scholarly journals Optimal Design of High-Frequency Induction Heating Apparatus for Wafer Cleaning Equipment Using Superheated Steam

Energies ◽  
2020 ◽  
Vol 13 (23) ◽  
pp. 6196
Author(s):  
Sang Min Park ◽  
Eunsu Jang ◽  
Joon Sung Park ◽  
Jin-Hong Kim ◽  
Jun-Hyuk Choi ◽  
...  
Keyword(s):  
Induction Heating ◽  
Superheated Steam ◽  
Flow Region ◽  
Generation Process ◽  
Wafer Cleaning ◽  
Cleaning Equipment ◽  
Pure Grade ◽  
Specific Shape ◽  
High Temperature Steam ◽  
Short Time

In this study, wafer cleaning equipment was designed and fabricated using the induction heating (IH) method and a short-time superheated steam (SHS) generation process. To prevent problems arising from the presence of particulate matter in the fluid flow region, pure grade 2 titanium (Ti) R50400 was used in the wafer cleaning equipment for heating objects via induction. The Ti load was designed and manufactured with a specific shape, along with the resonant network, to efficiently generate high-temperature steam by increasing the residence time of the fluid in the heating object. The IH performance of various shapes of heating objects made of Ti was analyzed and the results were compared. In addition, the heat capacity required to generate SHS was mathematically calculated and analyzed. The SHS heating performance was verified by conducting experiments using the designed 2.2 kW wafer cleaning equipment. The performance of the proposed pure Ti-based SHS generation system was found to be satisfactory, and SHS with a temperature higher than 200 °C was generated within 10 s using this system.

Molding of C-FRP Plate with Using Induction Heating

2011 ◽  
Vol 410 ◽  
pp. 345-348
Author(s):  
Eitoku Nakanishi ◽  
Seijiro Maki ◽  
Satonori Matsumoto
Keyword(s):  
Induction Heating ◽  
Volume Fraction ◽  
Low Cost ◽  
Resin Flow ◽  
Thermoplastic Resin ◽  
Molding Process ◽  
Composite Fabrication ◽  
General Part ◽  
Liquid Type ◽  
Short Time

Recently, the market for composite materials is dominated by small and medium series production and prototyping [1]. And the VaRTM (Vacuum assisted Resin Transfer Moldings) process is thought to be low cost composite fabrication technique [2]. The preforms in VaRTM are placed on one–side mold and they are sealed by a flexible vacuum bag [3]. The resin is infused into dry fabric formed on a mold near product shape under vacuum pressure and cured in an oven. In general, part defects often arise during the mold filling stage of the process, where a resin is drawn into performs through the use of vacuum. Uniform fill of resin and complete fiber saturation are required for fabricating high quality products [5]. So the resin flow control is extremely required. To solve these problems and short time fabrication, this article investigates the new molding process of C-FRP plate with using the combination of induction heating for quick heating and vacuuming method. To control of the volume fraction easily and to achieve homogeneous impregnation, thermoplastic resin sheet was chosen instead of liquid type. And the C-FRP in a size of 120mm*120mm and the thickness is 6.6mm was able to fabricate by this method.

scholarly journals Fast Self-Adaptive Digital Camouflage Design Method Based on Deep Learning

2020 ◽  
Vol 10 (15) ◽  
pp. 5284 ◽  
Author(s):  
Houdi Xiao ◽  
Zhipeng Qu ◽  
Mingyun Lv ◽  
Yi Jiang ◽  
Chuanzhi Wang ◽  
...  
Keyword(s):  
Deep Learning ◽  
Real Time ◽  
Design Method ◽  
Pattern Generation ◽  
Generation Process ◽  
The Future ◽  
Short Time ◽  
New Generation ◽  
The Military ◽  
Self Adaptive

Traditional digital camouflage is mainly designed for a single background and state. Its camouflage performance is appealing in the specified time and place, but with the change of place, season, and time, its camouflage performance is greatly weakened. Therefore, camouflage technology, which can change with the environment in real-time, is the inevitable development direction of the military camouflage field in the future. In this paper, a fast-self-adaptive digital camouflage design method based on deep learning is proposed for the new generation of adaptive optical camouflage. Firstly, we trained a YOLOv3 model that could identify four typical military targets with mean average precision (mAP) of 91.55%. Secondly, a pre-trained deepfillv1 model was used to design the preliminary camouflage texture. Finally, the preliminary camouflage texture was standardized by the k-means algorithm. The experimental results show that the camouflage pattern designed by our proposed method is consistent with the background in texture and semantics, and has excellent camouflage performance in optical camouflage. Meanwhile, the whole pattern generation process takes a short time, less than 0.4 s, which meets the camouflage design requirements of the near-real-time camouflage in the future.

High-Temperature Steam Oxidation Kinetics and Mechanism of SCWR Fuel Cladding Candidate Materials

2013 ◽  
Author(s):  
Hiroshi Abe ◽  
Seung Mo Hong ◽  
Yutaka Watanabe
Keyword(s):  
Oxidation Kinetics ◽  
Superheated Steam ◽  
Cold Work ◽  
Austenitic Stainless Steels ◽  
Fuel Cladding ◽  
Good Oxidation Resistance ◽  
Power Law Kinetics ◽  
High Temperature Steam ◽  
High Degree ◽  
Supercritical Water Cooled Reactor

Effects of temperature, dissolved oxygen (DO), and degree of cold work (CW) on the oxidation kinetics of supercritical-water-cooled reactor (SCWR) fuel cladding candidate materials, including three types of 15Cr-20Ni austenitic stainless steels (1520 SSs), in superheated steam have been investigated assuming power-law kinetics. Characteristics of oxide layers and its relation to oxidation behaviors are also discussed. The effect of DO on the weight gain behavior in superheated steam at 700 °C was minor for all specimens at least up to 200 ppb DO. The tube-shaped specimens of 1520 SSs showed very good oxidation resistance at 700–780 °C. There was no clear difference in the oxidation kinetics among the three investigated types of 1520 SSs. The degree of CW is a significant parameter to mitigate oxidation in superheated steam. It has been suggested that the tube specimens showed a very slow oxidation kinetics since Cr diffusion in the outside surface of the tubes is accelerated as a result of an increase of dislocation density and/or grain refinement by a high degree of CW.

