scholarly journals Apparatus and Method of Defect Detection for Resin Films

2020 ◽  
Vol 10 (4) ◽  
pp. 1206 ◽  
Author(s):  
Ruey-Kai Sheu ◽  
Ya-Hsin Teng ◽  
Chien-Hao Tseng ◽  
Lun-Chi Chen

A defect inspection of resin films involves processes of detecting defects, size measuring, type classification and reflective action planning. It is not only a process requiring heavy investment in workforce, but also a tension between quality assurance with a 50-micrometer tolerance and visibility of the naked eye. To solve the difficulties of the workforce and time consumption processes of defect inspection, an apparatus is designed to collect high-quality images in one shot by leveraging a large field-of-view microscope at 2K resolution. Based on the image dataset, a two-step method is used to first locate possible defects and predict their types by a defect-shape-based deep learning model using the LeNet-5-adjusted network. The experimental results show that the proposed method can precisely locate the position and accurately inspect the fine-grained defects of resin films.

Author(s):  
C. Monachon ◽  
M.S. Zielinski ◽  
D. Gachet ◽  
S. Sonderegger ◽  
S. Muckenhirn ◽  
...  

Abstract Quantitative cathodoluminescence (CL) microscopy is a new optical spectroscopy technique that measures electron beam-induced optical emission over large field of view with a spatial resolution close to that of a scanning electron microscope (SEM). Correlation of surface morphology (SE contrast) with spectrally resolved and highly material composition sensitive CL emission opens a new pathway in non-destructive failure and defect analysis at the nanometer scale. Here we present application of a modern CL microscope in defect and homogeneity metrology, as well as failure analysis in semiconducting electronic materials


Author(s):  
Jianheng Huang ◽  
Yaohu Lei ◽  
Xin Liu ◽  
Jinchuan Guo ◽  
Ji Li ◽  
...  

ACS Photonics ◽  
2021 ◽  
Author(s):  
Anders Kokkvoll Engdahl ◽  
Stefan Belle ◽  
Tung-Cheng Wang ◽  
Ralf Hellmann ◽  
Thomas Huser ◽  
...  

Author(s):  
Kornél Kapás ◽  
Tamás Bozóki ◽  
Gergely Dálya ◽  
János Takátsy ◽  
László Mészáros ◽  
...  

Measurement ◽  
2015 ◽  
Vol 64 ◽  
pp. 1-16 ◽  
Author(s):  
Zhen Liu ◽  
Fengjiao Li ◽  
Xiaojing Li ◽  
Guangjun Zhang

2012 ◽  
Vol 45 (12) ◽  
pp. 4138-4150 ◽  
Author(s):  
Thomas Weibel ◽  
Christian Daul ◽  
Didier Wolf ◽  
Ronald Rösch ◽  
François Guillemin

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