Design and Application of a High Sensitivity Piezoresistive Pressure Sensor for Low Pressure Conditions

The relative research of low range and high anti-overload piezoresistive pressure sensor is carried out in this paper and a new kind of sensor chip structure, the double ends-four beam structure, is proposed. Trough the analysis, the sensor chip structure designed in this paper has high sensitivity and linearity. The chip structure is specially suit for the micro-pressure sensor. The theoretical analysis and finite element analysis is taken in this paper, which provide important scientific basis for the pressure sensor development.

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Design, fabrication and characterization of an annularly grooved membrane combined with rood beam piezoresistive pressure sensor for low pressure measurements

Sensors and Actuators A Physical ◽

10.1016/j.sna.2018.06.055 ◽

2018 ◽

Vol 279 ◽

pp. 525-536 ◽

Cited By ~ 8

Author(s):

Chuang Li ◽

Jianbing Xie ◽

Francisco Cordovilla ◽

Jinqiu Zhou ◽

R. Jagdheesh ◽

...

Keyword(s):

Pressure Sensor ◽

Low Pressure ◽

Pressure Measurements ◽

Piezoresistive Pressure Sensor ◽

Fabrication And Characterization

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Modeling and Simulation of the Thermal Drift Characteristics of the Piezoresistive Pressure Sensor

Additional Conferences (Device Packaging HiTEC HiTEN & CICMT) ◽

10.4071/hitec-rotmani-tha24 ◽

2010 ◽

Vol 2010 (HITEC) ◽

pp. 000373-000378

Author(s):

R. Otmani ◽

N. Benmoussa ◽

K. Ghaffour

Keyword(s):

Thermal Behavior ◽

Modeling And Simulation ◽

Pressure Sensor ◽

Pressure Sensors ◽

High Sensitivity ◽

Thermal Drift ◽

Piezoresistive Pressure Sensor ◽

Output Characteristics ◽

Piezoresistive Pressure Sensors

Piezoresistive pressure sensors based on Silicon have a large thermal drift because of their high sensitivity to temperature (ten times more sensitive to temperature than metals). So the study of the thermal behavior of these sensors is essential to define the parameters that cause the drift of the output characteristics. In this study, we adopted the behavior of 2nd degree gauges depending on the temperature. Then we model the thermal behavior of the sensor and its characteristics.

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Nano Carbon Black-Based High Performance Wearable Pressure Sensors

Nanomaterials ◽

10.3390/nano10040664 ◽

2020 ◽

Vol 10 (4) ◽

pp. 664 ◽

Cited By ~ 2

Author(s):

Junsong Hu ◽

Junsheng Yu ◽

Ying Li ◽

Xiaoqing Liao ◽

Xingwu Yan ◽

...

Keyword(s):

Carbon Black ◽

Pressure Sensor ◽

High Performance ◽

Large Scale ◽

Pressure Sensors ◽

High Sensitivity ◽

Wearable Electronics ◽

Atmospheric Pollutant ◽

Piezoresistive Pressure Sensor ◽

Nano Carbon

The reasonable design pattern of flexible pressure sensors with excellent performance and prominent features including high sensitivity and a relatively wide workable linear range has attracted significant attention owing to their potential application in the advanced wearable electronics and artificial intelligence fields. Herein, nano carbon black from kerosene soot, an atmospheric pollutant generated during the insufficient burning of hydrocarbon fuels, was utilized as the conductive material with a bottom interdigitated textile electrode screen printed using silver paste to construct a piezoresistive pressure sensor with prominent performance. Owing to the distinct loose porous structure, the lumpy surface roughness of the fabric electrodes, and the softness of polydimethylsiloxane, the piezoresistive pressure sensor exhibited superior detection performance, including high sensitivity (31.63 kPa−1 within the range of 0–2 kPa), a relatively large feasible range (0–15 kPa), a low detection limit (2.26 pa), and a rapid response time (15 ms). Thus, these sensors act as outstanding candidates for detecting the human physiological signal and large-scale limb movement, showing their broad range of application prospects in the advanced wearable electronics field.