Experimental Studies of Mechanical Vibration Assisted Induction Heating Hot-Pressing

2014 ◽  
Vol 1021 ◽  
pp. 190-195
Author(s):  
Fei Wu ◽  
Zhao Yao Zhou ◽  
Meng Long Dong ◽  
Bi Bo Yao
Keyword(s):  
Induction Heating ◽  
Hot Pressing ◽  
Heating Temperature ◽  
Mechanical Vibration ◽  
Experimental Studies ◽  
Cyclic Heating ◽  
Temperature Characteristics ◽  
Series Of Experiments ◽  
Al Powder ◽  
Short Time

A new method of mechanical vibration assisted induction heating hot-pressing was proposed. A set of apparatus was developed to perform the forming of mechanical vibration assisted induction heating hot-pressing. A series of experiments of induction heating temperature characteristics of different kinds of powder was carried out, such as Fe powder, Al powder and SiC powder. The results show that different kinds of powder reach different equilibrium temperatures and have different temperature characteristics under the same condition of setting temperature and cyclic heating times. SiCp/Al composites were prepared by induction heating and vibratory forming and observed by metallographic microscope. It turns out that completely dense and homogeneous powder metallurgy compaction is compacted and sintered at the same time by the method of mechanical vibration assisted induction heating hot-pressing with low pressure and short time.

scholarly journals Development of High Frequency Induction Heating System for Production of Superheated Steam

2003 ◽  
Vol 38 (8) ◽  
pp. 501-508
Author(s):  
Hiroyasu Kifune ◽  
Nobuyuki Kuwayama ◽  
Yoshihiro Hatanaka ◽  
Mutsuo Nakaoka
Keyword(s):  
Induction Heating ◽  
High Frequency ◽  
Superheated Steam ◽  
Heating System ◽  
Induction Heating System ◽  
High Frequency Induction

Beneficial Effect of Impurity Sulfur on High-Temperature Steam Oxidation of High Chromium Ferritic Steels

2006 ◽  
Vol 522-523 ◽  
pp. 147-154 ◽  
Author(s):  
Yoshinori Murata ◽  
Masaaki Nakai ◽  
K. Nagai ◽  
Masahiko Morinaga ◽  
Y. Sasaki ◽  
...  
Keyword(s):  
Solid Solution ◽  
High Temperature ◽  
Beneficial Effect ◽  
Oxidation Resistance ◽  
Steam Oxidation ◽  
Ferritic Steels ◽  
High Chromium ◽  
Sulfur Effect ◽  
High Temperature Steam ◽  
Short Time

The effect of S in steels on high-temperature steam oxidation resistance was investigated with respect to the content and the state in high Cr ferritic steels. The beneficial sulfur effect on high-temperature steam oxidation resistance was verified in high Cr ferritic steels. It was considered that Cr was enriched in the vicinity of the segregated S on the specimen surface because of a strong affinity between Cr and S atoms, resulting in the easy formation of the passive Cr2O3 oxide layer on the surface even after the steam oxidation test for a short time. It was found that the precipitated S operated more effectively to the improvement of the steam oxidation resistance compared to the solid-solution state of S in the steels. Furthermore, the sulfur effect on the high temperature steam oxidation resistance was related strongly to the amount of dissolution hydrogen in the high Cr ferritic steels.

Application of Novel Ultrasonic Cleaning Equipment That Uses the Waveguide Mode for the Single-Wafer Cleaning Process

2011 ◽  
Vol 50 (5S1) ◽  
pp. 05EC10
Author(s):  
Kazunari Suzuki ◽  
Yasuhiro Imazeki ◽  
Ki Han ◽  
Shoichi Okano ◽  
Junichiro Soejima ◽  
...  
Keyword(s):  
Waveguide Mode ◽  
Cleaning Process ◽  
Ultrasonic Cleaning ◽  
Wafer Cleaning ◽  
Cleaning Equipment

Rapid Generation Process of Superheated Steam Using a Water-Containing Porous Material

2012 ◽  
Author(s):  
Shoji Mori ◽  
Ryo Kobayashi ◽  
Mikako Tanaka ◽  
Kunito Okuyama
Keyword(s):  
Surface Roughness ◽  
Porous Material ◽  
Porous Materials ◽  
Superheated Steam ◽  
Maximum Energy ◽  
Energy Utilization ◽  
Utilization Efficiency ◽  
Generation Process ◽  
Simple Method ◽  
Rapid Generation

A simple method for the rapid generation of superheated steam using a water-containing porous material was proposed in a previous paper (Mori and Okuyama, 2007). The start-up and cut-off responses are of the second order, and the maximum energy utilization efficiency for input power is more than approximately 0.9. In the present paper, in order to clarify the mechanism of the rapid generation of superheated steam, the steam temperature, the temperature inside porous materials, and the surface roughness of porous materials have been measured. As a result, it is found that narrow space formed between heater and porous material caused by surface roughness of porous material is one of important factors to generate superheated steam rapidly.

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