Gate All around with Back Gate NAND Flash Structure for Excellent Reliability Characteristics in Program Operation
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The Self
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A gate all around with back-gate (GAAB) structure was proposed for 3D NAND Flash memory technology. We demonstrated the excellent characteristics of the GAAB NAND structure, especially in the self-boosting operation. Channel potential of GAAB shows a gradual slope compared with a conventional GAA NAND structure, which leads to excellent reliability characteristics in program disturbance, pass disturbance and oxide break down issue. As a result, the GAAB structure is expected to be appropriate for a high stacking structure of future memory structure.
2014 ◽
Vol 61
(11)
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pp. 3901-3904
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2012 ◽
Vol 33
(8)
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pp. 1198-1200
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2012 ◽
Vol E95.C
(5)
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pp. 837-841
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2020 ◽
Vol E103.C
(4)
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pp. 171-180
2013 ◽
Vol E96.A
(12)
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pp. 2645-2651
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