scholarly journals On the Temperature and Plasma Distribution of an Inductively Driven Xe-I2-Discharge

Plasma ◽  
2021 ◽  
Vol 4 (4) ◽  
pp. 745-754
Author(s):  
Tim Gehring ◽  
Santiago Eizaguirre ◽  
Qihao Jin ◽  
Jan Dycke ◽  
Manuel Renschler ◽  
...  
Keyword(s):  
Temperature Distribution ◽  
Inductively Coupled Plasma ◽  
Cost Effective ◽  
Present Species ◽  
Plasma Parameters ◽  
Inductively Coupled ◽  
2D Simulation ◽  
Cost Effective Method ◽  
Plasma Distribution ◽  
Maximal Deviation

Inductively Coupled Plasma (ICP) discharges are part of intense research. Predicting different plasma parameters, like the distribution and temperature of the present species, is of great interest for many applications. Iodine- or halide-containing plasmas in particular have an important function, for example, in the development of mercury-free UV radiation sources. Therefore, a 2D simulation model of a xenon- and iodine-containing ICP was created by using the Finite Element Method (FEM) software COMSOL Multiphysics®. The included species and the used reactions are presented in this paper. To verify the simulation in relation to the plasma distribution, the results were compared with measurements from literature. The temperature of the lamp vessel was measured in relation to the temperature distribution and also compared with the results of the simulation. It could be shown that the simulation reproduces the plasma distribution with a maximal deviation of ≈6.5% to the measured values and that the temperature distribution in the examined area can be predicted with deviations of up to ≈24% for long vessel dimensions and ≈3% for shorter dimensions. However, despite the deviating absolute values, the general plasma behaviour is reproduced by the simulation. The simulation thus offers a fast and cost-effective method to estimate an effective geometrical range of iodine-containing ICPs.

scholarly journals Till geochemical signatures associated with the Sisson W-Mo deposit, New Brunswick, Canada

2014 ◽  
Vol 50 ◽  
pp. 116 ◽  
Author(s):  
Beth McClenaghan ◽  
Allen Seaman ◽  
Michael Parkhill ◽  
Antonius Pronk
Keyword(s):  
New Brunswick ◽  
Inductively Coupled Plasma ◽  
Total Concentration ◽  
Regional Scale ◽  
Analytical Techniques ◽  
Cost Effective ◽  
Inductively Coupled ◽  
Cost Effective Method ◽  
Plasma Mass Spectrometry ◽  
Modern Analytical

 A till composition study was carried out around the Sisson W-Mo deposit, New Brunswick, Canada, one of the largest W deposits in the world, to test modern analytical methods for W in till and document glacial dispersal from a significant W source. The <0.063 mm fraction of till defines glacial dispersal down ice of the deposit and use of this fraction is recommended for W-Mo exploration in the region. Metal-rich till overlying the deposit contains up to 816 ppm W and 63 ppm Mo. One km down ice, till contains 75 ppm W and 8 ppm Mo, and till in background areas contains a maximum of 7 ppm W, and 2 ppm Mo. Indicator elements for the deposit include W and Mo, and pathfinder elements include Ag, As, Bi, Cd, Cu, In, Pb, Te, and Zn. This list of elements is more extensive than previously identified for the Sisson deposit or identified in other published till geochemical studies because of the polymetallic nature of the Sisson deposit and the broad suite of elements that can now be determined using modern analytical techniques. Lithium meta/tetraborate fusion inductively coupled plasma-mass spectrometry was used to determine the total concentration of W in till and is a fast and cost effective method as compared to those reported in the older literature. Glacial dispersal of W and Mo from the Sisson deposit is detectable at a regional scale at least 14 km down ice (southeast) using surface till sampling. A 2 km till sample spacing should be sufficient to detect glacial dispersal from a W-Mo deposit of this size. 

Evaluation of Painted Pottery from the Mesa Verde Region Using Laser Ablation-Inductively Coupled Plasma-Mass Spectrometry (LA-ICP-MS)

2002 ◽  
Vol 67 (1) ◽  
pp. 137-144 ◽  
Author(s):  
Robert J. Speakman ◽  
Hector Neff
Keyword(s):  
Mass Spectrometry ◽  
Laser Ablation ◽  
Inductively Coupled Plasma ◽  
Cost Effective ◽  
American Southwest ◽  
Inductively Coupled ◽  
Mesa Verde ◽  
Icp Ms ◽  
Plasma Mass Spectrometry ◽  
Mesa Verde Region

For decades archaeologists have struggled with the problem of accurately determining organic and mineral-based paints in pottery from the American Southwest. Using Laser Ablation-Inductively Coupled Plasma-Mass Spectrometry (LA-ICP-MS), we have developed a simple and cost-effective method that permits classification of painted surfaces into mineral and organic-based categories. By applying this method to Mesa Verde and Mancos Black-on-white pottery from the Mesa Verde Region, we were able to distinguish easily between mineral and organic-based paints. Preliminary data also suggest that multiple sub-groups of mineral-based paints exist within these ceramic types, indicating that multiple recipes for manufacturing paint may have been employed by prehistoric potters from this region.

Three-Dimensional Discharge Simulation of Inductively Coupled Plasma Etcher

2007 ◽  
Author(s):  
Jia Cheng ◽  
Yu Zhu ◽  
Guanghong Duan ◽  
Yangying Chen
Keyword(s):  
Electron Temperature ◽  
Inductively Coupled Plasma ◽  
Three Dimensional ◽  
Argon Plasma ◽  
Plasma Parameters ◽  
Inductively Coupled ◽  
Parameters Selection ◽  
Dimensional Distribution ◽  
Discharge Model ◽  
Discharge Simulation

Based on the commercial software, CFD-ACE+, a three-dimensional discharge model of an inductively coupled plasma (ICP) etcher was built. The spatial distributions of the electron temperature and the electron number density (END) of the argon plasma were simulated at 10 mTorr, 200 W and 200 sccm. One-dimensional distribution profiles of the plasma parameters above the wafer’s surface at different pressures and powers were compared. These results demonstrate that the END increases with both pressure and power. And the electron temperature decreases with pressure. The methods and conclusions can be used to provide some reference for the configurations of the chamber and the coil of the ICP equipment design and improvement and process parameters selection.

Sample Retention in the Transport Tubing between an Electrothermal Vaporizer and an Inductively Coupled Plasma Mass Spectrometer

1996 ◽  
Vol 50 (1) ◽  
pp. 86-90 ◽  
Author(s):  
Christopher M. Sparks ◽  
James A. Holcombe ◽  
Thomas L. Pinkston
Keyword(s):  
Temperature Distribution ◽  
Mass Spectrometer ◽  
Inductively Coupled Plasma ◽  
Total Mass ◽  
Maximum Power ◽  
Flow Rates ◽  
Argon Gas ◽  
Inductively Coupled ◽  
Transport Tube

The transport tube between a commercial electrothermal vaporizer (ETV) and the torch for an inductively coupled plasma mass spectrometer ICPMS) was analyzed for sample that had been vaporized. A common analyte carrier, NaCl, and Ag were the primary samples analyzed. It was found that approximately 10% of the sample was retained in the transport tubing. This percentage could be varied by changing the total mass of sample vaporized, probably because of the smaller particles being formed. A temperature distribution of the argon gas in the transport tube was also obtained for maximum power heating of the ETV, for a one-second vaporization step, and for various flow rates.

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