...  
Keyword(s):  
High Pressure ◽  
High Temperature ◽  
Pressure Sensor ◽  
High Performance ◽  
Full Range ◽  
Pressure Sensors ◽  
Fiber Surface ◽  
High Sensitivity ◽  
Harsh Environments ◽  
Point To Point

Abstract Thin, lightweight, and flexible textile pressure sensors with the ability to precisely detect the full range of faint pressure (< 100 Pa), low pressure (in the range of KPa) and high pressure (in the range of MPa) are in significant demand to meet the requirements for applications in daily activities and more meaningfully in some harsh environments, such as high temperature and high pressure. However, it is still a major challenge to fulfill these requirements simultaneously in a single pressure sensor. Herein, a high-performance pressure sensor enabled by polyimide fiber fabric with functionalized carbon-nanotube (PI/FCNT) is obtained via a facile electrophoretic deposition (EPD) approach. High-density FCNT is evenly wrapped and chemically bonded to the fiber surface during the EPD process, forming a conductive hierarchical fiber/FCNT matrix. Benefiting from the abundant yet firm contacting points, point-to-point contacting mode, and high elastic modulus of both PI and CNT, the proposed PI/FCNT pressure sensor exhibits ultra-high sensitivity (3.57 MPa− 1), ultra-wide linearity (3.24 MPa), exceptionally broad sensing range (~ 45 MPa), and long-term stability (> 4000 cycles). Furthermore, under a high working temperature of 200 ºC, the proposed sensor device still shows an ultra-high sensitivity of 2.64 MPa− 1 within a wide linear range of 7.2 MPa, attributing to its intrinsic high-temperature-resistant properties of PI and CNT. Thanks to these merits, the proposed PI/FCNT(EPD) pressure sensor could serve as an E-skin device to monitor the human physiological information, precisely detect tiny and extremely high pressure, and can be integrated into an intelligent mechanical hand to detect the contact force under high-temperature (> 300 ºC), endowing it with high applicability in the fields of real-time health monitoring, intelligent robots, and harsh environments.

Oil-Filled Isolated High Pressure Sensor for High Temperature Application

2010 ◽  
Vol 437 ◽  
pp. 397-401 ◽  
Author(s):  
Zhuang De Jiang ◽  
Li Bo Zhao ◽  
Yu Long Zhao ◽  
Yuan Hao Liu ◽  
Philip D. Prewett ◽  
...  
Keyword(s):  
High Pressure ◽  
High Temperature ◽  
Pressure Sensor ◽  
Micro Electro Mechanical System ◽  
Sensor Chip ◽  
Military Industry ◽  
Piezoresistive Sensor ◽  
Repeatability Error ◽  
Temperature Application ◽  
Linearity Error

In order to solve pressure measurement problems in the fields of aerospace, petroleum and chemical industry, mobile and military industry, a oil-filled isolated piezoresistive high pressure sensor has been developed with the range of 0~100 MPa, and was able to work reliably under high temperature of above 200 °C. Based on MEMS (Micro Electro-Mechanical System) and SIMOX (Separation by Implantation of Oxygen) technology, the piezoresistive sensor chip has been developed. By high temperature packaging process, the oil-filled isolated high pressure sensor was fabricated with the sensor chip and corrugated diaphragm. The experimental results showed that the oil-filled isolated high pressure sensor had good performances under high temperature of 200 °C, such as linearity error of 0.07%FS, repeatability error of 0.04%FS, hysteresis error of 0.03%FS.

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