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Design and Optimization of a Highly Sensitive and Linearity Piezoresistive Pressure Sensor Based on a Combination of Cross Beam-Peninsula-Membrane Structure

Volume 10: Micro- and Nano-Systems Engineering and Packaging ◽

10.1115/imece2017-70485 ◽

2017 ◽

Author(s):

Tran Anh Vang ◽

Xianmin Zhang ◽

Benliang Zhu

Keyword(s):

Pressure Sensor ◽

Pressure Sensors ◽

Single Crystal Silicon ◽

High Sensitivity ◽

Crystal Silicon ◽

Nonlinearity Error ◽

Trade Off ◽

Design And Optimization ◽

Piezoresistive Pressure Sensor ◽

Piezoresistive Pressure Sensors

The sensitivity and linearity trade-off problem has become the hotly important issues in designing the piezoresistive pressure sensors. To solve these trade-off problems, this paper presents the design, optimization, fabrication, and experiment of a novel piezoresistive pressure sensor for micro pressure measurement based on a combined cross beam - membrane and peninsula (CBMP) structure diaphragm. Through using finite element method (FEM), the proposed sensor performances as well as comparisons with other sensor structures are simulated and analyzed. Compared with the cross beam-membrane (CBM) structure, the sensitivity of CBMP structure sensor is increased about 38.7 % and nonlinearity error is reduced nearly 8%. In comparison with the peninsula structure, the maximum non-linearity error of CBMP sensor is decreased about 40% and the maximum deflection is extremely reduced 73%. Besides, the proposed sensor fabrication is performed on the n-type single crystal silicon wafer. The experimental results of the fabricated sensor with CBMP membrane has a high sensitivity of 23.4 mV/kPa and a low non-linearity of −0.53% FSS in the pressure range 0–10 kPa at the room temperature. According to the excellent performance, the sensor can be applied to measure micro-pressure lower than 10 kPa.

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Highly-Sensitive Textile Pressure Sensors Enabled by Suspended-Type All Carbon Nanotube Fiber Transistor Architecture

Micromachines ◽

10.3390/mi11121103 ◽

2020 ◽

Vol 11 (12) ◽

pp. 1103

Author(s):

Jae Sang Heo ◽

Keon Woo Lee ◽

Jun Ho Lee ◽

Seung Beom Shin ◽

Jeong Wan Jo ◽

...

Keyword(s):

Carbon Nanotube ◽

Pressure Sensor ◽

Pressure Range ◽

Pressure Sensors ◽

High Sensitivity ◽

Low Pressure ◽

Electronic Textiles ◽

Carbon Nanotube Fiber ◽

Cnt Fiber ◽

Walled Carbon Nanotubes

Among various wearable health-monitoring electronics, electronic textiles (e-textiles) have been considered as an appropriate alternative for a convenient self-diagnosis approach. However, for the realization of the wearable e-textiles capable of detecting subtle human physiological signals, the low-sensing performances still remain as a challenge. In this study, a fiber transistor-type ultra-sensitive pressure sensor (FTPS) with a new architecture that is thread-like suspended dry-spun carbon nanotube (CNT) fiber source (S)/drain (D) electrodes is proposed as the first proof of concept for the detection of very low-pressure stimuli. As a result, the pressure sensor shows an ultra-high sensitivity of ~3050 Pa−1 and a response/recovery time of 258/114 ms in the very low-pressure range of <300 Pa as the fiber transistor was operated in the linear region (VDS = −0.1 V). Also, it was observed that the pressure-sensing characteristics are highly dependent on the contact pressure between the top CNT fiber S/D electrodes and the single-walled carbon nanotubes (SWCNTs) channel layer due to the air-gap made by the suspended S/D electrode fibers on the channel layers of fiber transistors. Furthermore, due to their remarkable sensitivity in the low-pressure range, an acoustic wave that has a very tiny pressure could be detected using the FTPS.

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